Fluoride Transfer Research Articles

Cone Angles Quantify and Predict the Affinity and Reactivity of Anion Complexes between Trifluoroborates and Rigid Macrocycles.

Steric manipulation is a known concept in molecular recognition but there is currently no linear free energy relationship correlating sterics to the stability of receptor-anion complexes nor to the reactivity of the bound anion. By analogy to Tolman cone angles in cation coordination chemistry, we explore how to define and correlate cone angles of organo-trifluoroborates (R-BF3 -) to the affinities observed for cyanostar-anion binding. We extend the analogy to a rare investigation of the anion's reactivity and how it changes upon binding. The substituent on the anion is used to define the cone angle, θ. A series of 10 anions were studied including versions with ethynyl, ethylene, and ethyl substituents to tune steric bulk across the sp, sp2 and sp3 hybridized α-carbons bearing 0, 1 and 2 hydrogen atoms. A linear relationship between affinity and cone angle is observed for anions bearing substituents larger than the -BF3 - headgroup. This correlation predicted affinities of two new anions to within ±5 %. We explored how complexation affects the reactivity of fluoride exchange. The yield of fluoride transfer from R-BF3 - to Lewis acid triphenylborane is correlated with cone angle. We predict that other rigid macrocycles, like commercially available bambusuril, could follow these trends.

Cone Angles Quantify and Predict the Affinity and Reactivity of Anion Complexes between Trifluoroborates and Rigid Macrocycles

AbstractSteric manipulation is a known concept in molecular recognition but there is currently no linear free energy relationship correlating sterics to the stability of receptor‐anion complexes nor to the reactivity of the bound anion. By analogy to Tolman cone angles in cation coordination chemistry, we explore how to define and correlate cone angles of organo‐trifluoroborates (R−BF3−) to the affinities observed for cyanostar‐anion binding. We extend the analogy to a rare investigation of the anion's reactivity and how it changes upon binding. The substituent on the anion is used to define the cone angle, θ. A series of 10 anions were studied including versions with ethynyl, ethylene, and ethyl substituents to tune steric bulk across the sp, sp2 and sp3 hybridized α‐carbons bearing 0, 1 and 2 hydrogen atoms. A linear relationship between affinity and cone angle is observed for anions bearing substituents larger than the −BF3− headgroup. This correlation predicted affinities of two new anions to within ±5 %. We explored how complexation affects the reactivity of fluoride exchange. The yield of fluoride transfer from R−BF3− to Lewis acid triphenylborane is correlated with cone angle. We predict that other rigid macrocycles, like commercially available bambusuril, could follow these trends.

Fluoride Abstraction Induced by Tris(pentafluoroethyl)difluorophosphorane: A Convenient Way to Synthesize Cationic N-Heterocyclic Carbene- and Cyclic (Alkyl)(amino)carbene-Ligated Copper Alkyne and Arene Complexes.

We herein report the convenient synthesis of different N-heterocyclic carbene (NHC)- and cyclic (alkyl)(amino)carbene (cAAC)-ligated copper cations using the weakly coordinating tris(pentafluoroethyl)trifluorophosphate counterion (FAP anion, [(C2F5)3PF3]-). The reaction of the fluorido complexes [(carbene)CuF] (carbene = NHC, cAACMe) 2a-2f and the tris(pentafluoroethyl)difluorophosphorane (C2F5)3PF2 in the presence of alkynes or arenes led to fluoride transfer from Cu to the phosphorane with formation of the cationic transition metal complexes [(carbene)Cu(L)]+ and the weakly coordinating counteranion [(C2F5)3PF3]- (FAP). Using this method, the complexes [(IDipp)Cu(L)]+FAP- (IDipp = 1,3-bis(2,6-di-iso-propylphenyl)-imidazolin-2-ylidene; L = PhC≡CPh, 4d; PhC≡CMe, 5d), [(cAACMe)Cu(L)]+FAP- (cAACMe = 1-(2,6-di-iso-propylphenyl)-3,3,5,5-tetramethyl-pyrrolidin-2-ylidene; L = PhC≡CPh, 4f; PhC≡CMe, 5f), [(SIDipp)Cu(C6Me6)]+FAP- (6e), (SIDipp = 1,3-bis(2,6-di-iso-propylphenyl)-imidazolidine-2-ylidene), and [(cAACMe)Cu(C6Me6)]+FAP- (6f) have been synthesized and characterized. The complexes [(IDipp)Cu(C6Me6)]+FAP- (6d) and [(cAACMe)Cu(C6Me6)]+FAP- (6f) have been used as catalysts for the copper(I)-catalyzed cycloaddition of benzyl azide to terminal alkynes.

