Abstract Optical topography measurements are of high interest in a lot of industrial
and academic fields. One of the most common associated measurement methods
is coherence scanning interferometry, but even though it provides sub-nanometer
axial resolution, its lateral resolution is diffraction limited. Not only the feature
size is a limiting factor for optical measurements, but also steep surface slopes
may lead to problems, since the acceptance angle of the objective lens limits the
maximum surface slope angles that can be measured. Here we use a Linnik-type
interferometer with objective lenses of numerical apertures of 0.95 in order to
maximize the measurable surface slope angle. We demonstrate that silicon V-groove structures with a slope angle of 54.74° can be measured. We compare the directly measured surface slope angle with an angle calculated from light that is reflected two times by the V-grooves. To verify our measurement we compare the measurement results to rigorous FEM simulations.
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