Multilayer Films Research Articles

A Practical Approach for Determination of Thermal Stress and Temperature-Dependent Material Properties in Multilayered Thin Films.

Multilayered thin films are essential to most microelectro-mechanical systems (MEMSs). The reliability and predictability of the behavior of such systems, especially when intended for usage at high temperatures or in harsh environments, demand the consideration of thermo-mechanical properties of the individual films of the multilayer arrangement during the design stage. This paper introduces a newly derived analytical model for the convenient indirect determination of the temperature-dependent Young's modulus and the thermally induced stress of individual layers within a multilayered thin film system, i.e., a multilayer-adapted Stoney equation. It is based on sample curvature measurement and requires data from only a single experiment. Experimental and numerical investigations of the new models are carried out using a five-layered sample of a RuAl metallization system developed for wireless high-temperature acoustic sensing. The results highlight the usability of the new model in practical MEMS analysis, enabling insights into complex layer stacks by overcoming current experimental limitations.

A Comparative Thermal and Lumen Performance Study of Thin-film Amorphous Silicon Dielectric Coating on Aluminum as an LED Packaging Substrate

A Comparative Thermal and Lumen Performance Study of Thin-film Amorphous Silicon Dielectric Coating on Aluminum as an LED Packaging Substrate

Use of sustainable packaging materials for fresh beef vacuum packaging application and product assessment using physicochemical means

Packaging material should guarantee the longest possible shelf life of food and help to maintain its quality. The aim of the study was to assess the physicochemical changes taking place during 28-day ageing of beef steaks packed in two types of multilayer films containing biodegradable polymers – polylactic acid (NAT/PLA) and Mater-Bi® (NAT/MBI). The control group consisted of steaks packed in synthetic polyamide/polyethylene (PA/PE) film.The samples stored in NAT/PLA had significantly lower purge loss than the control samples and the lowest expressible water amount after 14 and 21 days. Following blooming, the most favourable colour was shown in steaks stored in NAT/MBI, with the highest values for the L*, a* and C* parameters and the R630/580 ratio, a high proportion of oxymyoglobin, and the lowest share of metmyoglobin. All steaks, regardless of the type of packaging material, had acceptable tenderness and were stable in terms of lipid oxidation.

Quantifying Chemical Reactions and Interfacial Properties at Buried Polymer/Polymer Interfaces.

Maleic anhydride (MAH)-modified polymers are used as tie layers for binding dissimilar polymers in multilayer polymer films. The MAH chemistry which promotes adhesion is well characterized in the bulk; however, only recently has the interfacial chemistry been studied. Sum frequency generation vibrational spectroscopy (SFG) is an interfacial spectroscopy technique which provides detailed information on interfacial chemical reactions, species, and molecular orientations and has been essential for characterizing the MAH chemistry in both nylon and ethyl vinyl alcohol copolymer (EVOH) model systems and coextruded multilayer films. Here, we further characterize the interfacial chemistry between MAH-modified polyethylene tie layers and both EVOH and nylon by investigating the model systems over a range of MAH concentrations. We can detect the interfacial chemical reaction products between MAH and the barrier layer at MAH concentrations of ≥0.022 wt % for nylon and ≥0.077 wt % for EVOH. Additionally, from the concentration-dependent reaction reactant/product SFG peak positions and the product imide or ester/acid C═O group tilt angles extracted from the polarization-dependent SFG spectra, we quantitatively observe concentration-dependent changes to both the interfacial chemistry and interfacial structure. The interfacial chemistry and molecular orientation as a function of MAH concentration are well correlated with the adhesion strength, providing important quantitative information for the future design of MAH-modified tie layers for a variety of important applications.

Ultrasmooth Ti/Al multilayer with a Ti seed layer for EUV applications

Al-base multilayers have attracted much interest in the extreme ultraviolet (EUV) optics field, but high roughness of this multilayer due to the Al film is still a big concern. Here, a strategy of the seed layer was proposed to reduce the surface roughness and intermixing layer thickness of the Al-base multilayer. Ti film is not only a seed layer, but also an absorption layer in this novel multilayer. An optimized Ti/Al multilayer film structure was designed to work at 21.1 nm, while investigating the use of Ti as a seed layer to reduce the roughness and enhance the peak reflectivity. The experimental results showed that the Ti seed layer effectively reduced the surface roughness and intermixing layer thickness and improved the reflectance. At 21.1 nm, the peak reflectance reached 39.6%, with a bandwidth of only 1.0 nm and an RMS roughness of 0.17 nm. Ti/Al multilayer also exhibits good stability. This multilayer has potential application in high-precision optics, such as corona detection, which requires extreme low light scattering of multilayer mirror.

