Focused Electron Beam Induced Deposition Research Articles

Electron-induced deposition using Fe(CO)4MA and Fe(CO)5 - effect of MA ligand and process conditions.

The electron-induced decomposition of Fe(CO)4MA (MA = methyl acrylate), which is a potential new precursor for focused electron beam-induced deposition (FEBID), was investigated by surface science experiments under UHV conditions. Auger electron spectroscopy was used to monitor deposit formation. The comparison between Fe(CO)4MA and Fe(CO)5 revealed the effect of the modified ligand architecture on the deposit formation in electron irradiation experiments that mimic FEBID and cryo-FEBID processes. Electron-stimulated desorption and post-irradiation thermal desorption spectrometry were used to obtain insight into the fate of the ligands upon electron irradiation. As a key finding, the deposits obtained from Fe(CO)4MA and Fe(CO)5 were surprisingly similar, and the relative amount of carbon in deposits prepared from Fe(CO)4MA was considerably less than the amount of carbon in the MA ligand. This demonstrates that electron irradiation efficiently cleaves the neutral MA ligand from the precursor. In addition to deposit formation by electron irradiation, the thermal decomposition of Fe(CO)4MA and Fe(CO)5 on an Fe seed layer prepared by EBID was compared. While Fe(CO)5 sustains autocatalytic growth of the deposit, the MA ligand hinders the thermal decomposition in the case of Fe(CO)4MA. The heteroleptic precursor Fe(CO)4MA, thus, offers the possibility to suppress contributions of thermal reactions, which can compromise control over the deposit shape and size in FEBID processes.

Atomic force microscopy in mechanical measurements of single nanowires

In this paper, we present the results of mechanical measurement of single nanowires (NWs) in a repeatable manner. Substrates with specifically designed mechanical features were used for NW placement and localization for measurements of properties such as Young's modulus or tensile strength of NW with an atomic force microscopy (AFM) system. Dense arrays of zinc oxide (ZnO) nanowires were obtained by one-step anodic oxidation of metallic Zn foil in a sodium bicarbonate electrolyte and thermal post-treatment. ZnO NWs with a hexagonal wurtzite structure were fixed to the substrates using focused electron beam-induced deposition (FEBID) and were annealed at different temperatures in situ. We show a 10-fold change in the properties of annealed materials as well as a difference in the properties of the NW materials from their bulk values with pre-annealed Young modulus at the level of 20 GPa and annealed reaching 200 GPa. We found the newly developed method to be much more versatile, allowing for in situ operations of NWs, including measurements with different methods of scanning probe microscopy.

Sidewall angle tuning in focused electron beam-induced processing.

Structures fabricated using focused electron beam-induced deposition (FEBID) have sloped sidewalls because of the very nature of the deposition process. For applications this is highly undesirable, especially when neighboring structures are interconnected. A new technique combining FEBID and focused electron beam-induced etching (FEBIE) has been developed to fabricate structures with vertical sidewalls. The sidewalls of carbon FEBID structures have been modified by etching with water and it is shown, using transmission electron microscopy imaging, that the sidewall angle can be tuned from outward to inward by controlling the etch position on the sidewall. A surprising under-etching due to the emission of secondary electrons from the deposit was observed, which was not indicated by a simple model based on etching. An analytical model was developed to include continued etching once the deposit has been removed at the exposed pixel. At this stage the secondary electrons from the substrate then cause the adsorbed water molecules to become effective in etching the deposit from below, resulting in under-etched structures. The evolution of the sidewall angle during etching has also been experimentally observed in a scanning electron microscope by continuously monitoring the secondary electron detector signal.

