Fabrication Of Microstructures Research Articles

Screen-Printable Iontronic Pressure Sensor with Thermal Expansion Microspheres for Pulse Monitoring.

Constructing microstructures to improve the sensitivity of flexible pressure sensors is an effective approach. However, the preparation of microstructures usually involves inverted molds or subtractive manufacturing methods, which are difficult in large-scale (e.g., in screen printing) preparation. To solve this problem, we introduced thermally expandable microspheres for screen printing to fabricate flexible sensors. Thermally expandable microspheres can be constructed into microstructures by simple heating after printing, which simplifies the microstructure fabrication step. In addition, the added microspheres can also be used as ionic liquid reservoir materials to further increase the capacitance change and improve the sensitivity. The prepared sensors exhibited superior performance, including ultrahigh sensitivity (Smax = 49999.5 kPa-1) and wide detection range (0-350 kPa). Even after 30,000 cycles at a high pressure of 300 kPa and a low pressure of 30 kPa, the sensor showed minimal signal degradation, demonstrating long-term cycling stability. In order to verify the practical potential of the sensors, we performed human radial artery beat detection experiments using these sensors. The variations in the intensity of the 3D radial artery pulse wave can be observed very clearly, which is important for human health monitoring. The above demonstrates that our strategy can provide an effective approach for the large-scale preparation of high-performance flexible pressure sensors.

Multifunctional Hydrogel with 3D Printability, Fluorescence, Biodegradability, and Biocompatibility for Biomedical Microrobots.

As micron-sized objects, mobile microrobots have shown significant potential for future biomedical applications, such as targeted drug delivery and minimally invasive surgery. However, to make these microrobots viable for clinical applications, several crucial aspects should be implemented, including customizability, motion-controllability, imageability, biodegradability, and biocompatibility. Developing materials to meet these requirements is of utmost importance. Here, a gelatin methacryloyl (GelMA) and (2-(4-vinylphenyl)ethene-1,1,2-triyl)tribenzene (TPEMA)-based multifunctional hydrogel with 3D printability, fluorescence imageability, biodegradability, and biocompatibility is demonstrated. By using 3D direct laser writing method, the hydrogel exhibits its versatility in the customization and fabrication of 3D microstructures. Spherical hydrogel microrobots were fabricated and decorated with magnetic nanoparticles on their surface to render them magnetically responsive, and have demonstrated excellent movement performance and motion controllability. The hydrogel microstructures also represented excellent drug loading/release capacity and degradability by using collagenase, along with stable fluorescence properties. Moreover, cytotoxicity assays showed that the hydrogel was non-toxic, as well as able to support cell attachment and growth, indicating excellent biocompatibility of the hydrogel. The developed multifunctional hydrogel exhibits great potential for biomedical microrobots that are integrated with customizability, 3D printability, motion controllability, drug delivery capacity, fluorescence imageability, degradability, and biocompatibility, thus being able to realize the real in vivo biomedical applications of microrobots.

Uniform intensity chiral optical field by multifocal synthesis.

Chiral optical beams that carry orbital angular momentum (OAM) have a broad range of applications such as optical tweezers, chiral microstructure fabrication, and optical communications. However, some chiral optical beams have inhomogeneous intensity distribution that limits the application in these fields. In this Letter, two different types of chiral optical fields with uniform intensity and arbitrary length were proposed based on the amplitude encoding method and multifocal synthesis. The intensity distribution of the chiral optical fields is determined by the distance between the focal points that can greatly extend the modulation length of the chiral optical field. Moreover, since each focal point contains modulable amplitude and phase, an arbitrary interception of the optical field can be realized by selectively retaining a part of the focal points. By partitioning the chiral optical field and assigning different topological charges, the OAM space-division multiplexing and independent tunability of the topological charges can be realized. In addition, the composite multi-petal vortex array formed by combining two different chiral optical fields can greatly enhance the information capacity of the optical communications and may have potential applications in fields such as particle manipulation.

