Fabrication Of Microlens Arrays Research Articles

Fabrication of high-quality microlens arrays on fused silica based on combined rapid evaporative ablation and precision melting polishing of CO2 lasers

Microlens arrays (MLAs) made from fused silica possess broad applications in wavefront sensing, optical focusing, beam shaping, etc. However, it is challenging to fabricate the hard-brittle silica MLAs with high accuracy and low cost by conventional manufacturing techniques efficiently. In this work, a novel two-step method, which consists of rapid evaporative ablation and precision melting polishing by CO2 lasers, is proposed to fabricate high-quality MLAs. The first step is to rapidly ablate and engrave micro-pillar arrays (MPAs) with flat groove bottom by high-energy density CO2 lasers. The second step is to precisely polish and shape the flat-topped MPAs into the dome-topped MLAs with good surface roughness (Sa) by low-energy density CO2 lasers. The whole preparation process could be achieved through a set of machining system. Firstly, the geometric dimension (period, p and height, h) of the microlens is determined by the Monte Carlo ray tracing method. Secondly, to diminish the groove depth inconsistency caused by heat accumulation, the multiple ablation compensation strategy is developed. The MPAs (p = 200–400 μm), of which maximum height error is 7.1%, are prepared in 1 s by the proposed compensation strategy. Then, the MPAs are smoothed into the MLAs by low-energy density CO2 lasers, and the average Sa is improved from 960 nm to 32.56 nm. Finally, the optical performances of the MLAs are verified from the effectiveness of imaging, focusing and homogenization. The proposed two-step processing method paves a new way to fabricate high-performance MLAs on hard-brittle fused silica with low cost and high efficiency.

A Rapid Fabrication Method of Large-Area MLAs with Variable Curvature for Retroreflectors Based on Thermal Reflow.

Retroreflectors are an important optical component, but current retroreflector structures and manufacturing processes are relatively complex. This paper proposes a rapid, low-cost, large-area method for fabricating retroreflectors based on microlens arrays. Tunable microlens arrays with adjustable curvature, fill factor, and sizes were prepared using photolithography and thermal reflow techniques. Subsequently, a two-step nanoimprinting process was used to create a flexible reverse mold and transfer the structure onto the desired substrate. The microlens arrays, with a diameter of 30 μm, a period of 33 μm, a curvature radius ranging from 15.5 to 18.8 μm, and a fill factor ranging from 75.1% to 88.8%, were fabricated this way. In addition, the method also fabricated microlens arrays with diameters ranging from 10 to 80 μm. Retroreflectors were made by sputtering a layer of silver on the MLAs as a reflecting layer, and tests showed that the microlens-based retroreflector exhibited superior retroreflective performance with a wide-angle response of ±75°. Microlens-based retroreflectors have the advantages of simple operation and controllable profiles. The fabrication method in this paper is suitable for large-scale production, providing a new approach to retroreflector design.

Fabrication of microlens arrays on curved substrates for large viewing angle integral imaging 3D display

Curved integral imaging for three-dimensional (3D) displays is well-known for offering an immersive experience and a wider display field of view. Presently, numerous techniques for fabricating curved microlens arrays (curved MLA) have been documented. Nevertheless, the majority of prior research relied on indirect approaches, like utilizing flexible substrates or creating molds. This paper introduces a method for directly fabricating microlens arrays (MLAs) on curved quartz glass. Well-designed arrays of controlled adhesive droplets were created on a hydrophilic-hydrophobic patterned surface. The resulting MLAs, manufactured on a curved substrate with a radius of 10 cm and dimensions of 5 cm × 5 cm, exhibit an 826.5 μm diameter, 56 μm inter-lens spacing, and a 4.5 mm focal length. The effective area of the curved MLA measures 45.8 mm × 45.8 mm. The study encompasses the design of a 2D elemental image and its integration with the curved MLA to achieve a compelling 3D display effect. The lateral viewing range is 2.2 cm. Notably, the field of view angle for the MLA, fabricated on a curved substrate, reached 11.2°, surpassing that of planar MLAs. The imaging system delivers an extensive field of view and attains a realistic 3D stereoscopic display effect. This method, employing various masks, facilitates the rapid fabrication of MLAs on substrates with diverse curvatures and sizes.

