Frequency Surface Acoustic Wave Research Articles

An Improved Method to Compute the Mutual Capacitance between Interdigital Transducers in Radio Frequency Surface Acoustic Wave Filters

This paper proposes an improved method to calculate the mutual capacitance between interdigital transducer (IDT) electrodes to enhance the accuracy of the traditional coupling-of-modes (COM) model, which is commonly used to simulate surface acoustic wave (SAW) filters and duplexers. In this method, the boundary element method (BEM) is adopted to obtain the capacitance per unit length in a layered medium, while the partial capacitance (PC) method is used to derive the effective relative permittivity of the multi-layered IDT. Numerical results from commercially available software are provided for comparison with the results calculated using the proposed method. The consistent results verify the validity and accuracy of this method, which also demonstrates significantly faster calculation speed compared to commercially available software. Precise electrical response prediction of a dual-mode SAW (DMS) filter can be achieved by applying this method to the COM model, and this ultra-fast calculation method can also be included in filter design optimization.

Rayleigh wave propagation in centrosymmetric materials with micro-stiffness, flexoelectric and micro-inertia effects

A theoretical investigation of Rayleigh waves propagation in polarized media has been carried out using a reformulated flexoelectric theory for isotropic dielectrics with micro-inertia effect. Within this non-classical theory, the internal energy density is the functional of the strain tensor, dilatation gradient, deviatoric part of stretch gradient and rotation gradient tensors, polarization vector, and polarization gradient. The obtained system of governing equations additionally contains three material length-scale parameters to account the micro-stiffness effect, one material constant to capture the micro-inertia effect, two flexoelectric constants to describe the flexoelectric effect and three length scale parameters related to the polarization gradient. To solve the coupled governing equations, the method of Lamé-type potentials for mechanical displacement and electric polarization vectors is used. The influences of various factors such as micro-stiffness, flexoelectricity, electric quadrupoles and micro-inertia effects on the phase velocity of the Rayleigh waves in a homogeneous isotropic half-space are studied. It is found that above effects become significant with the increase of the wavenumber. This study can be important for the investigation of high frequency surface acoustic waves in dielectric materials.

Monolithic Strong Coupling of Topological Surface Acoustic Wave Resonators on Lithium Niobate.

Coherent phonon transfer via high-quality factor (Q) mechanical resonator strong coupling has garnered significant interest. Yet, the practical applications of these strongly coupled resonator devices are largely constrained by their vulnerability to fabrication defects. In this study, topological strong coupling of gigahertz frequency surface acoustic wave (SAW) resonators with lithium niobate is achieved. The nanoscale grooves are etched onto the lithium niobate surface to establish robust SAW topological interface states (TISs). By constructing phononic crystal (PnC) heterostructures, a strong coupling of two SAW TISs, achieving a maximum Rabi splitting of 22MHz and frequency quality factor product fQm of ≈1.2 × 1013Hz, is realized. This coupling can be tuned by adjusting geometric parameters and a distinct spectral anticrossing is experimentally observed. Furthermore, a dense wavelength division multiplexing device based on the coupling of multiple TISs is demonstrated. These findings open new avenues for the development of practical topological acoustic devices for on-chip sensing, filtering, phonon entanglement, and beyond.

Shake It Off! Acoustic Manipulation of Lipid Vesicles for Mass Spectrometric Analysis.

Analyzing lipid assemblies, including liposomes and extracellular vesicles (EVs), is challenging due to their size, diverse composition, and tendency to aggregate. Such vesicles form with a simple phospholipid bilayer membrane, and they play important roles in drug discovery and delivery. The use of mass spectrometry (MS) allows for broad analysis of lipids from different classes; however, their release from the higher order structural aggregates is typically achieved by chemical means. Mechanical disruption by high frequency surface acoustic waves (SAW) is presented as an appealing alternative to preparing lipid vesicles for MS sampling. In this work, SAWs used to disrupt liposomes allow for the direct analysis of their constituent lipids by employing SAW nebulization with corona discharge (CD) ionization. We explore the effects of duration, frequency, and incorporation of nonpolar lipids, including cholesterol, on the SAW's ability to disrupt the liposome. We also report on the successful MS analysis of liposome-derived lipids along with cytochrome C in solution, thus demonstrating applications to aqueous samples and native MS conditions.