DFT Insights into FEBID Stability: Condensed Study of Gold(I) Complexes with Phosphine Ligands

AbstractThis work examines the durability and responsiveness of XAuL precursors in the context of synthesizing Au‐nanomaterials. The study used density functional theory (DFT) simulations to look at the shapes, bond dissociation energies, and thermodynamic properties of a number of XAuL precursors. Within this framework, X denotes halogens Cl, Br, or I, whereas L denotes ligands such as PH3, PF3, PMe3, P(OMe)3, and P(NH2)3. Our investigations indicate that there is no discernible relationship between the lengths of XAuL bonds and binding energies. Small changes in bond dissociation free energy (▵BDG) serve as indicators of neutral precursors with low stability. The aforementioned precursors are essential for chemical vapor deposition. There are clear patterns that depend on the size of the halogen and the type of ligand when the ▵BDG values and interatomic distances in the XAuL precursors are looked at. Adding an electron to the precursor changes the length of the XAuL bond, which makes the ΔBDG values of anionic precursors lower than those of neutral precursors. The study is mostly about looking at how ligands L and XAu fragments interact with each other by looking at frontier molecular orbitals (FMOs). It has been shown that higher energy gap (ΔBDG) values lead to better interaction between the HOMO and LUMO orbitals of ligand L and XAu fragments. Furthermore, the research of electrophilicity emphasizes the significance of π‐back donation and the covalent energy involved in the bonding between XAu‐PR3. Thermodynamic study indicates that the dissociation processes exhibit more spontaneity under elevated temperatures and reduced pressures. The size of halogens affects spontaneity, with larger halogens exhibiting higher negative ▵BDG values. The study shows that IAuPMe3, BrAuPMe3, and ClAuPMe3 are stable starting materials for making gold nanoparticles using focused electron beam‐induced deposition (FEBID) in normal situations. This extensive study enhances our understanding of precursor design for Au‐nanofabrication by providing valuable insights into the stability, reactivity, and thermodynamic characteristics of XAuL precursors.

Design, fabrication, and characterization of kinetic-inductive force sensors for scanning probe applications.

We describe a transducer for low-temperature atomic force microscopy based on electromechanical coupling due to a strain-dependent kinetic inductance of a superconducting nanowire. The force sensor is a bending triangular plate (cantilever) whose deflection is measured via a shift in the resonant frequency of a high-Q superconducting microwave resonator at 4.5 GHz. We present design simulations including mechanical finite-element modeling of surface strain and electromagnetic simulations of meandering nanowires with large kinetic inductance. We discuss a lumped-element model of the force sensor and describe the role of an additional shunt inductance for tuning the coupling to the transmission line used to measure the microwave resonance. A detailed description of our fabrication is presented, including information about the process parameters used for each layer. We also discuss the fabrication of sharp tips on the cantilever using focused electron beam-induced deposition of platinum. Finally, we present measurements that characterize the spread of mechanical resonant frequency, the temperature dependence of the microwave resonance, and the sensor's operation as an electromechanical transducer of force.

A combined gas-phase dissociative ionization, dissociative electron attachment and deposition study on the potential FEBID precursor [Au(CH3)2Cl]2

Motivated by the potential of focused-electron-beam-induced deposition (FEBID) in the fabrication of functional gold nanostructures for application in plasmonic and detector technology, we conducted a comprehensive study on [Au(CH3)2Cl]2 as a potential precursor for such depositions. Fundamental electron-induced dissociation processes were studied under single collision conditions, and the composition and morphology of FEBID deposits fabricated in an ultrahigh-vacuum (UHV) chamber were explored on different surfaces and at varied beam currents. In the gas phase, dissociative ionization was found to lead to significant carbon loss from this precursor, and about 50% of the chlorine was on average removed per dissociative ionization incident. On the other hand, in dissociative electron attachment, no chlorine was removed from the parent molecule. Contrary to these observations, FEBID in the UHV setup was found to yield a quantitative loss and desorption of the chlorine from the deposits, an effect that we attribute to electron-induced secondary and tertiary reactions in the deposition process. We find this precursor to be stable at ambient conditions and to have sufficient vapor pressure to be suitable for use in HV instruments. More importantly, in the UHV setup, FEBID with [Au(CH3)2Cl]2 yielded deposits with high gold content, ranging from 45 to 61 atom % depending on the beam current and on the cleanliness of the substrates surface.