Metallomimetic C-F Activation Catalysis by Simple Phosphines.

Delivering metallomimetic reactivity from simple p-block compounds is highly desirable in the search to replace expensive, scarce precious metals by cheap and abundant elements in catalysis. This contribution demonstrates that metallomimetic catalysis, involving facile redox cycling between the P(III) and P(V) oxidation states, is possible using only simple, cheap, and readily available trialkylphosphines without the need to enforce unusual geometries at phosphorus or use external oxidizing/reducing agents. Hydrodefluorination and aminodefluorination of a range of fluoroarenes was realized with good to very good yields under mild conditions. Experimental and computational mechanistic studies show that the phosphines undergo oxidative addition of the fluoroaromatic substrate via a Meisenheimer-like transition state to form a fluorophosphorane. This undergoes a pseudotransmetalation step with a silane, via initial fluoride transfer from P to Si, to give experimentally observed phosphonium ions. Hydride transfer from a hydridosilicate counterion then leads to a hydridophosphorane, which undergoes reductive elimination of the product to reform the phosphine catalyst. This behavior is analogous to many classical transition-metal-catalyzed reactions and so is a rare example of both functional and mechanistically metallomimetic behavior in catalysis by a main-group element system. Crucially, the reagents used are cheap, readily available commercially, and easy to handle, making these reactions a realistic prospect in a wide range of academic and industrial settings.

Speciation and kinetics of fluoride transfer from tetra-n-butylammonium difluorotriphenylsilicate ('TBAT').

Tetra-n-butylammonium difluorotriphenylsilicate (TBAT) is a conveniently handled anhydrous fluoride source, commonly used as a surrogate for tetra-n-butylammonium fluoride (TBAF). While prior studies indicate that TBAT reacts rapidly with fluoride acceptors, little is known about the mechanism(s) of fluoride transfer. We report on the interrogation of the kinetics of three processes in which fluoride is transferred from TBAT, in THF and in MeCN, using a variety of NMR methods, including chemical exchange saturation transfer, magnetisation transfer, diffusion analysis, and 1D NOESY. These studies reveal ion-pairing between the tetra-n-butylammonium and difluorotriphenylsilicate moieties, and a very low but detectable degree of fluoride dissociation, which then undergoes further equilibria and/or induces decomposition, depending on the conditions. Degenerate exchange between TBAT and fluorotriphenylsilane (FTPS) is very rapid in THF, inherently increases in rate over time, and is profoundly sensitive to the presence of water. Addition of 2,6-di-tert-butylpyridine and 3 Å molecular sieves stabilises the exchange rate, and both dissociative and direct fluoride transfer are shown to proceed in parallel under these conditions. Degenerate exchange between TBAT and 2-naphthalenyl fluorosulfate (ARSF) is not detected at the NMR timescale in THF, and is slow in MeCN. For the latter, the exchange is near-fully inhibited by exogenous FTPS, indicating a predominantly dissociative character to this exchange process. Fluorination of benzyl bromide (BzBr) with TBAT in MeCN-d3 exhibits moderate progressive autoinhibition, and the initial rate of the reaction is supressed by the presence of exogenous FTPS. Overall, TBAT can act as a genuine surrogate for TBAF, as well as a reservoir for rapidly-reversible release of traces of it, with the relative contribution of the pathways depending, inter alia, on the identity of the fluoride acceptor, the solvent, and the concentration of endogenous or exogenous FTPS.

Deoxyfluorination of 1°, 2°, and 3° Alcohols by Nonbasic O-H Activation and Lewis Acid-Catalyzed Fluoride Shuttling.

A method for deoxyfluorination of aliphatic primary, secondary, and tertiary alcohols is reported, employing a nontrigonal phosphorus triamide for base-free alcohol activation in conjunction with an organic soluble fluoride donor and a triarylborane fluoride shuttling catalyst. Mechanistic experiments are consistent with a reaction that proceeds by the collapse of an oxyphosphonium fluoroborate ion pair with fluoride transfer. The substrate scope complements existing deoxyfluorination methods and enables the preparation of homochiral secondary and tertiary alkylfluorides by stereoinversion of the substrate alcohol.

C-F Activation of Fluorinated Esters Using Photocatalytically Generated Diaminoalkyl Radical.