Tailoring Mechanical Reliability in Transparent ZnO-Zincone Thin-Film Electrodes with Organic Interlayer Interfaces and Thickness.

To address the inherent brittleness of conventional transparent conductive oxides, researchers have focused on enhancing their flexibility. This is achieved by incorporating organic films to construct organic-inorganic hybrid layer-by-layer nanostructures, where the interlayer thickness and interface play pivotal roles in determining the properties. These factors are contingent on the type of material, processing conditions, and specific application requirements, making it essential to select the appropriate conditions. In this study, ZnO-zincone nanolaminate thin films were fabricated using atomic layer deposition and molecular layer deposition in various structural configurations. Transmission electron microscopy, X-ray diffraction, and scanning electron microscopy were used to conduct a thorough analysis of the thin-film growth and structural transformations resulting from the deposition conditions. Furthermore, the influence of structural differences at the interfaces on the mechanical properties of the films was investigated by employing both tensile and compression-bending fatigue tests. This comprehensive examination reveals noteworthy variations in the mechanical responses of the films. Thin films characterized by internal porosity and an intermixed amorphous structure demonstrated enhanced compressive toughness, whereas rigid organic layers improved flexibility. These findings offer valuable insights into the development of flexible, transparent multilayer films.

Research on Improved Crystallization Properties and Underlying Mechanism of the Sb2Te3 Phase-Change Thin Film by Inserting Sn15Sb85 Layers.

As a non-volatile semiconductor memory technology, phase-change memory has a wide range of application prospects as a result of the excellent comprehensive performance. In this paper, multilayer thin films based on Sb2Te3 material were designed and prepared by inserting the Sn15Sb85 layer. The thermal and electrical properties of superlattice-like Sb2Te3/Sn15Sb85 phase-change films can be adjusted by controlling the thickness ratio of Sb2Te3/Sn15Sb85. In comparison to the monolayer Sb2Te3 film, the multilayer layer Sb2Te3/Sn15Sb85 materials have a higher crystallization temperature, larger crystallization activation energy, and longer data lifetime, indicating the great improvement of thermal stability. The changes in the phase structure and vibrational modes of multilayer Sb2Te3/Sn15Sb85 films were characterized by X-ray diffraction and Raman spectroscopy, respectively. The presence of Sn15Sb85 layers restrains grain growth and refines the grain size. The multilayer Sb2Te3/Sn15Sb85 films exhibit better surface flatness, smaller surface potential undulation, and lower thickness variations than single-layer Sb2Te3. Phase-change memory cells based on the [Sb2Te3 (1 nm)/Sn15Sb85 (9 nm)]5 thin film has a lower threshold voltage (1.9 V) and threshold current (3.1 μA) compared to the Ge2Sb2Te5 film. Meanwhile, the electrical heating model of a phase-change memory cell based on a [Sb2Te3 (1 nm)/Sn15Sb85 (9 nm)]5 multilayer structure was established by multiphysics coupling analysis, proving the great improvement in heat transfer performance and efficiency. The experimental and theoretical studies confirm that the insertion of the Sn15Sb85 layer can significantly improve the crystallization properties of Sb2Te3 films, paving the way for optimizing the phase-change materials by regulating the microstructural parameters.

Inducing a tunable skyrmion-antiskyrmion system through ion beam modification of FeGe films

Skyrmions and antiskyrmions are nanoscale swirling textures of magnetic moments formed by chiral interactions between atomic spins in magnetic noncentrosymmetric materials and multilayer films with broken inversion symmetry. These quasiparticles are of interest for use as information carriers in next-generation, low-energy spintronic applications. To develop skyrmion-based memory and logic, we must understand skyrmion-defect interactions with two main goals—determining how skyrmions navigate intrinsic material defects and determining how to engineer disorder for optimal device operation. Here, we introduce a tunable means of creating a skyrmion-antiskyrmion system by engineering the disorder landscape in FeGe using ion irradiation. Specifically, we irradiate epitaxial B20-phase FeGe films with 2.8 MeV Au4+ ions at varying fluences, inducing amorphous regions within the crystalline matrix. Using low-temperature electrical transport and magnetization measurements, we observe a strong topological Hall effect with a double-peak feature that serves as a signature of skyrmions and antiskyrmions. These results are a step towards the development of information storage devices that use skyrmions and antiskyrmions as storage bits, and our system may serve as a testbed for theoretically predicted phenomena in skyrmion-antiskyrmion crystals.