Micro-optics fabrication using blurred tomography

We demonstrate the fabrication of millimeter-sized optical components using tomographic volumetric additive manufacturing (VAM). By purposely blurring the writing beams through the use of a large etendue source, the layer-like artifacts called striations are eliminated enabling the rapid and direct fabrication of smooth surfaces. We call this method blurred tomography and demonstrate its capability by printing a plano–convex optical lens with comparable imaging performance to that of a commercially available glass lens. Furthermore, due to the intrinsic freeform design nature of VAM, we demonstrate the double-sided fabrication of a biconvex microlens array, and for the first time demonstrate overprinting of a lens onto an optical fiber using this printing modality. This approach to VAM will pave the way for low-cost, rapid prototyping of freeform optical components.

Chemical etching-assisted femtosecond laser multi-beam rapid preparation of As2Se3 microlens arrays

Chalcogenide glass has gradually evolved into a new generation of infrared optical glasses. As2Se3, a representative chalcogenide glass in the mid-infrared wavelength band, is commonly used in the production of infrared optical devices. In this paper, we primarily used femtosecond laser multi-beam parallel processing technology, complemented by chemical etching technology, to efficiently manufacture infrared microlens arrays with exceptional optical morphology. By adjusting parameters such as the number of laser beam splits, beam spacing, energy, and pulse count, we were able to produce a range of microlens arrays with varying diameters, depths, and filling ratios. Finally, we use the optical imaging test system to focus and capture images of the fabricated microlens arrays, demonstrating excellent optical performance. This processing technology has broad application prospects in the middle infrared band, such as military, medical, and other fields.

Low voltage driven microlens array based on ionic liquid doped polyvinyl chloride gels

Electrically responsive polyvinyl chloride (PVC) gels represent promising candidates for fabricating lenses with adjustable focal lengths. However, their practical use has been hampered by the elevated voltage requirements. In order to lower the driving voltage of PVC gels-based microlens array (MLA), trace ionic liquid (IL) −1-butyl-3-methylimidazole hexafluorophosphate ([BMIM]PF6) was doped. We employed a ring-array patterned electrode for the fabrication of PVC gels-based microlens arrays (MLAs). Our investigation revealed that the operating voltage for PVC gels-based MLAs doped with 0.01 wt% [BMIM]PF6 was nearly 1/22 of that required for MLAs created using undoped PVC gels. In the case of a microlens featuring a 250 μm aperture, the focal length varies from 4.2 mm to 2.5 mm as the voltage ranges from 5 V to 7 V. Importantly, this voltage range remains below the established safe limit for human exposure and obviates the need for intricate circuitry during manufacturing. Moreover, the extent of focal length variation can be expanded by augmenting the film thickness. Our approach offers valuable technical support for advancing the practical applications of PVC gel-based MLAs.

Fabrication of Large-Area Silicon Spherical Microlens Arrays by Thermal Reflow and ICP Etching.

In this paper, we proposed an efficient and high-precision process for fabricating large-area microlens arrays using thermal reflow combined with ICP etching. When the temperature rises above the glass transition temperature, the polymer cylinder will reflow into a smooth hemisphere due to the surface tension effect. The dimensional differences generated after reflow can be corrected using etching selectivity in the following ICP etching process, which transfers the microstructure on the photoresist to the substrate. The volume variation before and after reflow, as well as the effect of etching selectivity using process parameters, such as RF power and gas flow, were explored. Due to the surface tension effect and the simultaneous molding of all microlens units, machining a 3.84 × 3.84 mm2 silicon microlens array required only 3 min of reflow and 15 min of ICP etching with an extremely low average surface roughness Sa of 1.2 nm.

