Stable and efficient mass exchange is crucial to the combustion stability of a dual-mode scramjet. In subsonic mode, the progression of mass exchange between the cavity fluid and the mainstream, which is controlled by the cavity shear layer, is different from the scramjet mode due to the weak compressibility effects. However, mass exchange mode studies in the subsonic mode are rare. In this study, experimental research has been conducted to obtain the flow structure of Mach 0.3 and 0.5 inflow over a rectangular cavity and reveal the properties of mass exchange using particle image velocimetry technology. The results reveal the weak compressibility effects and geometry effects on the mass exchange by analyzing the growth rate and turbulence characteristics of the cavity shear layer. The mass exchange between the cavity fluid and mainstream is determined based on the vertical velocity along the cavity lip line. When the flow Mach number increased from 0.3 to 0.5, the growth rate of the cavity shear layer decreases due to the weak compressibility effects. Also, the growth rate of the cavity shear layer is smaller than that of the compressible free shear layer due to the effects of recirculation within the cavity. For length-to-depth (L/D) ratios ranging from 0.8 to 1.2, the cavity shear-layer growth rate decreases with increasing L/D. However, at an L/D of 1.5, the shear-layer growth rate increases, which changes the mass exchange mode. Finally, the effects of increasing the Mach number (Mach = 0.3 versus 0.5) show that the L/D ratio at the “crossover” point of the mass exchange mode transition is reduced (L/D = 1.5 versus 1.2) due to the weak compressibility at a higher Mach number.