Infrared deflectometry is an efficient and accurate measuring method for curved surfaces fabricated via grinding or finish milling. The emitting properties and geometrical configurations of the infrared light source is a core component governing the measurement performance. In this paper, an infrared slit light source is designed based on the cavity structure of a polyimide heating film. This design ensures good stability and uniformity of the light source whilst effectively reducing background noise. Additionally, the light source can be applied as a calibration board for calibrating infrared cameras. The light source is aligned using a theodolite and cubic prism to control the positional deviations during scanning. Experimental results demonstrate that the proposed slit light source and calibration method can achieve a measurement accuracy of 1 µm RMS, which can meet the needs of rapid measurement in grinding. This approach provides a reliable, cost-effective, and efficient tool for surface quality assessments in optical workshops and has a broad application potential.
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