A method for hydrofluoroalkylation of alkenes with trifluoroacetic esters under visible light irradiation affording difluorinated products is described. The reaction involves readily available trimethyltriazinane as a shoichiometric reducing agent, which generates a diamino-substituted alkyl radical serving as a strong electron donor. It is believed that the cleavage of the C-F bond by a triazinane-derived radical involves single electron reduction coupled with fluoride transfer.

Interfacial Topochemical Fluoridation of MAPbI3 by Fluoropolymers

Herein it is demonstrated that, under conditions relevant to perovskite synthesis (>140 °C in air), fluoride can topochemically react across the interface between a halide perovskite and a fluoropolymer when in close contact, thereby creating a small quantity of strongly bonded lead fluoride species. The quantity increases with temperature and processing duration. Photoinduced charge carrier lifetime provides a metric for the resulting changes in electronic structure of the perovskite. Under short-duration and/or moderate temperature processing, fluoride transfer to the perovskite yields increased carrier lifetimes, up to 3-fold longer than control samples, which is attributed to passivation of surface defects. Under more forcing conditions, the trend reverses: excessive fluoridation leads to shortened carrier lifetimes, which is ascribed to substantial interfacial formation of PbF2. It is demonstrated that an interface with bulk crystalline PbF2 quenches perovskite photoluminescence, likely due to PbF2 serving as an electron acceptor for the conduction band of MAPbI3.

BF3-Catalyzed Intramolecular Fluorocarbamoylation of Alkynes via Halide Recycling

A BF3-catalyzed atom-economical fluorocarbamoylation reaction of alkyne-tethered carbamoyl fluorides is reported. The catalyst acts as both a fluoride source and Lewis acid activator, thereby enabling the formal insertion of alkynes into strong C-F bonds through a halide recycling mechanism. The developed method provides access to 3-(fluoromethylene) oxindoles and γ-lactams with excellent stereoselectivity, including fluorinated derivatives of known protein kinase inhibitors. Experimental and computational studies support a stepwise mechanism for the fluorocarbamoylation reaction involving a turnover-limiting cyclization step, followed by internal fluoride transfer from a BF3-coordinated carbamoyl adduct. For methylene oxindoles, a thermodynamically driven Z-E isomerization is facilitated by a transition state with aromatic character. In contrast, this aromatic stabilization is not relevant for γ-lactams, which results in a higher barrier for isomerization and the exclusive formation of the Z-isomer.

Influence of Metal Coordination on the Gas-Phase Chemistry of the Positional Isomers of Fluorobenzoate Complexes.

The fragmentation behaviors of the o-, m-, and p-fluorobenzoate complexes of La3+, Ce3+, Fe3+, Cu2+, and UO22+ were investigated by electrospray ionization mass spectrometry, and the corresponding reaction mechanisms were explored by density functional theory (DFT) calculations. Fluoride transfer product LaIIIFCl3-/CeIIIFCl3- and decarboxylation product LaIIICl3(C6H4F)-/CeIIICl3(C6H4F)- were observed when the carboxylate precursors LaIIICl3(C6H4FCO2)-/CeIIICl3(C6H4FCO2)- were subjected to collision-induced dissociation. The variation in product ratios, which is not obvious in the meta and para cases, qualitatively follows the increasing overall energy barrier and reaction endothermicity of the two-step CO2/C6H4 elimination mechanism, and this aligns with the increase in U-F distance in the ortho, meta, and para decarboxylation product isomers. In contrast, the mass spectra of FeIIICl3(C6H4FCO2)-/CuIICl2(C6H4FCO2)- are dominated by the reduction product FeCl3-/CuCl2- regardless of the fluorobenzoate isomer. DFT/B3LYP calculations show that the two-step CO2/C6H4F elimination pathways are comparable in energy for all three positional isomers. It is energetically more favorable to give the reduction product than the fluoride transfer product, which is opposite to the lanthanum cases. Although the decarboxylation product was observed for all three UVIO2Cl2(C6H4FCO2)- isomers, the ortho isomer behaves more similarly to LaIIICl3(C6H4FCO2)-/CeIIICl3(C6H4FCO2)- as evidenced by the formation of UVIO2FCl2-, and the appearance of UVO2Cl2- in the cases of the meta and para isomers indicates the similarity with FeIIICl3(C6H4FCO2)-/CuIICl2(C6H4FCO2)-. The shorter U-F distance in UVIO2Cl2(o-C6H4F)- causes the decrease in the fluoride transfer barrier and thus makes this process more favorable over o-C6H4F radical loss to give UVO2Cl2-.

