Abstract
Hierarchical microstructures are widely recognized as one of the most effective components for enhancing the performance of flexible pressure sensors. However, the rapid and controllable fabrication of pressure sensing layers with hierarchical microstructures remains a significant challenge. In this study, we propose a method that utilizes laser-induced microscale shrinkage of shape memory polymers to enable rapid and controllable fabrication of hierarchical microstructures for high-performance pressure sensing. We systematically investigate the influence of UV laser fabrication parameters on the architecture and morphology of hierarchical microstructures. A flexible pressure sensor, equipped with optimized hierarchical microstructures, exhibits a high sensitivity larger than 15 kPa-1 and excellent linearity (R2 = 0.994) in a range from 0 to 200 kPa. It features response and recovery times of 57 and 62 ms, respectively, and maintains good stability, enduring over 5,000 cycles. The laser-induced shrinkage of shape memory polymers offers an effective method for the fabrication of hierarchical microstructures, holding great potential to boost the performance of flexible pressure sensors in applications within intelligent robotics and wearable healthcare.
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