The effect of the thicknesses of the Pt intermediate layer and FePt magnetic layer in CrV/Pt/FePt multilayers on the microstructure and magnetic properties for the perpendicular magnetic anisotropy was investigated. The Pt (0–4 nm) and FePt (7–28 nm) layers were deposited on a 90 nm-thick Cr94V6 underlayer at 350 °C, and the crystal structure and magnetic properties of the fabricated CrV/Pt/FePt multilayers were characterized. X-ray diffraction and vibrating sample magnetometer measurements revealed that the out-of-plane coercivity (Hc-out) and squareness increase when the Pt intermediate layer is deposited between CrV and FePt because it protects against diffusion of Cr and V atoms into the FePt magnetic layer during deposition. In addition, we confirmed that Hc-out and squareness decrease with increasing FePt layer thickness in the range of 7–28 nm. As a result, the maximum Hc-out, S, and squareness were obtained for a multilayer with a CrV thickness of 90 nm, Pt thickness of 2 nm, and FePt thickness of 7 nm. This paper shows that highly ordered FePt L10 (001) can be fabricated by sublayer thickness control.