Abstract Fabrication of 2D material devices under ambient conditions faces challenges from humidity-dependent interfacial interactions and doping effects due to intercalated water layers. This study explores adhesion and force dynamics for a monolayer of molybdenum disulfide (MoS2) on silicon dioxide (SiO2) as a function of humidity, using atomic force microscopy (AFM). At low humidity (<10 %RH), capillary forces dominate due to a liquid bridge forming between the AFM tip and sample. At intermediate humidity 40 %RH, an additional water layer intercalates between the MoS2 and the SiO2 and the capillary force model alone is insufficient to describe the tip-sample interactions. Force-distance spectroscopy reveals additional force dynamics related to MoS2-lifting and dynamics in the intercalated water. Above 60 %RH, water condenses on the MoS2 and the capillary interactions are reduced. Understanding and identifying these interactions is crucial for optimising deposition of 2D materials under humid conditions.
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