Pillar Growth by Focused Electron Beam-Induced Deposition Using a Bimetallic Precursor as Model System: High-Energy Fragmentation vs. Low-Energy Decomposition.

Electron-induced fragmentation of the HFeCo3(CO)12 precursor allows direct-write fabrication of 3D nanostructures with metallic contents of up to >95 at %. While microstructure and composition determine the physical and functional properties of focused electron beam-induced deposits, they also provide fundamental insights into the decomposition process of precursors, as elaborated in this study based on EDX and TEM. The results provide solid information suggesting that different dominant fragmentation channels are active in single-spot growth processes for pillar formation. The use of the single source precursor provides a unique insight into high- and low-energy fragmentation channels being active in the same deposit formation process.

Spectral Tuning of Plasmonic Activity in 3D Nanostructures via High‐Precision Nano‐Printing

AbstractPlasmonic nanoparticles reveal unique optical properties and are increasingly incorporated into commercial products and technologies, ranging from photovoltaics to biological and chemical sensors. Shifting and tuning their plasmonic response according to the targeted application strongly depends on the ability to control the geometry in every detail and has not been reliably demonstrated for complex 3D nano‐architectures yet. Following that motivation, it herein presents how Focused Electron Beam Induced Deposition (FEBID), a highly flexible additive 3D direct‐write technology with spatial nano‐scale precision, is used for the controlled and tunable fabrication of plasmonically active 3D nanostructures that exhibit highly concentrated, well defined and predictable local plasmonic resonances. As model systems, planar Au nanowires and 3D nano‐tips of various geometries are prepared via FEBID and plasmonically characterized via scanning transmission electron microscopy based electron energy loss spectroscopy (STEM‐EELS) mapping measurements. The findings are complemented with corresponding plasmon simulations, revealing very good agreement with experimental findings. This way, on‐demand spectral tuning of the plasmonic response becomes accessible via upfront modeling and design of suitable 3D nanostructures, to achieve customized plasmonic responses, therefore paving the way for yet unrealized plasmonic applications in 3D space.

Structural Analysis of Si(OEt)4 Deposits on Au(111)/SiO2 Substrates at the Nanometer Scale Using Focused Electron Beam-Induced Deposition.

The focused electron beam-induced deposition (FEBID) process was used by employing a GeminiSEM with a beam characteristic of 1 keV and 24 pA to deposit pillars and line-shaped nanostructures with heights between 9 nm and 1 μm and widths from 5 nm to 0.5 μm. All structures have been analyzed to their composition looking at a desired Si/O/C content measuring a 1:2:0 ratio. The C content of the structure was found to be ∼over 60% for older deposits kept in air (∼at room temperature) and less than 50% for later deposits, only 12 h old. Upon depositing Si(OEt)4 at high rates and at a deposition temperature of under 0 °C, the obtained Si content of our structures was between 10 and 15 atom % (compositional percentage). The FEBID structures have been deposited on Au(111)/SiO2. The Au(111) was chosen as a substrate for the deposition of Si(OEt)4 due to its structural and morphological properties. With its surface granulation following a Chevron pattern and surface defects having an increased contribution to the changes in the composition of the final structure content, the Au(111) surface characteristic behavior at the deposition of Si(OEt)4 is an increase in the O ratio and a reduction in the nanodeposit heights.

3D Magnonic Conduits by Direct Write Nanofabrication.

Magnonics is a rapidly developing domain of nanomagnetism, with application potential in information processing systems. Realisation of this potential and miniaturisation of magnonic circuits requires their extension into the third dimension. However, so far, magnonic conduits are largely limited to thin films and 2D structures. Here, we introduce 3D magnonic nanoconduits fabricated by the direct write technique of focused-electron-beam induced deposition (FEBID). We use Brillouin light scattering (BLS) spectroscopy to demonstrate significant qualitative differences in spatially resolved spin-wave resonances of 2D and 3D nanostructures, which originates from the geometrically induced non-uniformity of the internal magnetic field. This work demonstrates the capability of FEBID as an additive manufacturing technique to produce magnetic 3D nanoarchitectures and presents the first report of BLS spectroscopy characterisation of FEBID conduits.

