An advanced subwavelength composite structure (SCS) consisting of the hexagonally arranged silicon nanopillars and the misaligned TiO2/SiO2 double-layer films was proposed on the surface of crystalline silicon (c-Si). After optimization through the finite difference time domain (FDTD) method, the SCS possesses omnidirectional ultra-broadband antireflection properties (average reflectance < 1.8% within 300–2500 nm) which are suitable for a photovoltaic-thermoelectric (PV-TE) hybrid system to enhance the full-spectrum solar energy utilization. Furthermore, the antireflection mechanism was studied in detail. The composition of nanopillars and double-layer films has combined the effect of interference, interpillar scattering and waveguide resonance to realize outstanding antireflection proprieties. The SCS was prepared on a 3 cm × 3 cm silicon wafer by ICP etching and magnetron sputtering, and the measured results matched well with the simulation results. Further, such antireflection concept can be applied to other materials for particular ultra-broadband spectrum regulation.
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