Development of a four-color quasimonochromatic X-ray microscope for laser plasma research

X-ray multicolor imaging diagnosis obtains the spatial distribution of the imploding core during laser inertial confinement fusion. We propose a four-color quasimonochromatic X-ray microscope based on the Kirkpatrick–Baez microscope configuration, covering the medium-to-high-energy X-ray range. Composed of single-layer film mirrors and periodic multilayer film mirrors, the microscope features high spatial resolution and spectral resolution. Furthermore, zoned coating technology achieves common field-of-view (FOV) imaging at four energy points: 4.51, 6.4, 8.4, and 9.67 keV. When assembled and calibrated in the laboratory, the microscope achieved central FOV spatial resolutions of 3.9, 3.7, 4.0, and 4.1 µm at 4.51, 6.4, 8.04, and 9.67 keV, respectively. Finally, a spectral calibration experiment confirmed spectral selectivity at the four energy points.

CMP characteristics of IGZO thin film with a variety of process parameters

Recently, amorphous indium gallium zinc oxide (a-IGZO) has been studied in the field of 3D transistors as a channel material for high mobility, good uniformity, and low leakage current performance. The CMP process needs to be applied to fully remove surface IGZO in a multilayer film stack structure and achieve the purpose of planarization. As we all know, the CMP characteristics of the desired removal rate with stability and within-wafer non-uniformity (WIWNU%) play an important role in the CMP process. In this paper, the variation of the removal rate and the non-uniformity for IGZO thin film were studied with various process parameters (such as polishing time, slurry flow rate, slurry dilution, head pressure, head and table speed). The results mean that the removal rate and the non-uniformity of IGZO thin film can be tuned by changing process parameters, which can enhance the confidence about the feasibility of IGZO-CMP in the application of advanced technology.

A nacre-inspired polymheric multilayer film with high efficiency of low-temperature toughening

Polypropylene (PP) films have been widely used in medical, electronics, and construction fields due to their low cost and excellent comprehensive properties. However, the poor low-temperature toughness of PP films restricts its further applications in extreme cold environments. Here, the nacre-inspired 8-, 32-, 128-, and 512-layer PP/SEBS-based films were constructed via our multilayer blown systems. Compared to the conventional blended films, 128-layer films showed significant improvement under the low-temperature conditions, i.e., 160 %, 150 %, and 136 % in impact toughness, tear toughness, and elongation at break, respectively. The high toughening efficiency of the multilayer films is because of the nacre-inspired multilayer structures, which can develop the multi-stage propagation of the damage behavior such as craze and plastic deformation to dissipate much energy when mechanically broken. Since nacre-inspired PP/SEBS-based multilayer films show high efficiency in low-temperature toughening, this work may provide a possible solution to improving the low-temperature mechanical properties of PP films or even other types of polymeric films.

Effect of Mo and W underlayers on ordered phase formation in Fe-Au-Pd multilayer thin films at low temperatures

Fe-Pd based thin films with Au intermediate layer fabricated on different substrates (SiO2, SiO2/Mo, SiO2/W) were investigated at annealing temperatures up to 460°C. The samples were deposited by magnetron sputtering and were post-annealed in vacuum. The ongoing processes were investigated by chemical depth profiling and X-ray diffraction. The experimental results showed that the intermediate Au layer always promoted the formation of FePd3 phase which also showed L12 ordered structure except in one case with W underlayer. However, in the samples with Mo buffer but without the Au interlayer the FePd phase formed and L10 ordered phase also appeared for one stacking order. Considering the low diffusivity arising from the annealing temperature the processes were explained by grain boundary diffusion induced reaction layer formation. The formation of the ordered FePd phases was interpreted by the stress accumulation due to the different diffusivity of the components, which relaxes by the shift of the grain boundaries and the transformation of swept over regions. It was concluded, that the effect of the Au interlayer is dominant over the effect of the Mo or W buffer layers.

P‐109: Investigation of Low Residual Stress Anti Reflection Coating with High Hardness for Display Applications

Anti reflection coating with high hardness on the OLED display surface was studied to improve the wear resistance and visibility of OLED. However, the high residual stress inside the multilayer thin film configuration of anti reflection coating has been a problem and the improvement is necessary. In this study, the residual stress and optical properties variation on various deposition conditions on the thin film were investigated. In addition, we suggested new coating structure using nanocomposites to overcome the residual stress of films.