Preparation of brittle ITO microstructures using Laser-Induced forward transfer technology

The performance of transparent conductive microstructures plays a significant role in determining the device efficiency. The fabrication of ITO microstructures on the flexible optoelectronic devices remains challenging because of the high-temperature processing requirements and brittleness of the ceramic material. This paper highlights a three-dimensional microfabrication technique that combines sacrificial layer etching and laser-induced transfer. By studying the donor material thickness and the laser energy density, control of the sacrificial layer transfer thrust was achieved to yield an optimal microstructure performance. Different shapes of ITO transparent conductive microstructures were fabricated on polydimethylsiloxane (PDMS) surfaces, demonstrating structural integrity, visible light transmittances > 90 %, and resistivities of ≤ 8 × 10−4 Ω·cm. Finite element analysis was employed to simulate the impact transfer of the donor material onto the receiving substrate, thereby elucidating the energy-absorbing protective role of the flexible PDMS layer. Effective control of the transfer force was identified as a crucial factor in achieving the successful transfer of brittle films. This high-precision and rapid array processing approach meets the demands of automated batch manufacturing, indicating its potential for use in patterned processing on flexible substrates, as an alternative to lithographic techniques. This technique could be applied in the preparation of electronic skins and flexible devices. Additionally, for the first time, a 3 × 3 pixel resistive array sensor was integrated on a Ag nanowires/PDMS surface, demonstrating array pressure-sensing capabilities at pressures of 0–80 kPa. This study represents a significant step towards the development of multifunctional flexible optoelectronic devices.

Preparation of brittle ITO microstructures using Laser-Induced forward transfer technology

The performance of transparent conductive microstructures plays a significant role in determining the device efficiency. The fabrication of ITO microstructures on the flexible optoelectronic devices remains challenging because of the high-temperature processing requirements and brittleness of the ceramic material. This paper highlights a three-dimensional microfabrication technique that combines sacrificial layer etching and laser-induced transfer. By studying the donor material thickness and the laser energy density, control of the sacrificial layer transfer thrust was achieved to yield an optimal microstructure performance. Different shapes of ITO transparent conductive microstructures were fabricated on polydimethylsiloxane (PDMS) surfaces, demonstrating structural integrity, visible light transmittances > 90 %, and resistivities of ≤ 8 × 10−4 Ω·cm. Finite element analysis was employed to simulate the impact transfer of the donor material onto the receiving substrate, thereby elucidating the energy-absorbing protective role of the flexible PDMS layer. Effective control of the transfer force was identified as a crucial factor in achieving the successful transfer of brittle films. This high-precision and rapid array processing approach meets the demands of automated batch manufacturing, indicating its potential for use in patterned processing on flexible substrates, as an alternative to lithographic techniques. This technique could be applied in the preparation of electronic skins and flexible devices. Additionally, for the first time, a 3 × 3 pixel resistive array sensor was integrated on a Ag nanowires/PDMS surface, demonstrating array pressure-sensing capabilities at pressures of 0–80 kPa. This study represents a significant step towards the development of multifunctional flexible optoelectronic devices.

Development of Micro Electrical Discharge Machine and Micro-hole Machining Using Multiple Micro Electrodes

Recent advances in microtechnology have highlighted the need for fabricating microscopic parts with complex three-dimensional structures. This, in turn, has increased the demand for innovative tools. Micro electrical discharge machining (MEDM) is one such technique that has proven to be effective in producing parts that are difficult to fabricate using traditional manufacturing methods, such as micro shafts and micro holes. Therefore, this study focuses on the development of a specialized MEDM system that incorporates an optimized wire electrical discharge grinding (WEDG) module. Additionally, the study successfully fabricates microelectrodes for use as cutting tools using the MEDM/WEDG system. These micro-electrodes are then utilized in the precise fabrication of various types of multiple micro electrodes through the use of reverse electrical discharge machining (REDM). These multiple micro electrodes are subsequently employed in precise hole machining operations using MEDM. The application of REDM signifies a significant technological advancement in the precision fabrication of microstructures. Furthermore, it is expected to greatly enhance the versatility and efficiency of microtechnology manufacturing processes. Overall, REDM represents a new approach to manufacturing that is capable of producing more complex and high-precision microstructures.