Study on the surface topography changes of photoresist in the design and fabrication of microlens array

Study on the surface topography changes of photoresist in the design and fabrication of microlens array

Design of a digital twin system for micro-lens array embossing manufacturing

Micro-lens arrays, due to their unique structure and outstanding optical performance, have been widely applied in advanced domains such as display technology, optical imaging, and laser processing. Among the manufacturing techniques, embossing molding is considered an efficient and precise method for fabricating micro-lens arrays. However, given the intricate structural characteristics of these arrays, precise control over the process becomes paramount. This study introduces a digital twin system for micro-lens array embossing manufacturing, grounded on a process knowledge base. The system relies on the rich process knowledge within the backend database combined with real-time sensor data, providing a powerful drive for the digital twin, thereby ensuring the precision and stability of the embossing manufacturing process. Additionally, the digital twin technology not only offers real-time monitoring and feedback for the production process of the micro-lens arrays but also aids researchers in optimizing process parameters, further enhancing product quality and consistency.

Monolithic silicon microlens arrays for far-infrared astrophysics.

Future far-infrared astrophysics observatories will require focal plane arrays containing thousands of ultrasensitive, superconducting detectors, each of which require efficient optical coupling to the telescope fore-optics. At longer wavelengths, many approaches have been developed, including feedhorn arrays and macroscopic arrays of lenslets. However, with wavelengths as short as 25µm, optical coupling in the far infrared remains challenging. In this paper, we present an approach to fabricate far-infrared monolithic silicon microlens arrays using grayscale lithography and deep reactive ion etching. The fabricated microlens arrays presented here are designed for two different wavebands: 25-40µm and 135-240µm. The microlens arrays have sags as deep as 150µm, are hexagonally packed with a pixel pitch of 900µm, and have an overall size as large as 80 by 15mm. We compare an as-fabricated lens profile to the design profile and calculate that the fabricated lenses would achieve 84% encircled power for the designed detector, which is only 3% less than the designed performance. We also present methods developed for antireflection coating microlens arrays and for a silicon-to-silicon die bonding process to hybridize microlens arrays with detector arrays.

Electrohydrodynamically printed microlens arrays with controllable curvature based on surface functionalization

Precisely controlling the optical characteristics of the microlens array (MLA) is a key issue for the MLA's fabrication and its applications. A cost-effective method for fabricating MLA with different curvatures and diameters by surface functionalization and electrohydrodynamic inkjet (E-jet) printing is proposed. The surface with self-assembled monolayers has low surface energy, which greatly improves the contact angle of the microlens. The UV-ozone treatment and neutral density filters with different optical densities are used to control the wettability of the substrates. Based on this method, the curvatures of the microlens can be controlled easily and the numerical aperture (NA) of the microlens can be adjusted from 0.18 to 0.49. Compared with traditional fabrication techniques, the method we demonstrated is flexible, low-cost, rapid, and capable of fabricating MLA with large area, high packing density, desirable NA, and diameters.

Switchable liquid crystal lenticular microlens arrays based on photopolymerization-induced phase separation for 2D/3D autostereoscopic displays.

Conventionally, the fabrication of liquid crystal lenticular microlens arrays (LCLMLAs) is complicated and costly. Here, we demonstrate a one-step fabrication technique for LCLMLAs, which is prepared through the photopolymerization-induced phase separation in the LC/polymer composite. The LCLMLAs possess both polarization-dependent and electrically tunable focusing properties. Furthermore, we construct a 14-view 2D/3D switchable autostereoscopic display prototype based on a 2D LCD panel and the prepared LCLMLA, which has a viewing angle of 14° and a crosstalk of 46.2% at the optimal viewing zone. The proposed LCLMLAs have the merits of simple fabrication, large-scale production, and low cost.

Development of Shape Prediction Model of Microlens Fabricated via Diffuser-Assisted Photolithography.