Fatigue and tensile behaviour of Ti+TiN+Ti+TiVN multilayer nitride films coated on AZ91 magnesium alloy by closed field unbalanced magnetron sputtering

Despite their extensive use in the automotive and aerospace industries, Mg and Mg alloys, which are light metals, exhibit low fatigue and tensile strength. In this study, transition metal-nitride (TMN) multilayer coatings (Ti+TiN+Ti+TiVN) were coated twice on AZ91 Mg alloy using a Confined Field Unbalanced Magnetron Sputtering (CFUBMS) system to increase fatigue and tensile strength. The structural properties of the films were analyzed by using X-ray diffraction (XRD), scanning electron microscope (SEM), and energy dispersive spectrometry (EDS) methods, and the mechanical properties were analyzed by rotating bending fatigue and tensile testing machines. Ti+TiN+Ti+TiVN multilayer nitride surface coatings on AZ91 Mg alloys showed a dense and columnar microstructure and according to XRD results (111) was the preferred orientation with the dominant peak. The fatigue limit value of the AZ91 base material was fixed at 60.46 MPa, while it increased to 68.48 MPa after being coated with multilayer nitride. Along with the multilayer nitride coating, the tensile strength increased from 169.98 MPa to 175.43 MPa. As a result, the multilayer hard nitride coating with low surface roughness, which fills the defects, notches, and voids on the surface of the AZ91 base material, increased the fatigue and tensile strength in parallel. Based on the outcomes of the research, the literature has been enriched with an innovative approach through the enhancement of fatigue and tensile strengths by applying a CFUBMS coating to lightweight metals and alloys, such as AZ91, especially in the transportation industry where lightness and dynamic load resistance are essential.

Design and fabrication of a fast-response and low-energy input micro igniter

In this study, we innovatively combine direct ink writing (DIW) and physical vapor deposition (PVD) to fabricate a novel micro igniter with fast-response and low-energy input characteristics. The igniter comprises a 5×5 mm² metal film bridge with gold contact pads. The metallic resistance is fabricated using a series of photolithography, metal deposition, and lift-off processes. After evaluating titanium and chromium as the resistive filament, titanium was selected due to its superior reactivity when in contact with CuO leading to reduced ignition energy. Onto the resistive titanium layer, either thermite multilayer films and/or energetic inks are deposited to achieve a head-to-head comparison of ignition characteristics. We show that igniters powered by (CuO/Ti)5 bilayers and Al/CuO/PVDF as energetic ink demonstrate the equivalent ignition performance as reactive (CuO/Ti)5 multilayered igniter. The ignition delay and ignition energy are below 1 ms and 2 mJ, respectively, while the flash intensity is approximately one decade higher than what is typically achieved with conventional micro-igniters. Furthermore, its ignition behaviour can be readily adjusted by altering the constituents of the fuel/oxidizer or adjusting the ratio of multilayer/inks, thereby allowing for easy adaptation of the micro-igniter to meet the diverse requirements of various applications.

A mechanistic approach to determine the relationship between film structure, electronic properties, and photocatalytic activity of ALD ZnO thin films on glass gibers

Atomic layer deposition (ALD), a high-conformality thin-film deposition technique, offers the opportunity to immobilize photocatalytic materials on high surface area substrates. Textile substrates are inexpensive, easily accessible materials with a fibrous nature, making them high surface area scaffolds for photocatalytic applications. This study applied ZnO thin-film coatings to fabric structures with different numbers of ALD cycles. The effect of coating thickness on the surface and electronic properties of the films and their photocatalytic properties were investigated. SEM, XRD, PL, and UV–Vis were used to examine the surface morphology, crystal structure, defects, and optical properties of the ZnO thin films. As the film thickness increased, the crystal sizes and the number of defects in the structure increased. Contact angle and Hall Effect measurements revealed that these structural defects are present on the surface of the films. Optimum wettability, mobility, and photocatalytic efficiency values were observed in the 15-nm coated samples, resulting in the highest photocatalytic activity and a turning point.