Development of Micro Electrical Discharge Machine and Micro-hole Machining Using Multiple Micro Electrodes

Recent advances in microtechnology have highlighted the need for fabricating microscopic parts with complex three-dimensional structures. This, in turn, has increased the demand for innovative tools. Micro electrical discharge machining (MEDM) is one such technique that has proven to be effective in producing parts that are difficult to fabricate using traditional manufacturing methods, such as micro shafts and micro holes. Therefore, this study focuses on the development of a specialized MEDM system that incorporates an optimized wire electrical discharge grinding (WEDG) module. Additionally, the study successfully fabricates microelectrodes for use as cutting tools using the MEDM/WEDG system. These micro-electrodes are then utilized in the precise fabrication of various types of multiple micro electrodes through the use of reverse electrical discharge machining (REDM). These multiple micro electrodes are subsequently employed in precise hole machining operations using MEDM. The application of REDM signifies a significant technological advancement in the precision fabrication of microstructures. Furthermore, it is expected to greatly enhance the versatility and efficiency of microtechnology manufacturing processes. Overall, REDM represents a new approach to manufacturing that is capable of producing more complex and high-precision microstructures.

Coating-assisted picosecond laser ablation for microstructure fabrication of SiC ceramics

Silicon carbide (SiC) ceramics have emerged as critical materials in the production of high-precision components. Ultrafast laser processing is deemed the optimal technique for micro-nano manufacturing of SiC. However, the permanent deposition layer induced by laser ablation can critically impact the precision of the component. In this work, a coating-assisted picosecond laser ablation (CAPLA) method was proposed, in which sacrificial photoresist coating was utilized to improve surface quality without efficiency loss. The coating serves to prevent the uncooled plasma from contacting with the substrate, thereby preventing the formation of a permanent deposition layer. By comparing the CAPLA method with laser direct ablation, the influence of laser parameters and photoresist coating characteristics on the deposition layer was investigated systematically. A processed surface devoid of deposition layers can be achieved by CAPLA with low pulse energy and a high number of scans. The uniformity is critical to ensure the transmission of the laser beam, and a larger thickness can improve the processing efficiency by increasing the limit of pulse energy capacity. Pin arrays and vacuum grooves for SiC ceramic vacuum chucks were fabricated to demonstrate the superiority of the CAPLA method. These results suggest that this method can be a novel and promising approach for high-precision component manufacturing.

Microstructure-Assisted Wafer-Scale Fabrication of Perovskite Microlaser Arrays.

All inorganic lead halide perovskites exhibit fascinating optical and optoelectronic characteristics for on-chip lasing, but the lack of precise control of wafer-scale fabrication for perovskite microstructure arrays restricts their potential applications in on-chip-integrated devices. In this work, a microstructure-template assisted crystallization method is demonstrated via a designed chemical vapor deposition process, achieving the controllable fabrication of homogeneous perovskite micro-hemispheroid (PeMH) arrays spanning the entire surface area of a 4-inch wafer. Benefiting from the low-loss whispering gallery resonance and plasmon-enhanced light-matter interactions in well-confined hybrid cavities, this CsPbX3/Ag (X = Cl, Br) plasmonic microlasers exhibit quite low thresholds below 10µJcm-2. Interestingly, these thresholds can be efficiently modulated through the manipulation of plasmonic resonance and electromagnetic field mode in PeMHs owning various diameters. This strategy not only provides a valuable methodology for the large-scale fabrication of perovskite microstructures but also endorses the potential of all-inorganic perovskite nanostructures as promising candidates for on-chip-integrated light sources.

Efficient Fabrication of Bioinspired Flexible Pressure Sensors via Electrohydrodynamic Jet Printing Method.

The bioinspired microdevices have made significant strides in various applications including human motion and health detection. However, the facile and highly efficient fabrication approach of flexible pressure sensors remains a great challenge. Herein, inspired by the gecko's foot structure, a flexible pressure sensor with microdomes structures was one-step fabricated by tip-assisted on-demand electrohydrodynamic jet (EHD-jet) printing method. Ascribed to the interlocking electrodes with microdome structure substantially enlarged 3D deformation rates. When the microdromes structure is under pressure, the resistivity of the CNTs film coated on the surface of the microdomes structure will change remarkably. By using the combined effect of assisted tip and ring focusing electrode, the influence and constraints on microstructure fabrication caused by substrate material and morphology are minimized. The desired uniform structures can be adjusted rapidly by changing the printing parameters and liquid properties. The high length-height ratio (0.64) of microdomes, notably enhances the sensitivity, the minimum detection limit is 2Pa and the response time is 40ms. Finally, the bionic flexible sensor shows excellent performance in capable of detecting pressure, sound vibrations, and human motion. This work introduces a previously unexplored method for the high-efficiency fabrication of micro-nano patterns for bionic flexible sensors, with potential applications in wearable devices and human health detection. This article is protected by copyright. All rights reserved.