Creation of [OUF]+ using gas-phase reactions of [UO2(C6F5)

While the strong axial UO bonds confer high stability and inertness to UO22+, it has been shown that the axial oxo ligands can be eliminated or replaced in the gas-phase using collision-induced dissociation (CID) reactions. In this study, CID of the pentafluorobenzoate precursor ion [UO2(O2C–C6F5)]+ was used to produce the organo-uranyl ion [UO2(C6F5)]+ by decarboxylation. Subsequent CID of [UO2(C6F5)]+ created [UO2(F)]+ by fluoride transfer and elimination of C6F4, rather than UO2+ by elimination of pentafluorophenyl radical (as has been observed for similar species). Moreover, upon reaction of [UO2(C6F5)]+ with H2O, apparent substitution of OH for F to create [UO3HC6F4]+ is favored over hydrolysis to produce [UO2(OH)]+ and (neutral) C6F5H. Subsequent CID of [UO3HC6F4]+ generates [UO2(F)]+ and [OUF]+. When [OUF]+ is isolated to react with H2O and O2 in the ion trap, the principal product ions observed are [UO2(F)]+ and [UO2(OH)]+. Experiments conducted with labeled reagent suggest that reaction with H218O leads to exchange of the oxo ligand and incorporation of the 18O label into [OUF]+ while reaction with O2 likely creates [UO2(F)]+. Formation of [UO2(OH)]+ from [OUF]+ is the result of a cascade of reactions, with initial formation of [UO2(F)]+ by reaction with O2, followed by hydrolysis to create the hydroxide species.

Catalytic Activation of a Carbon–Chloride Bond by Dicationic Tellurium-Based Chalcogen Bond Donors

AbstractNoncovalent interactions such as halogen bonding (XB) and chalcogen bonding (ChB) have gained increased interest over the last decade. Whereas XB-based organocatalysis has been studied in some detail by now, intermolecular ChB catalysis only emerged quite recently. Herein, bidentate cationic tellurium-based chalcogen bond donors are employed in the catalytic chloride abstraction of 1-chloroisochroman. While selenium-based ChB catalysts showed only minor activity in this given benchmark reaction, tellurium-based variants exhibited strong activity, with rate accelerations of up to 40 relative to non-chalogenated reference compounds. In general, the activity of the catalysts improved with weaker coordinating counterions, but tetrafluoroborate took part in a fluoride transfer side reaction. Catalyst stability was confirmed via a fluoro-tagged variant.

Tris(pentafluoroethyl)difluorophosphorane: A Versatile Fluoride Acceptor for Transition Metal Chemistry.

Fluoride abstraction from different types of transition metal fluoride complexes [LnMF] (M=Ti, Ni, Cu) by the Lewis acid tris(pentafluoroethyl)difluorophosphorane (C2F5)3PF2 to yield cationic transition metal complexes with the tris(pentafluoroethyl)trifluorophosphate counterion (FAP anion, [(C2F5)3PF3]−) is reported. (C2F5)3PF2 reacted with trans‐[Ni(iPr2Im)2(ArF)F] (iPr2Im=1,3‐diisopropylimidazolin‐2‐ylidene; ArF=C6F5, 1 a; 4‐CF3‐C6F4, 1 b; 4‐C6F5‐C6F4, 1 c) through fluoride transfer to form the complex salts trans‐[Ni(iPr2Im)2(solv)(ArF)]FAP (2 a‐c[solv]; solv=Et2O, CH2Cl2, THF) depending on the reaction medium. In the presence of stronger Lewis bases such as carbenes or PPh3, solvent coordination was suppressed and the complexes trans‐[Ni(iPr2Im)2(PPh3)(C6F5)]FAP (trans ‐2 a[PPh3]) and cis‐[Ni(iPr2Im)2(Dipp2Im)(C6F5)]FAP (cis ‐2 a[Dipp2Im]) (Dipp2Im=1,3‐bis(2,6‐diisopropylphenyl)imidazolin‐2‐ylidene) were isolated. Fluoride abstraction from [(Dipp2Im)CuF] (3) in CH2Cl2 or 1,2‐difluorobenzene led to the isolation of [{(Dipp2Im)Cu}2]2+2 FAP− (4). Subsequent reaction of 4 with PPh3 and different carbenes resulted in the complexes [(Dipp2Im)Cu(LB)]FAP (5 a–e, LB=Lewis base). In the presence of C6Me6, fluoride transfer afforded [(Dipp2Im)Cu(C6Me6)]FAP (5 f), which serves as a source of [(Dipp2Im)Cu)]+. Fluoride abstraction of [Cp2TiF2] (7) resulted in the formation of dinuclear [FCp2Ti(μ‐F)TiCp2F]FAP (8) (Cp=η5‐C5H5) with one terminal fluoride ligand at each titanium atom and an additional bridging fluoride ligand.