Ultrahigh frequency shear-horizontal acoustic wave humidity sensor with ternary nanocomposite sensing layer

Surface acoustic wave (SAW) technology is promising for humidity monitoring due to its digital output, small size, large-scale production and wireless passive capability, but there are major challenges to achieve ultra-high sensitivity and fast responses using the conventional SAW devices. Herein, ultrahigh frequency (4.7 GHz and 5.9 GHz) shear-horizontal (SH) SAW devices were developed and a ternary nanocomposite strategy of graphene quantum dots/polyethyleneimine/silicon dioxide nanoparticles (GQDs-PEI-SiO2 NPs) was proposed as a sensitive layer to achieve ultrahigh sensitivity and fast response. This ternary material system was constructed by modifying the surface of SiO2 NPs with the PEI through an electrostatic force, and then adsorbing the GQDs onto the PEI through hydrogen bonds. Compared with the conventional low frequency SAW devices, the ultrahigh frequency SH-SAW devices showed exceptionally ultra-high sensitivity (2.4 MHz/%RH, 1000 times as high as a 202 MHz SAW device), fast response (20 s/5 s), excellent linearity, and good repeatability in the range of 20–80% RH. These superior performances are attributed to ultrahigh frequency of SAW devices, large specific surface areas of the nanocomposite (which exposed multiple hydrophilic groups in PEI and GQDs), and high vapor pressure of convex spherical curved liquid surface (which accelerated the adsorption and desorption of water molecules).

In-droplet cell lysis of AC16 human cardiomyocyte cells via surface acoustic waves.

Although several lysis methods are available, biomedical applications are pushing the demand for miniaturised systems and thus for new ways to lyse cells in small volumes. In this work, we demonstrate in-droplet cell lysis of AC16 human cardiomyocyte cells in 20 μL droplets using high frequency surface acoustic waves. The acoustic streaming leads to high shear flow creating porous or breaking the cell membrane and releasing intracellular material. Contrary to previous work where the lysis efficiency is measured by a cell-permeant dye that can be used to determine cell viability, here we propose to quantify the DNA extracted from the cells as a measure of the lysis efficiency. This reagent-free method provides a valuable cell lysis alternative for many biological and biomedical applications, particularly for the development of point-of-care platforms.

Elucidating the oscillation instability of sessile drops triggered by surface acoustic waves

Surface acoustic waves (SAWs) are used in droplet microfluidics for operations on sessile droplets, such as internal mixing, directional motion, or nebulization. An unsolved problem has been to understand how high frequency (MegaHz) SAWs can counterintuitively cause low frequency (10-500 Hz) oscillations on the drop free surface, which is known to enhance drop mobility. Using simultaneous measurements of the free-surface dynamics and internal acoustic pressure, we find that the drop oscillation instability results from coupling between an intracavity acoustic mode excited by the SAW, and an inertia-capillary surface eigenmode, through amplitude modulation and delayed radiation pressure feedback.

Overcoming the Intrinsic Limitations of Fast Charging Lithium‐Ion Batteries Using Integrated Acoustic Streaming

A lithium‐ion battery's maximum charge rate and energy density are intrinsically limited by the ion diffusion rate in the electrolyte. Most research focuses on materials science solutions to this problem, with gradual improvement over the years. A mechanical solution is proposed to integrate an MHz‐order frequency surface acoustic wave (SAW) device into an existing 1.8 Ah multilayered Li‐ion pouch cell to enhance the ion diffusion rate and the overall battery performance. Both the charging rate and cycling lifetime are improved from SAW. At a 6C (10 min) charge and C/3 discharge rate, typical of electric vehicle applications, integrating SAW into the Li‐ion cell doubles the energy density and maintains at least 72% of the battery's initial capacity after 2000 cycles. Moreover, using SAW quantifiably reduces battery degradation in these conditions as determined by optical imaging, scanning electron microscopy, X‐ray diffraction, and neutron diffraction. The use of SAW appears to offer a method to avoid undesirable Li metal plating on the graphite anode during charging, and leads to a much longer battery lifetime and good charge capacity, all despite rapid charging.