Dissociative electron attachment to gold(I)-based compounds: 4,5-dichloro-1,3-diethyl-imidazolylidene trifluoromethyl gold(I).

With the use of proton-NMR and powder XRD (XRPD) studies, the suitability of specific Au-focused electron beam induced deposition (FEBID) precursors has been investigated with low electron energy, structure, excited states and resonances, structural crystal modifications, flexibility, and vaporization level. 4,5-Dichloro-1,3-diethyl-imidazolylidene trifluoromethyl gold(I) is a compound that is a uniquely designed precursor to meet the needs of focused electron beam-induced deposition at the nanostructure level, which proves its capability in creating high purity structures, and its growing importance in other AuImx and AuClnB (where x and n are the number of radicals, B = CH, CH3, or Br) compounds in the radiation cancer therapy increases the efforts to design more suitable bonds in processes of SEM (scanning electron microscopy) deposition and in gas-phase studies. The investigation performed of its powder shape using the XRPD XPERT3 panalytical diffractometer based on CoKα lines shows changes to its structure with change in temperature, level of vacuum, and light; the sensitivity of this compound makes it highly interesting in particular to the radiation research. Used in FEBID, though its smaller number of C, H, and O atoms has lower levels of C contamination in the structures and on the surface, it replaces these bonds with C-Cl and C-N bonds that have lower bond-breaking energy. However, it still needs an extra purification step in the deposition process, either H2O, O2, or H jets.

Role of the Molecular Environment in Quenching the Irradiation-Driven Fragmentation of Fe(CO)5: A Reactive Molecular Dynamics Study

Irradiation-driven fragmentation and chemical transformations of molecular systems play a key role in nanofabrication processes where organometallic compounds break up due to the irradiation with focused particle beams. In this study, reactive molecular dynamics simulations have been performed to analyze the role of the molecular environment on the irradiation-induced fragmentation of molecular systems. As a case study, we consider the dissociative ionization of iron pentacarbonyl, Fe(CO)5, a widely used precursor molecule for focused electron beam-induced deposition. In connection to recent experiments, the irradiation-induced fragmentation dynamics of an isolated Fe(CO)5+ molecule is studied and compared with that of Fe(CO)5+ embedded into an argon cluster. The appearance energies of different fragments of isolated Fe(CO)5+ agree with the recent experimental data. For Fe(CO)5+ embedded into an argon cluster, the simulations reproduce the experimentally observed suppression of Fe(CO)5+ fragmentation and provide an atomistic-level understanding of this effect. Understanding irradiation-driven fragmentation patterns for molecular systems in environments facilitates the advancement of atomistic models of irradiation-induced chemistry processes involving complex molecular systems.

Controlling electron beam induced deposition of iron from Fe(CO)5: Inhibition of autocatalytic growth by NH3 and reactivation by electron irradiation

Focused electron beam induced deposition (FEBID) is a versatile direct-write approach to produce nanostructures from organometallic precursor molecules. Ideally, the material is deposited only when precursors interact with and are dissociated by the impinging electrons so that the process is spatially defined by the electron beam. In reality, however, thermal surface reactions as known from chemical vapor deposition can also contribute to the dissociation of the precursors. They often produce material with higher purity but can also impair the spatial selectivity of the electron-induced deposit growth. This work aims at an approach to suppress such thermal chemistry and to re-enable it within an area defined by the electron beam. We have, thus, used a surface science approach to study the inhibition of autocatalytic growth (AG) of Fe from Fe(CO)5 by NH3 and the reactivation of AG on the surface by electron irradiation. The experiments were performed under ultrahigh vacuum conditions using thermal desorption spectrometry to characterize adsorption and reactivity of Fe(CO)5 on Fe seed layers that were prepared by dosing Fe(CO)5 during electron irradiation of the entire sample surface (referred to as EBID herein). Auger electron spectroscopy was used to monitor deposit growth and to reveal the potential inhibition of AG by NH3 as well as the reactivation of the surface by electron irradiation. The results show that adsorption of NH3 slows down AG on deposits prepared by EBID but not on Fe layers produced by AG. Electron irradiation after adsorption of NH3 reactivates the surface and thus re-establishes AG. We propose that co-injection of NH3 during FEBID from Fe(CO)5 could be a viable strategy to suppress unwanted AG contributions and, therefore, enhance the spatial control of the deposition process.