Isolable Anionic, Neutral and Cationic Radicals from Reactions of N,N'-Dimesityldiamidocarbene and Lewis Acids.

B(C6 F5 )3 undergoes nucleophilic attack by N,N'-dimesityldiamidocarbene (DAC) with fluoride transfer to the boron center, resulting in a new zwitterion (1). This B-F fluoride can be replaced or abstracted to give the corresponding hydride (2) or triflate (3) derivatives or the corresponding cation (4). These species are reduced with KC8 or Cp2 Co to give isolable anionic and neutral radicals (5-8). Similarly, the [Ph3 C] cation undergoes nucleophilic attack by DAC resulting in the spontaneous formation of the radical cation (9).

Deoxyfluorination with CuF2 : Enabled by Using a Lewis Base Activating Group.

Deoxyfluorination is a primary method for the formation of C-F bonds. Bespoke reagents are commonly used because of issues associated with the low reactivity of metal fluorides. Reported here is the development of a simple strategy for deoxyfluorination, using first-row transition-metal fluorides, and it overcomes these limitations. Using CuF2 as an exemplar, activation of an O-alkylisourea adduct, formed in situ, allows effective nucleophilic fluoride transfer to a range of primary and secondary alcohols. Spectroscopic investigations have been used to probe the origin of the enhanced reactivity of CuF2 . The utility of the process in enabling 18 F-radiolabeling is also presented.

Deoxyfluorination with CuF2: Enabled by Using a Lewis Base Activating Group

AbstractDeoxyfluorination is a primary method for the formation of C−F bonds. Bespoke reagents are commonly used because of issues associated with the low reactivity of metal fluorides. Reported here is the development of a simple strategy for deoxyfluorination, using first‐row transition‐metal fluorides, and it overcomes these limitations. Using CuF2 as an exemplar, activation of an O‐alkylisourea adduct, formed in situ, allows effective nucleophilic fluoride transfer to a range of primary and secondary alcohols. Spectroscopic investigations have been used to probe the origin of the enhanced reactivity of CuF2. The utility of the process in enabling 18F‐radiolabeling is also presented.

Unimolecular reactivity of organotrifluoroborate anions, RBF3- , and their alkali metal cluster ions, M(RBF3 )2- (M = Na, K; R = CH3 , CH3 CH2 , CH3 (CH2 )3 , CH3 (CH2 )5 , c-C3 H5 , C6 H5 , C6 H5 CH2 , CH2 CHCH2 , CH2 CH, C6 H5 CO).

Potassium organotrifluoroborates (RBF3 K) are important reagents used in organic synthesis. Although mass spectrometry is commonly used to confirm their molecular formulae, the gas-phase fragmentation reactions of organotrifluoroborates and their alkali metal cluster ions have not been previously reported. Negative-ion mode electrospray ionization (ESI) together with collision-induced dissociation (CID) using a triple quadrupole mass spectrometer were used to examine the fragmentation pathways for RBF3- (where R=CH3 , CH3 CH2 , CH3 (CH2 )3 , CH3 (CH2 )5 , c-C3 H5 , C6 H5 , C6 H5 CH2 , CH2 CHCH2 , CH2 CH, C6 H5 CO) and M(RBF3 )2- (M=Na, K), while density functional theory (DFT) calculations at the M06/def2-TZVP level were used to examine the structures and energies associated with fragmentation reactions for R=Me and Ph. Upon CID, preferentially elimination of HF occurs for RBF3- ions for systems where R=an alkyl anion, whereas R- formation is favoured when R=a stabilized anion. At higher collision energies loss of F- and additional HF losses are sometimes observed. Upon CID of M(RBF3 )2- , formation of RBF3- is the preferred pathway with some fluoride transfer observed only when M=Na. The DFT-calculated relative thermochemistry for competing fragmentation pathways is consistent with the experiments. The main fragmentation pathways of RBF3- are HF elimination and/or R- loss. This contrasts with the fragmentation reactions of other organometallate anions, where reductive elimination, beta hydride transfer and bond homolysis are often observed. The presence of fluoride transfer upon CID of Na(RBF3 )2- but not K(RBF3 )2- is in agreement with the known fluoride affinities of Na+ and K+ and can be rationalized by Pearson's HSAB theory.

