Silicon carbide has specific advantages over other structural ceramics, such as high temperature capability and excellent chemical stability. So silicon carbide is a promising candidate for high temperature structural materials as well as for corrosion resistance applications. Like brittle materials, however, strength of silicon carbide is closely related to the size and distribution of surface flaws such as machining-induced cracks, because of their inherent low toughness. Thus, a smooth polishing procedure after grinding is often needed in order to reduce the size of surface flaws, leading to an increase in cost of ceramic components. Moreover, the allowable flaws in ceramics are so small that it is almost impossible to detect the flaws and also difficult to remove them completely using machining techniques. As a result, the structural integrity of a ceramic component is seriously affected. A method, to heal a crack, could be considered to overcome this problem. Studies on crack healing have been reported for alumina [1–3], silicon nitride [4–6], silicon nitride/silicon carbide composite [7], Mullite/silicon carbide composite [8] and silicon carbide [9–12]. Our research group recently proposed a mechanism of crack healing and strengthening by pre-oxidation procedure in silicon carbide [11, 12]. The major observation is that the residual stress produced by the thermal expansion mismatch between silica (within cracks) and surrounding silicon carbide played a significant role in the strength increase. As the crack healing technique can be adopted in practical strength applications, considerable advantages can be expected either in the reliability or in the machining and inspection costs of ceramic components. In the above perspectives, the effect of pre-oxidation on strength of silicon carbide with grinding-induced surface cracks was investigated and reported in the present communication. SiC material (Hexoloy, Carborandom, Inc., USA) was received in a plate form. The microstructure of the material consisted of SiC grains smaller than 10 lm and average grain size is about 5 lm (see Fig. 1). The material was machined into flexure specimens of 3 mm · 4 mm · 40 mm. The specimen surface was ground using diamond wheels with girt sizes of 127 lm, 64 lm, 42 lm and 32 lm. Grinding conditions were: 3,300 rpm, 35 m/s peripheral wheel speed and 10 lm depth of cut. The specimens were mounted on a holder in such a manner that grinding was oriented along the width of the specimens (perpendicular to the tensile stresses applied during the strength measurement). The ground specimens were then heat-treated at 1,500 C for 50 h in air. The heating rate was 10 C/min and cooling was done by turning off the electric power of the furnace. For comparison, some heat treatment experiments were also conducted in vacuum under similar conditions. The microstructure was characterized by field-emission scanning electron microscopy (FESEM), Energy Dispersive X-ray (EDX) and X-ray Diffraction (XRD). The strength of specimens was measured using a four-point bending fixture with outer and inner spans of 30 mm and 10 mm, respectively at a crosshead speed of 0.5 mm/min, as per the standard procedure [13]. Specimens were placed in the fixture such that the surface containing grinding-induced cracks was in M. C. Chu (&) AE S. J. Cho AE G. J. Yoon AE H. M. Park Division of Chemical Metrology and Materials Evaluation, Korea Research Institute of Standard and Science, 1 Doryong-dong, Yuseong, Deajeon 305-600, Korea e-mail: chumin@kriss.re.kr