Fabrication of three-dimensional microstructures on GaN surfaces through the integration of femtosecond laser ablation and ICP etching

Gallium nitride (GaN) surface microstructures are crucial for enhancing the performance and reliability of high-power devices. However, the direct fabrication of patterned three-dimensional (3D) microstructures on GaN surfaces remains a significant challenge. This paper introduces an innovative approach, employing a maskless femtosecond laser combined with inductively coupled plasma (ICP) etching, to efficiently fabricate petal-shaped 3D microstructures on GaN surfaces. By fine-tuning the ICP etching and femtosecond laser parameters, we have obtained the regularities of the dimensional variations of these 3D microstructures. Additionally, our investigation reveals that the design of microstructural concavity and convexity characteristics can be flexibly manipulated by controlling the ICP etching rate, which is influenced by the oxide content in the laser-modified zone. This study presents a novel method for straightforward fabrication of microstructures on gallium nitride surfaces.

Single-exposure femtosecond laser direct writing of Salvinia-inspired micropatterned functional surface

Bioinspired functional surfaces have attracted considerable attention within multiple scientific and industrial fields. In particular, the hollow hierarchical structure and chemical heterogeneity endow Salvinia leaves with superhydrophobicity and underwater air retention capability. However, replicating complex three-dimensional Salvinia-like patterns at the microscale currently relies on time-consuming additive manufacturing methods, preventing their wide adoption in industrial applications. Here, we report a high-throughput femtosecond laser direct writing strategy based on the quadrifurcate abruptly autofocusing beam for the single-exposure fabrication of Salvinia-like microstructures. Combined with chemical functionalization, both the hollow morphology and heterogeneous chemical properties of the natural counterpart were mimicked. The obtained bioinspired surfaces can repel and manipulate water droplets, and maintain superhydrophobicity even immersed underwater. The proposed single-exposure fabrication strategy is expected to contribute to the mass production of Salvinia-inspired surfaces, whose unique wetting properties promise great potential in chemical engineering, micro bioanalysis, and microfluidic devices.

Microstructure evolution and local mechanical properties of friction stir additively manufactured (FSAM) AA5083/AA6061/AA7075 gradient composite

The current study is focused on the successful fabrication and characterization of microstructure and properties gradient composite made of 3 mm thick sheets of AA5083-O, AA6061-T6, and AA7075-T6 alloys using friction stir additive manufacturing (FSAM) technique. Two combinations of four layered FSAM builds (6756 and 7567) were fabricated successfully without any major defects at the optimized process parameters of 850 rpm (tool rotational speed) and 55 mm/min (tool transverse speed). The material mixing, interfacial bonding features, microstructure evolution, and mechanical performance within the stir zones (SZ) were thoroughly examined using advanced characterization techniques. Electron backscatter diffraction (EBSD) analysis confirmed a gradient microstructure along the build depth in both FSAM builds, with average grain sizes decreasing from 52 μm (AA5083), 46 μm (AA6061), and 40 μm (AA7075) in base metals to ∼ 4–7 μm within the SZ. The remarkable grain refinement within the SZ was mainly attributed to the dominant presence of the continuous dynamic recrystallization (CDRX) mechanism. Texture analysis corresponding to pole figures (PFs) and orientation distribution function (ODF) plots reveals the crystallographic texture evolution along the build depth. The prevalent existence of B/ B‾ and C textures throughout all regions of the FSAM builds affirms the presence of ample shear strain during the FSAM procedure. Through thickness miniature tensile and microhardness tests depict the gradient in mechanical performance for both the FSAM builds along the build depth. Microhardness gradients in the range from ∼ 80 HV0.1 to ∼ 145 HV0.1 were observed along the build depth. The axial sample in the build direction shows appreciable strength (265 MPa and 224 MPa) and uniform elongation (28 % and 24 %) for 6756 and 7567 FSAM build, respectively. Furthermore, remarkable strain hardening behaviour corresponding to hardening capacity (Hc) and hardening exponent (n) was noticed for both the axial build samples compared to AA6061-T6 and AA7075-T6 base metals. These findings underscore the potential of FSAM in fabricating functionally gradient composite materials tailored to specific functional requirements.