Superconducting single-photon detectors fabricated via a focused electron beam-induced deposition process

Superconducting detectors have become essential devices for high-performance single-photon counting over a wide wavelength range with excellent time resolution. Detector fabrication typically relies on resist-based lithography processes, which can limit possibilities for device integration, e.g., on unconventional substrates. Here, we demonstrate a resist-free fabrication route for realizing superconducting nanowire single-photon detectors based on focused electron beam-induced deposition. Utilizing direct writing of a Pt–C mask, we achieved nanowire meanders with linewidths below 100 nm, operated them as superconducting devices for the detection of visible and near-infrared photons, and showed detector integration on side-polished optical fibers. Being compatible with device fabrication on curved irregular surfaces, our approach could enable superconducting detector integration in complex configurations.

Additive Manufacturing of Co3Fe Nano-Probes for Magnetic Force Microscopy.

Magnetic force microscopy (MFM) is a powerful extension of atomic force microscopy (AFM), which mostly uses nano-probes with functional coatings for studying magnetic surface features. Although well established, additional layers inherently increase apex radii, which reduce lateral resolution and also contain the risk of delamination, rendering such nano-probes doubtful or even useless. To overcome these limitations, we now introduce the additive direct-write fabrication of magnetic nano-cones via focused electron beam-induced deposition (FEBID) using an HCo3Fe(CO)12 precursor. The study first identifies a proper 3D design, confines the most relevant process parameters by means of primary electron energy and beam currents, and evaluates post-growth procedures as well. That way, highly crystalline nano-tips with minimal surface contamination and apex radii in the sub-15 nm regime are fabricated and benchmarked against commercial products. The results not only reveal a very high performance during MFM operation but in particular demonstrate virtually loss-free behavior after almost 8 h of continuous operation, thanks to the all-metal character. Even after more than 12 months of storage in ambient conditions, no performance loss is observed, which underlines the high overall performance of the here-introduced FEBID-based Co3Fe MFM nano-probes.

Long-Term Performance of Magnetic Force Microscopy Tips Grown by Focused Electron Beam Induced Deposition

High-resolution micro- and nanostructures can be grown using Focused Electron Beam Induced Deposition (FEBID), a direct-write, resist-free nanolithography technology which allows additive patterning, typically with sub-100 nm lateral resolution, and down to 10 nm in optimal conditions. This technique has been used to grow magnetic tips for use in Magnetic Force Microscopy (MFM). Due to their high aspect ratio and good magnetic behavior, these FEBID magnetic tips provide several advantages over commercial magnetic tips when used for simultaneous topographical and magnetic measurements. Here, we report a study of the durability of these excellent candidates for high-resolution MFM measurements. A batch of FEBID-grown magnetic tips was subjected to a systematic analysis of MFM magnetic contrast for 30 weeks, using magnetic storage tape as a test specimen. Our results indicate that these FEBID magnetic tips operate effectively over a long period of time. The magnetic signal was well preserved, with a maximum reduction of 60% after 21 weeks of recurrent use. No significant contrast degradation was observed after 30 weeks in storage.