Focused surface acoustic wave induced nano-oscillator based reservoir computing

We demonstrate using micromagnetic simulations that a nanomagnet array excited by surface acoustic waves (SAWs) can work as a reservoir. An input nanomagnet is excited with focused SAW and coupled to several nanomagnets, seven of which serve as output nanomagnets. To evaluate memory effect and computing capability, we study the short-term memory (STM) and parity check (PC) capacities, respectively. The SAW (4 GHz carrier frequency) amplitude is modulated to provide a sequence of sine and square waves of 100 MHz frequency. The responses of the selected output nanomagnets are processed by reading the envelope of their magnetization states, which is used to train the output weights using the regression method. For classification, a random sequence of 100 square and sine wave samples is used, of which 80% are used for training, and the rest are used for testing. We achieve 100% training and 100% testing accuracy. The average STM and PC are calculated to be ∼4.69 and ∼5.39 bits, respectively, which is indicative of the proposed acoustically driven nanomagnet oscillator array being well suited for physical reservoir computing applications. The energy dissipation is ∼2.5 times lower than a CMOS-based echo-state network. Furthermore, the reservoir is able to accurately predict Mackey-Glass time series up to several time steps ahead. Finally, the ability to use high frequency SAW makes the nanomagnet reservoir scalable to small dimensions, and the ability to modulate the envelope at a lower frequency (100 MHz) adds flexibility to encode different signals beyond the sine/square waves classification and Mackey-Glass predication tasks demonstrated here.

Real-time laser ultrasonic monitoring of laser-induced thermal processes

Intra- and inter-layer integrity of components fabricated with advanced manufacturing techniques, such as laser powder bed fusion, is dependent upon rapid heating, melting, and solidification processes. There is a need for new techniques to provide in situ feedback of these processes. Here a laser-based ultrasonic technique to probe thermal effects induced by a high-power continuous wave laser in titanium samples is described. Numerical simulations were performed to show that, for a spatially uniform heating beam, laser-induced surface acoustic waves are strongly influenced by surface heating conditions, are dispersive in the case of rapid heating, and that an abrupt velocity reduction happens upon the onset of surface melting. Furthermore, laser-based ultrasound experimental results which monitor the transient change of surface wave travel time associated with high power laser surface heating are provided. A pulsed laser is used to generate high frequency surface acoustic waves that propagate through the laser-heated region and are detected using a photorefractive crystal-based interferometer. Qualitative agreement is observed between theory and experiment with both showing a rapid reduction in the surface wave velocity at the onset of illumination and further decrease in surface wave velocity associated with melting. It is demonstrated that changes in the surface wave velocity can be used to track local heating and detect the onset of surface melting in real time.

Surface Acoustic Wave Mitigation of Precipitate Deposition on a Solid Surface─An Active Self-Cleaning Strategy.

We demonstrate the application of a 20 MHz frequency surface acoustic wave (SAW) in a solid substrate to render its surface “self-cleaning”, redirecting the deposition of precipitating mass onto a nearby inert substrate. In our experiment, we confine a solution of poly(methyl methacrylate) polymer and a volatile toluene solvent between two substrates, lithium niobate and glass, at close proximity. We render the glass surface low energy by employing hydrophobic coating. In the absence of SAW excitation, we observe that the evaporation of the solvent yields polymer coating on the higher energy lithium niobate surface, while the glass surface is mostly devoid of polymer deposits. The application of a propagating SAW in the lithium niobate substrate mitigates the deposition of the polymer on its surface. As a response, we observe an increase in the deposition of the polymer precipitates on glass. Above a SAW power threshold, the polymer appears to deposit solely on glass, leaving the surface of the lithium niobate substrate devoid of polymer mass.

Fabrication of high frequency SAW devices using tri-layer lift-off photolithography

A tri-layer lift-off photolithography technique is presented to enable the fabrication of surface acoustic wave (SAW) devices with near GHz fundamental operating frequencies. SAW devices require high-quality micron-scale features for high frequency operation, a requirement that challenges traditional UV photolithography techniques. The presented process is a modified version of a previously reported tri-layer photolithography process intended for Si and SiO2 substrates which allows for compatibility with materials that are piezoelectric and pyroelectric, often used as the substrate in SAW devices. The process uses a lithographic tri-layer consisting of layers of lift-off resist (LOR) on the bottom, back anti-reflection coating (BARC) in the middle, and photoresist (PR) on top. The addition of the BARC layer prevents back reflection of exposure light, improves the structural integrity of the lithographic stack, and decouples the PR and LOR development, improving resolution by a factor of two over traditional lift-off photolithography techniques. We demonstrate the fabrication of a SAW device with an interdigital transducer (IDT) pitch of 4 μm (minimum feature size of 1 μm) on 128° Y-X cut lithium niobate. The device produces a dip in the measured S11 spectrum at 994.5 MHz, corresponding to the fundamental operating frequency of the device. The fundamental operating frequency of the SAW device is also determined theoretically via numerical modelling and found to be 995.5 MHz. The process thus enables the reliable fabrication of high frequency SAW devices that exhibit excellent agreement with numerical results.

