Abstract Thermal decomposition of precursors for In2S3 thin films obtained by drying aqueous solutions of InCl3 and SC(NH2)2 at the In:S molar ratios of 1:3 (1) and 1:6 (2) was monitored by simultaneous TG/DTA/EGA-FTIR measurements in the dynamic 80%Ar + 20%O2 atmosphere. XRD and FTIR were used to identify the dried precursors and products of the thermal decomposition. The precursors 1 and 2 are complex compounds, while in 2 free SC(NH2)2 is also present. The thermal degradation of 1 and 2 in the temperature range of 30–900 °C consists of four mass loss steps, the total mass loss being 89.1 and 78.5%, respectively. According to XRD, In2S3 is formed below 300 °C, crystalline In2.24(NCN)3 is detected only in 1 above 520 °C and In2O3 is the final decomposition product at 900 °C. The gaseous species evolved include CS2, NH3, H2NCN, HNCS, which upon oxidation yield also COS, SO2, HCN and CO2.