C-F bond activation of trifluoroethanol and trifluoroacetic acid catalysed by the dimolybdate anion, [Mo2O6(F)]- †.

Two gas-phase catalytic cycles involving C-F bond activation of trifluoroethanol and trifluoroacetic acid were detected by multistage mass spectrometry experiments. A binuclear dimolybdate centre [Mo2O6(F)]- acts as the catalyst in each cycle. The first cycle, entered via the reaction of [Mo2O6(OH)]- with trifluoroethanol and elimination of water to form [Mo2O6(OCH2CF3)]-, proceeds via four steps: (1) oxidation of the alkoxo ligand and its elimination as aldehyde; (2) reaction of [Mo2O5(OH)]- with trifluoroethanol and elimination of water to form [Mo2O5(OCH2CF3)]; (3) decomposition of the alkoxo ligand via loss of 1,1 difluoroethene; and (4) reaction of [Mo2O6(F)]- with a second equivalent of trifluoroethanol to regenerate Mo2O6(OCH2CF3)]-. Steps (2) and (3) do not occur at room temperature and require collisional activation to proceed. The second cycle is entered via the reaction of [Mo2O6(OH)]- with trifluoroacetic acid and elimination of water to form [Mo2O6(O2CCF3)]- and involves two steps only: (1) fluoride transfer to a molybdenum centre to form [Mo2O6(F)]-; (2) reaction of [Mo2O6(F)]- with trifluoroacetic acid and loss of water to regenerate [Mo2O6(O2CCF3)]-. Comparisons are made with the chemistry of [Mo2O6(OH)]- reacting with acetic acid.

Synthesis and reactivity of a cationic palladium complex as possible intermediate in a Suzuki-Miyaura cross-coupling reaction

A stoichiometric reaction of a palladium fluorido complex with an aromatic boronic ester yielded a fluorinated 4-aryl phenylalanine derivative (aryl=4-C6H4SF5) as Suzuki-Miyaura cross-coupling product. Due to the high reactivity of the metal complex, the reaction proceeded smoothly at ambient temperature. Low-temperature NMR investigations revealed a possible role of trans‐[Pd{BF(4-C6H4SF5)(pin)}(PheEt)(PiPr3)2] (5, PheEt=bound phenylalanine derivative=4-C6H4CH2C{NHC(O)CH3}(CO2Et)2, pin=pinacolato=O2C2Me4) as a potential intermediate of the transmetallation step. Compound 5 resulted from fluoride transfer from palladium to boron. The similar complex trans-[Pd(BF4)(PheEt)(PiPr3)2] (7) was generated on treatment of the fluorido complex with NaBF4. Complex 7 is not stable at room temperature. Degradation gave the phosphonium salt [PiPr3PheEt][BF4] (4). Interestingly, the same compound was also found in the initially mentioned cross-coupling reaction as minor product.

Multifold study of volume plasma chemistry in Ar/CF4 and Ar/CHF3 CCP discharges

Low-pressure RF plasma in fluorohydrocarbon gas mixtures is widely used in modern microelectronics, e.g. in the etching of materials with a low dielectric constant (low-k) materials). The multifold experimental and theoretical study of a radio frequency capacitively coupled plasma at 81 MHz in Ar/CF4/CHF3 has been carried out at 50 mTorr and 150 mTorr gas pressures. A wide set of experimental diagnostics together with hybrid PIC MC model calculations were applied to a detailed study of the plasmas. Measurements of the F atoms, HF molecules and CFx radicals, electron density, electronegativity and positive ion composition were performed. Absolutely calibrated VUV spectrometry was carried out to measure the VUV photon fluence towards the electrode. This combined experimental and model approach allowed us to establish the fundamental mechanisms of the charged and neutral species elementary reactions. Dissociative charge transfer reactions and fluoride transfer reactions influence the main ion (CF, CHF) composition in Ar/CF4/CHF3 plasma a lot. The mechanisms of heavy ion formation in Ar/CHF3 are also discussed. The important role of additional attachment mechanisms (besides dissociative attachment to the feedstock gases, CF4, CHF3) was analyzed. The catalytic chain mechanism, including the HF molecules, which defines the CFx kinetics in Ar/CHF3 plasma, was validated. This multifold approach enabled us to determine the complicated plasma chemical composition of the active species as well as the fluxes of VUV photons at the surface of the processed material, and is a result that is important for understanding low-k damage.