Acoustic enhancement of aerobic greywater treatment processes

Increasing the efficiency of aerobic greywater treatment is crucial to ensure that greywater recycling can be effectively implemented in individual and community households. In this work, we demonstrate that exposing greywater samples to low intensity high frequency (MHz-order) surface acoustic waves (SAWs) during the aerobic treatment process can result in increases in the total suspended solids (TSS), chemical oxygen demand (COD) and biochemical oxygen demand (BOD) removal efficiencies by 24%, 24% and 21%, respectively, over a 2 h aerobic digestion period, and up to 37% (TSS removal efficiency) over a 4 h period compared to the unexposed controls. These values are considerably higher than that typically obtained with lower frequency (kHz-order) bulk ultrasound, particularly because the SAW does not cause denaturation of bacteria in the greywater suspension unlike its low frequency counterpart. The SAW enhancement in removal efficiencies can primarily be attributed to the acoustic radiation pressure and acoustic streaming that it generates, which act to efficiently deagglomerate the bacterial flocculates in addition to promoting more uniform mixing of the suspended waste, bacteria and dissolved oxygen in the sample. Also, the results indicate that in the presence of air bubbles in the greywater, the MHz-order SAW treatment remains effective. Additionally, we show that it is possible to further increase the TSS removal efficiency by about twofold through a hybrid process. This ability to significantly accelerate the rate of aerobic digestion to achieve a given removal efficiency level highlights the potential of this novel low-cost technology for improving domestic greywater treatment.

Generation and detection of 50 GHz surface acoustic waves by extreme ultraviolet pulses

We use femtosecond extreme ultraviolet pulses derived from a free electron laser to excite and probe surface acoustic waves (SAWs) on the (001) surface of single crystal SrTiO3. SAWs are generated by a pair of 39.9 nm pulses crossed at the sample with the crossing angle defining the SAW wavelength at 84 nm. Detection of SAWs is performed via diffraction of a time-delayed 13.3 nm probe pulse by SAW-induced surface ripples. Despite the low reflectivity of the sample in the extreme ultraviolet range, the reflection mode detection is found to be efficient because of an increase in the diffraction efficiency for shorter wavelengths. We describe a methodology for extracting the SAW attenuation in the presence of a thermal grating, which is based on measuring the decay of oscillations at twice the SAW frequency. The proposed approach can be used to study ultrahigh frequency SAWs in a broad range of materials and will bridge the wave vector gap in surface phonon spectroscopy between Brillouin scattering and He atom scattering.

A detection electronics enabling ultimate suppression of leakage signals in high-speed and phase-sensitive laser probe for radio frequency surface and bulk acoustic wave devices

This paper proposes a detection electronics which enables ultimate suppression of leakage signals in high-speed and phase-sensitive laser probe for radio frequency surface and bulk acoustic wave devices. Another merit is simpler circuit configuration than the conventional one. First, the complete suppression of leakage signals is verified. Then impact of the oscillator phase noise is examined by utilizing oscillators with various phase noise performance. This is because the proposed electronics is expected to be more sensitive to the oscillator phase noise than the conventional one. The result indicates that although performance degradation appears, it is practically negligible. In this electronics, the absolute phase can not be determined. This is not a demerit for use in the laser probe because additional phase shift caused by cables and printed circuit board is hard to calibrate.

