Abstract
In situ ordered L1 0 FePt films with large coercivity have been prepared at low temperature by DC magnetron sputtering the FePt magnetic layer on a CrRu underlayer with preheated natural-oxidized Si (1 0 0) wafer substrates. The results showed that granular L1 0 FePt nanoparticles with a large in-plane coercivity of 4000 Oe and an isolated uniform size of 10.7 nm can be achieved by introducing a 50 nm CrRu underlayer under the 25 nm FePt film deposited at a low substrate temperature of 350 °C.
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