A facile sonochemical route was demonstrated for the direct fabrication of Fe-doped ZnO nanorod arrays on a Si substrate under ambient conditions. By adding Fe 3+ ions in reaction solution, Fe is readily in situ doped into ZnO nanorod arrays via ultrasound irradiation. The morphology and structural characteristic of the Fe-doped ZnO nanorods were investigated using scanning electron microscopy (SEM) and transmission electron microscopy (TEM). And crystal structure was characterized by X-ray diffraction (XRD) spectroscopy. Inductively-coupled plasma atomic emission spectroscopy (ICP-AES) confirmed the Fe-doping of ZnO nanorod arrays with a concentration of 0.9 wt.%. In addition, Fe-doped ZnO nanorod showed the enhancement of photoluminescence (PL) intensity in green–yellow emission.
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