A series of Ce1-xMxO2 abrasives with different types and amounts of doping were prepared by molten salt method. The properties of abrasives were characterized in detail by XRD, SEM, EDS and XPS. For all doping types, the morphology of abrasives changes from spherical to octahedral and their size decreases continuously with the doping increases. The Ce3+ concentration on the CeO2 abrasive surface is also increased by doping. The density functional theory indicates the vacancy formation energy of CeO2 systems are reduced by doping. The mechanism of transition from Ce4+ to Ce3+ induced in CeO2 system by doping is also discussed. CMP experiments show that the efficiency of the abrasives is significantly enhanced by doping. The MRR of Y3+, La3+ and Pr3+ doped CeO2 abrasives increased by 56 %, 40 % and 44 % compared with the pure. It is also shown that the appropriate amount (x = 0.08) should be considered in order to obtain excellent performance. It is confirmed that the substrate surface with almost no damage and low roughness is obtained after polishing. The removal mechanism of CeO2 abrasives on SiO2 substrate is comprehensively analyzed by considering the size, morphology and defects of the abrasives.