Novel type of whisker-tip cantilever based on GaN microrods for atomic force microscopy

High-resolution scanning probe microscopy (SPM) is a fundamental and efficient technology for surface characterization of modern materials at the subnanometre scale. The bottleneck of SPM is the probe and scanning tip. Materials with stable electrical, thermal, and mechanical properties for high-aspect-ratio (AR) tips are continuously being developed to improve their accuracy. Among these, GaN is emerging as a significant contender that serves as a replacement for standard Si probes. In this paper, for the first time, we present an approach that demonstrates the application of GaN microrods (MRs) as high-AR SPM probes. GaN MRs were grown using molecular beam epitaxy, transferred and mounted on a cantilever using focused electron beam-induced deposition and milled in a whisker tip using a focused ion beam in a scanning electron/ion microscope. The presence of a native oxide layer covering the GaN MR surface was confirmed by X-ray photoelectron spectroscopy. Current-voltage map measurements are also presented to indicate the elimination of the native oxide layer from the tip surface. The utility of the designed probes was tested using conductive atomic force microscopy and a 24-hour durability test in contact mode atomic force microscopy. Subsequently, the graphene stacks were imaged.

Fast and Efficient Simulation of the FEBID Process with Thermal Effects

Focused electron-beam-induced deposition (FEBID) is a highly versatile direct-write approach with particular strengths in the 3D nanofabrication of functional materials. Despite its apparent similarity to other 3D printing approaches, non-local effects related to precursor depletion, electron scattering and sample heating during the 3D growth process complicate the shape-true transfer from a target 3D model to the actual deposit. Here, we describe an efficient and fast numerical approach to simulate the growth process, which allows for a systematic study of the influence of the most important growth parameters on the resulting shape of the 3D structures. The precursor parameter set derived in this work for the precursor Me3PtCpMe enables a detailed replication of the experimentally fabricated nanostructure, taking beam-induced heating into account. The modular character of the simulation approach allows for additional future performance increases using parallelization or drawing on the use of graphics cards. Ultimately, beam-control pattern generation for 3D FEBID will profit from being routinely combined with this fast simulation approach for optimized shape transfer.

Nanostructured Poly(ethylene glycol) Diacrylate-Based Hydrogels Printed by Focused Electron Beam-Induced Deposition: Implications for Nanosensors

Hydrogels, especially poly(ethylene glycol)-based hydrogels, have received considerable attention due to their excellent performance. However, the commonly used millimeter or micron size of hydrogels limits their higher resolution sensing applications. Using liquid-phase, focused electron-beam-induced deposition is a feasible way to print nanostructured hydrogels. In this work, a device based on a scanning electron microscope was designed to fabricate nanopatterned hydrogels and the electron scattering distribution to induce hydrogel cross-linking was obtained by an optimized Monte Carlo simulation with a Pearson correlation coefficient analysis. We discuss the factors affecting the swelling ratio of the poly(ethylene glycol)diacrylate hydrogel and conclude that the feature size of the hydrogel is about 280 nm in diameter under certain conditions. This study provides a solution for the miniaturized preparation of nanohydrogels, which will help improve the ability of nanosensors to obtain more high density of arrays.

3D Nanoprinting Replication Enhancement Using a Simulation-Informed Analytical Model for Electron Beam Exposure Dose Compensation.

3D nanoprinting, using focused electron beam-induced deposition, is prone to a common structural artifact arising from a temperature gradient that naturally evolves during deposition, extending from the electron beam impact region (BIR) to the substrate. Inelastic electron energy loss drives the Joule heating and surface temperature variations lead to precursor surface concentration variations due, in most part, to temperature-dependent precursor surface desorption. The result is unwanted curvature when prescribing linear segments in 3D objects, and thus, complex geometries contain distortions. Here, an electron dose compensation strategy is presented to offset deleterious heating effects; the Decelerating Beam Exposure Algorithm, or DBEA, which corrects for nanowire bending a priori, during computer-aided design, uses an analytical solution derived from information gleaned from 3D nanoprinting simulations. Electron dose modulation is an ideal solution for artifact correction because variations in electron dose have no influence on temperature. Thus, the generalized compensation strategy revealed here will help advance 3D nanoscale printing fidelity for focused electron beam-induced deposition.