Electrochemical study and structural comparison of Ni electrodepositions on W/Si and Cr/C multilayered structure films

The Ni electrodeposition combined with multilayered structure film is a promising strategy in modern optical manufacturing, while less effort has been devoted to comprehending the electrochemical reaction process, which is essential for their practical applications. In view of this, the initial reduction dynamics and nucleation mechanisms of Ni electrodepositions on multilayer W/Si and Cr/C films were analyzed in this work, and the morphological, crystal, and mechanical characteristics of produced Ni electrodeposits were further determined and compared. The results show that the considerably irregular crystals accompanied by high tensile stress of 119.5 MPa were formed for the Ni electrodeposit on W/Si film, which were mainly attributed to the progressive nucleation process with more severe side reaction of hydrogen evolution. By contrast, the instantaneous nucleation mode with lower reduction resistance were revealed for the Ni electrodeposition on Cr/C film, which presented a comparatively fine–grained texture, less roughness, and smaller stress structure. To summarize, the more stable electrochemical reaction process and improved structure uniformity are obtained for the Ni electrodeposition on metal/C–based film, which offers a theoretical guidance for optimized fabrication of multilayer optical devices in extreme ultraviolet, x-ray, and neutron focusing fields.

Effect of Ag content on the friction and wear properties of electrodeposited self-lubricating Ni–Ag coating

Thin film coatings are required to improve the performance of components to resist harsh environments as the modern industry grows. In this study, Ni–Ag coatings with various Ag content were deposited on the Cu surface using an electrodeposition technique. The Ni–Ag coatings were deposited to enhance the tribological properties of the coatings and increase the service life of the friction-sliding components. Ni–6wt%Ag, Ni–8wt%Ag, and Ni–10wt%Ag coatings were deposited. A solid solution of Ni–Ag was formed in the coatings. As the concentration of NiSO4 decreased in the electrolyte, the content of Ag in the coatings increased with the granular morphological characteristics. The increase in Ag content reduces the coefficient of friction (CoF) on comparing the initial running-in period and is stable after some time. The initial decrease was due to the surface roughness. The CoF and wear rate were low for all Ag contents compared to the copper substrate due to the effect of Ag solid lubricant material in prepared coatings.

Study of Optical Performance and Structure of Yb/Al (1.5 wt.% Si) and Yb/Al (Pure) Multilayers Designed for the 73.6 nm Range

Yb/Al multilayer films exhibit excellent theoretical reflectivity in the 54–90 nm wavelength range. This study attempted to incorporate 1.5% wt.% of Si impurities into Al to suppress the crystallization of Al, reduce interfacial roughness, and enhance the actual reflectivity of the prepared Yb/Al multilayer films. Internal microstructure changes in the film layers before and after Si impurity doping were investigated using GIXRR, AFM, and XRD techniques. The reflectivity of two types of multilayer films, Yb/Al (1.5 wt.% Si) and Yb/Al (pure), was tested to evaluate the effect of Si impurity on film performance. The reflectivity of Yb/Al (1.5 wt.% Si) multilayers compared to Yb/Al (pure) multilayers increased by approximately 4%.

Loading rutin on surfaces by the layer-by-layer assembly technique to improve the oxidation resistance and osteogenesis of titanium implants in osteoporotic rats

The purpose of this study was to construct a rutin-controlled release system on the surface of Ti substrates and investigate its effects on osteogenesis and osseointegration on the surface of implants. The base layer, polyethylenimine (PEI), was immobilised on a titanium substrate. Then, hyaluronic acid (HA)/chitosan (CS)-rutin (RT) multilayer films were assembled on the PEI using layer-by-layer (LBL) assembly technology. We used scanning electron microscopy (SEM), Fourier transform infrared (FTIR) spectroscopy and contact angle measurements to examine all Ti samples. The drug release test of rutin was also carried out to detect the slow-release performance. The osteogenic abilities of the samples were evaluated by experiments on an osteoporosis rat model and MC3T3-E1 cells. The results (SEM, FTIR and contact angle measurements) all confirmed that the PEI substrate layer and HA/CS-RT multilayer film were effectively immobilised on titanium. The drug release test revealed that a rutin controlled release mechanism had been successfully established. Furthermore, the in vitro data revealed that osteoblasts on the coated titanium matrix had greater adhesion, proliferation, and differentiation capacity than the osteoblasts on the pure titanium surface. When MC3T3-E1 cells were exposed to H2O2-induced oxidative stress in vitro, cell-based tests revealed great tolerance and increased osteogenic potential on HA/CS-RT substrates. We also found that the HA/CS-RT coating significantly increased the new bone mass around the implant. The LBL-deposited HA/CS-RT multilayer coating on the titanium base surface established an excellent rutin-controlled release system, which significantly improved osseointegration and promoted osteogenesis under oxidative stress conditions, suggesting a new implant therapy strategy for patients with osteoporosis.