Poisson Effect‐Assisted Replication Lithography for Rapid Fabrication of Three‐Dimensional Microstructures

Demands for micro‐ and nano‐fabrication techniques have been increasing over recent decades due to their foundational importance in fields such as electronics, sensors, displays, biotechnologies, and energy technologies. Still, the rapid and efficient fabrication of complex 3D microstructures has long been a challenge due to the inherent limitations of conventional imprint lithography and the slow fabrication speed of maskless lithography systems using femtosecond lasers. This study introduces a novel lithographic replication method for the rapid replication of intricate 3D microstructures with closed‐loops by leveraging the Poisson effect‐driven lateral deformation of soft molds. Specifically, the suggested technique employs an elastomeric soft mold, engraved with negative cavity parts of the target structure separated by intentional gaps. Lateral deformation of the material allows the separated cavities to assemble for replication of target microstructure and defectless release from the soft mold. In addition to the experimental demonstrations of the proposed method using well‐known materials like polydimethysliloxane (PDMS) for the soft mold and UV‐curable polyurethane acrylate (PUA) for replication, essential considerations such as material selection and master mold design are discussed. The presented method not only broadens the capabilities of imprint lithographic techniques but also holds promise for the large scale, continuous fabrication of complex 3D microstructures.

Ultrathin and Deformable Graphene Etch Mask for Fabrication of 3D Microstructures.

Three-dimensional (3D) microfabrication techniques play a crucial role across various research fields. These techniques enable the creation of functional 3D structures on the microscale, unlocking possibilities for diverse applications. However, conventional fabrication methods have limits in producing complex 3D structures, which require numerous fabrication steps that increase the costs. Graphene is an atomically thin material known for its deformability and impermeability to small gases and molecules, including reactive gases like XeF2. These features make graphene a potential candidate as an etch mask for 3D microfabrication. Here, we report the fabrication of various 3D microstructures using graphene etch masks directly grown and patterned on a Si substrate. The patterned graphene deforms and wraps the etched structures, allowing for the fabrication of complicated 3D microstructures, such as mushroom-like and step-like microstructures. As a practical demonstration of the graphene etch mask, we fabricate an omniphobic surface of reentrant 3D structures on a Si substrate. Our work provides a method for fabricating complex 3D microstructures using a graphene etch mask, contributing to advancements in etching and fabrication processes.

Study on nanosecond laser-induced iron plasma reactive etching of single-crystal CVD diamond

Single-crystal diamond has great potential applications in national defense, military, and aerospace fields. However, the high hardness, chemical inertness, and anisotropy bring great challenges to machine microstructures on the diamond. Here, iron plasma, generated by infrared nanosecond laser ablation of a Fe target, was utilized to etch single-crystal diamond. The EDS, Raman, and XPS analysis revealed the formation of iron carbide within the sputtered layer surrounding the diamond microgrooves, thereby confirming that the iron plasma reacts chemically with the diamond. It was observed that employing a reactive metal, such as iron, for etching diamond microgrooves yields improved morphological characteristics and enhanced etching efficiency compared to the use of a non-reactive metal, such as copper. Moreover, the process of material removal through laser-induced iron plasma etching of diamond was elucidated. Subsequently, a systematic investigation was conducted on the impact of processing parameters on the laser-induced iron plasma etching of diamonds. Various periodic microstructures with regular edges and no chipping and cracks were successfully processed on the diamond using suitable laser parameters. This study furnishes a novel approach for the efficient fabrication of high-quality microstructures on single-crystal diamonds.

High-precision 3D printing of multi-branch vascular scaffold with plasticized PLCL thermoplastic elastomer

Three-dimensional (3D) printing has emerged as a transformative technology for tissue engineering, enabling the production of structures that closely emulate the intricate architecture and mechanical properties of native biological tissues. However, the fabrication of complex microstructures with high accuracy using biocompatible, degradable thermoplastic elastomers poses significant technical obstacles. This is primarily due to the inherent soft-matter nature of such materials, which complicates real-time control of micro-squeezing, resulting in low fidelity or even failure. In this study, we employ Poly (L-lactide-co-ϵ-caprolactone) (PLCL) as a model material and introduce a novel framework for high-precision 3D printing based on the material plasticization process. This approach significantly enhances the dynamic responsiveness of the start-stop transition during printing, thereby reducing harmful errors by up to 93%. Leveraging this enhanced material, we have efficiently fabricated arrays of multi-branched vascular scaffolds that exhibit exceptional morphological fidelity and possess elastic moduli that faithfully approximate the physiological modulus spectrum of native blood vessels, ranging from 2.5 to 45 MPa. The methodology we propose for the compatibilization and modification of elastomeric materials addresses the challenge of real-time precision control, representing a significant advancement in the domain of melt polymer 3D printing. This innovation holds considerable promise for the creation of detailed multi-branch vascular scaffolds and other sophisticated organotypic structures critical to advancing tissue engineering and regenerative medicine.

