The desorption of gases from stainless steel surfaces treated by several different methods was measured by thermal desorption spectroscopy (TDS) and compared. The adsorption of contaminants on sample surfaces was also investigated by Auger electron spectroscopy (AES). It was shown that the electrochemical polishing and dissociated hydrogen gas treatment reduce the desorption of water and CO N 2 substantially. Mirror polishing or fine polishing processes were used to reduce outgassing rather than pool controlled electrochemical polishing. From AES, it was found that on the fresh metal surface a few layers of oxides were formed, and on that layer carbon compound contaminants accumulate, then N 2 gas is adsorbed very loosely. The adsorption state of carbon on a H treated sample was different from that on an untreated sample.