Experimental results for the nucleation and growth of thin films from the vapour phase are commonly interpreted on the basis of a kinetic nucleation model. It is assumed that the adatoms form a quasi two-dimensional gas on the substrate surface and that nucleation takes place by collisions of single atoms. During the initial stages, comdensation is incomplete and a large fraction of adatoms may re-evaporate before being trapped by other adatoms or clusters. The mean residence time is determined by the adatom adsorption energy E a and the surface vibration frequency τ 0 −1 via the Frenkel equation. We investigated the residence times of silver atoms on various substrates by time-of-flight spectroscopy. In addition, the angular and velocity distributions of the scattered atoms were examined. For silver on NaCl and on KBr the residence time was below the detection limit of 40 μs for temperatures above 25 °C, leading to estimated adsorption energies below 0.6 eV and 0.46 eV respectively. Within the error limits, these data are consistent with results from nucleation experiments. For silver on amorphous carbon, two different binding states were indicated: a dominant state with E a=1.3 eV and a less populated state with E a=1.8 eV. For silver on polycrystalline tungsten, at a somewhat lowered detection limit, residence times in the range from 30 μs to 0.3 s were measured for temperatures between 1450 and 900 °C, resulting in E a=2.9 eV and τ 0=7.9×10 −14 s, in close agreement with data from other researchers. In all cases cosine distributions of the scattered atoms were found. This indicates, together with measured velocity distributions, almost complete accommodation of the adatoms.