Focused Ion Beam Lift-out Method Research Articles

Quantitative laser atom probe analyses of hydrogenation-disproportionated Nd–Fe–B powders

We report a successful atom probe tomography of hydrides in hydrogenation-disproportionated Nd-Fe-B powder using a green femtosecond laser. The atom probe specimens were prepared from one particle of powder using the focused ion beam lift-out method. The atom probe tomography taken from an α-Fe/NdH(2) structure suggested that B and Ga (trace added element) were partitioned in the NdH(2) phase. The hydrogen concentration of 64 at% determined from the atom probe analysis was in excellent agreement with the stoichiometry of the NdH(2) phase.

Cross-sectional transmission electron microscopy of thin graphite films grown by chemical vapor deposition

Graphene has been the subject of an extraordinary upsurge of interest due to its intriguing properties and potential applications. Recent work has shown that excellent electronic properties are exhibited by large-scale ultrathin graphite films, grown by chemical vapor deposition on a polycrystalline metal and transferred to a device-compatible surface. The properties of such multilayered graphene films could depend strongly on film thickness and uniformity. Unlike the other common methods for analysis in the literature, cross-sectional transmission electron microscopy (TEM) would provide direct, straightforward analysis of film thickness and quality, as well as provide a means to investigate specific defect structures (e.g. wrinkles). However, this approach has not often been pursued due to the sensitivity of graphite to the electron and ion beam damage in such a procedure. Here, an approach to creating cross-sectional TEM samples using a focused ion beam lift-out method is presented, along with the resulting TEM images of thin graphite films and several wrinkle defects. Samples removed from as-grown films on polycrystalline nickel and films removed from measured devices are presented. The benefits and limitations to this approach are discussed.

Nanocrystalline diamond on SiO 2 fiber: A new class of hybrid material

We report a template technique for the fabrication of high density nanocrystalline diamond (NCD)-coated silica ( a-SiO 2) nanofibers with diameters of 1–5 μm. This method includes the synthesis of templates ( a-SiO 2 nanofibers) by conventional Vapor–Liquid–Solid method and the conformal coating of the nanofibers with nanodiamond by Microwave Plasma Chemical Vapor Deposition technique in hydrogen-deficient conditions. A detailed micro-structural analysis was performed to probe the interaction of the NCD grains with a-SiO 2 nanofibers. The specimen for Transmission Electron Microscopy was prepared using Focused Ion Beam lift-out method. Room temperature micro-Raman was performed to study the crystalline quality of the NCD-coated silica nanofibers. Field electron emission of as-synthesized NCD-coated silica nanofibers was observed with a threshold field of ~ 3 V/µm.

Sample preparation for nanoanalytical electron microscopy using the FIB lift-out method and low energy ion milling

Thinning specimens to electron transparency for electron microscopy analysis can be done by conventional (2 - 4 kV) argon ion milling or focused ion beam (FIB) lift-out techniques. Both these methods tend to leave ‘‘mottling’’ visible on thin specimen areas, and this is believed to be surface damage caused by ion implantation and amorphisation. A low energy (250 - 500 V) Argon ion polish has been shown to greatly improve specimen quality for crystalline silicon samples. Here we investigate the preparation of technologically important materials for nanoanalysis using conventional and lift-out methods followed by a low energy polish in a GentleMill™ low energy ion mill. We use a low energy, low angle (6 - 8°) ion beam to remove the surface damage from previous processing steps. We assess this method for the preparation of technologically important materials, such as steel, silicon and GaAs. For these materials the ability to create specimens from specific sites, and to be able to image and analyse these specimens with the full resolution and sensitivity of the STEM, allows a significant increase of the power and flexibility of nanoanalytical electron microscopy.

Transmission electron microscope specimen preparation of Zn powders using the focused ion beam lift-out technique

Particles of Zn powder have been studied to show that high-quality scanning electron microscope (SEM) and transmission electron microscope (TEM) specimens can be rapidly produced from a site-specific region on a chosen particle by the focused ion beam (FIB) lift-out technique. A TEM specimen approximately 20-µm long by 5-µm wide was milled to electron transparency, extracted from the bulk particle, and micromanipulated onto a carbon coated copper mesh TEM grid. Using the FIB lift-out method, we were able to prepare a site-specific TEM specimen from a difficult material in under 3 hours. The TEM analysis of the lift-out specimen revealed a large amount of thin area free from characteristic signs of damage that may be observed as a result of conventional argon ion milling. The overall microstructure of the specimen prepared by the FIB lift-out method was consistent with samples prepared by conventional metallographic methods. A grain size of ∼10 to 20 µm was observed in all specimens by both TEM and SEM analysis. Light optical microscopy revealed the presence of internal voids in ∼10 to 20 pct of all particles. The SEM analysis showed the voids to extend over ∼70 pct of the particle volume in some cases.

Applications of the FIB lift-out technique for TEM specimen preparation.

A site-specific technique for cross-section transmission electron microscopy specimen preparation of difficult materials is presented. A focused ion beam was used to slice an electron transparent membrane from a specific area of interest within a bulk sample. Micromanipulation lift-out procedures were then used to transport the electron-transparent specimen to a carbon-coated copper grid for subsequent TEM analysis. The FIB (focused ion beam) lift-out technique is a fast method for the preparation of site-specific TEM specimens. The versatility of this technique is demonstrated by presenting cross-sectioned TEM specimens from several types of materials systems, including a multi-layered integrated circuit on a Si substrate, a galvanized steel, a polycrystalline SiC ceramic fiber, and a ZnSe optical ceramic. These specimens have both complex surface geometry and interfaces with complex chemistry. FIB milling was performed sequentially through different layers of cross-sectioned materials so that preferential sputtering was not a factor in preparing TEM specimens. The FIB lift-out method for TEM analysis is a useful technique for the study of complex materials systems for TEM analysis.