Formation Of Metal Carbonyls Research Articles

Parametric Study of NiFe and NiFeCo High Density Plasma Etching Using CO / NH 3

Maximum etch rates of were obtained for and thin films in inductively coupled plasmas (ICP). There is a small chemical contribution to the etch mechanism (i.e., formation of metal carbonyls) as determined by a comparison with Ar and physical sputtering. The etch rates are a strong function of ion flux, ion energy, pressure, substrate temperature, and discharge composition. The discharge should be ‐rich to achieve the highest etch rates. Several different mask materials were investigated, including photoresist, thermal oxide, and deposited oxide. Photoresist etches very rapidly in and use of a hard mask is necessary to achieve pattern transfer. Due to its physically dominated nature, the chemistry appears suited to shallow etch depth (≤0.5 μm) applications, but mask erosion leads to sloped feature sidewalls for deeper features. © 1999 The Electrochemical Society. All rights reserved.

Heats of Combustion and Formation of Metal Carbonyls. III. Iron Pentacarbonyl; The Nature of the Bonding in Metal Carbonyls1

ADVERTISEMENT RETURN TO ISSUEPREVArticleNEXTHeats of Combustion and Formation of Metal Carbonyls. III. Iron Pentacarbonyl; The Nature of the Bonding in Metal Carbonyls1F. A. Cotton, A. K. Fischer, and G. WilkinsonCite this: J. Am. Chem. Soc. 1959, 81, 4, 800–803Publication Date (Print):March 1, 1959Publication History Published online1 May 2002Published inissue 1 March 1959https://doi.org/10.1021/ja01513a010RIGHTS & PERMISSIONSArticle Views267Altmetric-Citations71LEARN ABOUT THESE METRICSArticle Views are the COUNTER-compliant sum of full text article downloads since November 2008 (both PDF and HTML) across all institutions and individuals. These metrics are regularly updated to reflect usage leading up to the last few days.Citations are the number of other articles citing this article, calculated by Crossref and updated daily. Find more information about Crossref citation counts.The Altmetric Attention Score is a quantitative measure of the attention that a research article has received online. Clicking on the donut icon will load a page at altmetric.com with additional details about the score and the social media presence for the given article. Find more information on the Altmetric Attention Score and how the score is calculated. Share Add toView InAdd Full Text with ReferenceAdd Description ExportRISCitationCitation and abstractCitation and referencesMore Options Share onFacebookTwitterWechatLinked InReddit PDF (524 KB) Get e-Alerts Get e-Alerts

Heats of Combustion and Formation of Metal Carbonyls. II. Nickel Carbonyl1

ADVERTISEMENT RETURN TO ISSUEPREVArticleNEXTHeats of Combustion and Formation of Metal Carbonyls. II. Nickel Carbonyl1A. K. Fischer, F. A. Cotton, and G. WilkinsonCite this: J. Am. Chem. Soc. 1957, 79, 9, 2044–2046Publication Date (Print):May 1, 1957Publication History Published online1 May 2002Published inissue 1 May 1957https://doi.org/10.1021/ja01566a005RIGHTS & PERMISSIONSArticle Views157Altmetric-Citations40LEARN ABOUT THESE METRICSArticle Views are the COUNTER-compliant sum of full text article downloads since November 2008 (both PDF and HTML) across all institutions and individuals. These metrics are regularly updated to reflect usage leading up to the last few days.Citations are the number of other articles citing this article, calculated by Crossref and updated daily. Find more information about Crossref citation counts.The Altmetric Attention Score is a quantitative measure of the attention that a research article has received online. Clicking on the donut icon will load a page at altmetric.com with additional details about the score and the social media presence for the given article. Find more information on the Altmetric Attention Score and how the score is calculated. Share Add toView InAdd Full Text with ReferenceAdd Description ExportRISCitationCitation and abstractCitation and referencesMore Options Share onFacebookTwitterWechatLinked InReddit PDF (415 KB) Get e-Alerts Get e-Alerts

Heats of Combustion and Formation of Metal Carbonyls. I. Chromium, Molybdenum and Tungsten Hexacarbonyls

ADVERTISEMENT RETURN TO ISSUEPREVArticleNEXTHeats of Combustion and Formation of Metal Carbonyls. I. Chromium, Molybdenum and Tungsten HexacarbonylsF. A. Cotton, A. K. Fischer, and G. WilkinsonCite this: J. Am. Chem. Soc. 1956, 78, 20, 5168–5171Publication Date (Print):October 1, 1956Publication History Published online1 May 2002Published inissue 1 October 1956https://doi.org/10.1021/ja01601a010RIGHTS & PERMISSIONSArticle Views120Altmetric-Citations29LEARN ABOUT THESE METRICSArticle Views are the COUNTER-compliant sum of full text article downloads since November 2008 (both PDF and HTML) across all institutions and individuals. These metrics are regularly updated to reflect usage leading up to the last few days.Citations are the number of other articles citing this article, calculated by Crossref and updated daily. Find more information about Crossref citation counts.The Altmetric Attention Score is a quantitative measure of the attention that a research article has received online. Clicking on the donut icon will load a page at altmetric.com with additional details about the score and the social media presence for the given article. Find more information on the Altmetric Attention Score and how the score is calculated. Share Add toView InAdd Full Text with ReferenceAdd Description ExportRISCitationCitation and abstractCitation and referencesMore Options Share onFacebookTwitterWechatLinked InReddit PDF (544 KB) Get e-Alerts Get e-Alerts