Optomechanical wave mixing by a single quantum dot

Wave mixing is an archetypical phenomenon in bosonic systems. In optomechanics, the bidirectional conversion between electromagnetic waves or photons at optical frequencies and elastic waves or phonons at radio frequencies is building on precisely this fundamental principle. Surface acoustic waves (SAWs) provide a versatile interconnect on a chip and thus enable the optomechanical control of remote systems. Here we report on the coherent nonlinear three-wave mixing between the coherent fields of two radio frequency SAWs and optical laser photons via the dipole transition of a single quantum dot exciton. In the resolved sideband regime, we demonstrate fundamental acoustic analogues of sum and difference frequency generation between the two SAWs and employ phase matching to deterministically enhance or suppress individual sidebands. This transfer between the acoustic and optical domains is described by theory that fully takes into account direct and virtual multiphonon processes. Finally, we show that the precision of the wave mixing is limited by the frequency accuracy of modern radio frequency electronics.

A novel high frequency SAWR based sensor combined with living cells for shellfish toxin quantitative determination

Shellfish toxin can be easily found in seafood, and bring potential harm to human health. Nowadays some analytical methods are used for shellfish toxin quantitative detection. However, there are some disadvantages in these analytical methods such as time consuming, high cost, etc. Therefore, a more suitable method is in demand. In this study, a novel method using high frequency surface acoustic wave resonator (SAWR) based sensor combined with living cells was developed for shellfish toxin continuous monitoring. ECA9706 cell lines were used as the sensing elements to establish the sensor device for DSP toxin okadaic acid (OA) quantitative monitoring. The sensor device is in serial with SAWR. SAWR output frequency was recorded for detecting characterization. The OA concentration of prepared solutions could be characterized by using SAWR sensor, and good linear relationship between sensor responses and OA concentration is achieved. Liquid chromatography tandem mass spectrometry (LC–MS/MS) is used for characterization of OA content in shellfish extract. Good linear relationship between OA content and the concentration determination provided by SAWR sensor. HEK293 cells were fixed on electrode and utilized as negative control. The results showed that ECA9706 cell-based sensor had selective responses to OA. This method is promising in shellfish toxins rapid quantitative determination.

Surface acoustic waves increase magnetic domain wall velocity

Domain walls in magnetic thin films are being explored for memory applications and the speed at which they move has acquired increasing importance. Magnetic fields and currents have been shown to drive domain walls with speeds exceeding 500 m/s. We investigate another approach to increase domain wall velocities, using high frequency surface acoustic waves to create standing strain waves in a 3 micron wide strip of magnetic film with perpendicular anisotropy. Our measurements, at a resonant frequency of 248.8 MHz, indicate that domain wall velocities increase substantially, even at relatively low applied voltages. Our findings suggest that the strain wave derived effective magnetic field acts as an additional driver for domain wall motion.

Surface Brillouin scattering study of tantalum nitride (TaN) thin films.

Elastic properties of TaN films on (001)Si are investigated by surface Brillouin scattering (SBS). The velocity dispersion is obtained from Brillouin frequency shifts and surface acoustic wave phase velocities derived from measured SBS spectra. The observed Rayleigh surface acoustic and Sezawa waves indicate a soft on hard configuration. The elastic stiffnesses from the best fit of the calculated and measured spectra were C11=288 and C44=80GPa. Using these elastic constants in the surface elastodynamic Green's function yielded theoretical Brillouin spectra in agreement with measured spectra. Employing a least squares fitting procedure to the elastic constants gives uncertainties in C11 and C44 as ±3.7 and ±2.5GPa, respectively.

Epitaxial Aluminum Scandium Nitride Super High Frequency Acoustic Resonators

This paper demonstrates super high frequency (SHF) Lamb and surface acoustic wave resonators based on single-crystal orientation Aluminum Scandium Nitride (AlScN) thin films grown on silicon substrates by molecular beam epitaxy (MBE). We report on the experimental frequency response and electromechanical properties of 400 nm-thick crystalline AlScN acoustic resonators with up to 12% Sc/(Sc+Al) ratio. The film thickness is optimized for operation at the SHF range, targeting emerging wireless communication standards, such as 4G LTE/5G. We report on high-performance acoustic devices that take advantage of the crystallinity, and high piezoelectric properties of 400 nm-thick epitaxial AlScN films. Our work presents enhanced effective electromechanical coupling coefficients (k <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">eff</sub> <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ) up to 5.3% and unloaded quality factors (Q <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">m</sub> ) of ~192 at 3-10 GHz. However, fabrication challenges due to the high-stress levels of sub-micron AlScN epi-layers grown on Si substrates remain challenging and will be discussed in this paper. [2019-0231].