Laser-induced plasma micromachining on surfaces parallel to the incident laser in different solutions

Laser-induced plasma micromachining (LIPMM) is an advanced technology that utilizes the plasma generated from laser breakdown to remove material, thereby facilitating the fabrication of microstructures. This paper explores the use of LIPMM on 304 stainless steel surfaces parallel to the laser beam in different solutions, focusing on the impact of the liquid environment on the machining process. It presents a theoretical analysis of the material removal mechanisms unique to this orientation and experimentally investigates how water, a salt solution, and ethanol affect plasma shockwave characteristics. Notably, the plasma shockwave in the salt solution demonstrates the most significant peak pressure and energy, enhancing the micromachining efficiency. These findings suggest that varying the liquid environment can significantly influence LIPMM's effectiveness, offering potential improvements in precision and control. This study broadens the understanding of LIPMM applications, especially in orientations not commonly explored, and opens new possibilities for advanced micromachining techniques in various industrial applications.

A Novel Method for Fabricating the Undulating Structures at Dermal-Epidermal Junction by Composite Molding Process.

The dermal-epidermal junction (DEJ), located between the dermal-epidermal layers in human skin tissue, plays a significant role in its function. However, the limitations of biomaterial properties and microstructure fabrication methods mean that most current tissue engineered skin models do not consider the existence of DEJ. In this study, a nanofiber membrane that simulates the fluctuating structure of skin DEJ was prepared by the composite molding process. Electrospinning is a technique for the production of nanofibers, which can customize the physical and biological properties of biomaterials. At present, electrospinning technology is widely used in the simulation of customized natural skin DEJ. In this study, four different concentration ratios of poly (lactic-co-glycolic acid) (PLGA) and polycaprolactone (PCL) nanofiber membranes were prepared based on electrospinning technology. We selected a 15%PLGA + 5%PCL nanofiber membrane with mechanical properties, dimensional stability, hydrophilicity, and biocompatibility after physical properties and biological characterization. Then, the array-based microstructure model was prepared by three-dimensional (3D) printing. Subsequently, the microstructure was created on a 15%PLGA + 5%PCL membrane by the micro-imprinting process. Finally, the cell proliferation and live/dead tests of keratinocytes (HaCaTs) and fibroblasts (HSFs) were measured on the microstructural membrane and flat membrane. The results showed that 15%PLGA + 5%PCL microstructure membrane was more beneficial to promote the adhesion and proliferation of HaCaTs and HSFs than a flat membrane.

Controllable Si micro-structuring by temporally modulated single-shot femtosecond pulse lithography

Micro-structured silicon surface plays a significant role in the electronics industry. Crystalline and amorphous phases of silicon, which have significantly different physical properties, can be transformed into each other using femtosecond laser, and assisted chemical etching enables the easy fabrication of various micro-structures. However, efficient and controllable fabrication of micro-cylinders, micro-rings, and micro-ring grooves on silicon surfaces still remains a challenge. Here, we propose a temporally modulated single-shot femtosecond pulse lithography technology, combining laser-induced silicon modification and chemical etching. In this technology, the occurrence of recrystallization allows for the flexible manipulation of the shape of the modified area, transitioning from circular to annular shapes by adjusting the laser fluence. This corresponds to the formation of micro-cylinders and micro-rings after etching. In the case of temporally shaped pulses, with an increasing pulse delay, the micro-rings formed after etching gradually transform into micro-ring grooves, as the recrystallization area created by the first sub-pulse is reacted by the second sub-pulse. Due to the characteristics of the single shot, the technology, when combined with the flying punch method, can be used for the high-efficiency fabrication of large-area silicon surface micro-structure arrays.