The fabrication of microlens arrays (MLAs) using diffuser-assisted photolithography (DPL) has garnered substantial recent interest owing to the exceptional capabilities of DPL in adjusting the size and shape, achieving high fill factors, enhancing productivity, and ensuring excellent reproducibility. The inherent unpredictability of light interactions within the diffuser poses challenges in accurately forecasting the final shape and dimensions of microlenses in the DPL process. Herein, we introduce a comprehensive theoretical model to forecast microlens shapes in response to varying exposure doses within a DPL framework. We establish a robust MLA fabrication method aligned with conventional DPL techniques to enable precise shape modulation. By calibrating the exposure doses meticulously, we generate diverse MLA configurations, each with a distinct shape and size. Subsequently, by utilizing the experimentally acquired data encompassing parameters such as height, radius of curvature, and angles, we develop highly precise theoretical prediction models, achieving R-squared values exceeding 95%. The subsequent validation of our model encompasses the accurate prediction of microlens shapes under specific exposure doses. The verification results exhibit average error rates of approximately 2.328%, 7.45%, and 3.16% for the height, radius of curvature, and contact angle models, respectively, all of which were well below the 10% threshold.

Mask-Shifting-Based Projection Lithography for Microlens Array Fabrication

Microlens arrays play a critical role in enhancing imaging systems due to their outstanding optical performance, compact size, and lightweight nature. However, traditional fabrication methods for microlens arrays suffer from low precision, inefficiency, high costs, and a lack of adequate surface figure control. In this paper, we present a novel approach for microlens array fabrication, using a projection lithography process with mask-shifting. The method employs a 0.2× projection objective lens to enhance linewidth resolution. By employing a projection-based mask-shift filtering technique, we achieve superior surface figure accuracy while reducing the complexity of mask preparation. The experimental results for four microlenses with different aperture sizes demonstrate surface figure accuracy in the submicron range and surface roughness at the nanometer level. In addition, 3D profilometer scanning equipment was employed to measure the surface roughness of these microlens arrays, and the measurement results of these microlens arrays processed using the proposed method for their surface roughness are 18.4 nm, 29.6 nm, 34.4 nm, and 56.1 nm. Our findings indicate that this method holds great potential in microlens array fabrication, offering the ability to achieve lower linewidths and higher surface figure accuracy compared to conventional methods.

Cutting depth-oriented ductile machining of infrared micro-lens arrays by elliptical vibration cutting.

Infrared micro-lens arrays (MLAs) are widely used in advanced optical systems due to their advantages such as low focusing depth and high sensitivity. Elliptical vibration cutting (EVC) is a promising approach for the fabrication of MLAs on infrared brittle materials. However, the mechanism of ductile machining of MLAs prepared by EVC has not been fully elucidated so far. In this paper, based on the vibration intermittent cutting characteristics and the transient material removal state, a ductile machining model of MLAs on brittle material by EVC was established. This model effectively calculates the subsurface damage of the machined surface and realizes the prediction of the critical depth for ductile machining of MLAs. Furthermore, the concave micro-lenses were prepared on single crystal silicon by EVC and ordinary cutting (OC) to verify this model. The results demonstrated that EVC could significantly enhance the critical depth by approximately 4.3 times compared to OC. Microstructural surface damage predominantly occurs at the exit side of the tool cutting. This proposed model accurately predicts the actual critical depth, with an average error of about 7.5%. Additionally, elevating the amplitude in the depth of cut direction could increase the critical depth, but a larger amplitude would inhibit the increase of the critical depth. This study contributes to a better understanding of ductile machining of microstructure on brittle materials and facilitates the process optimization of MLAs fabrication using EVC.

Femtosecond Laser Fabrication of SiC Microlens Arrays as Integrated Light Homogenizer and Splitter

Silicon carbide (SiC) plays a vital role in special optics because of its stable physicochemical and excellent optical properties; however, making the fabrication of SiC considerably more difficult. In this study, femtosecond laser-assisted inductively coupled plasma etching (ICP) technology is proposed to achieve the efficient fabrication of large-area microlens arrays on the surface of silicon carbide. As an illustration, the microlens array was used for high-quality beam homogenization (uniformity is up to 90%) of the transmitted and reflected Gaussian light beams with a wavelength of 532 nm. The beam-splitting ratio can be dynamically adjusted (from 1.2 to 3.2) by controlling the angle of the incident light, indicating that the SiC microlens arrays can act as an integrated optical homogenizer and beam splitter. This method demonstrates the broad application prospects of SiC in miniaturized and integrated special optics and provides new ideas for further applications of SiC in integrated optical systems.

Laser-Induced Fabrication of Micro-Optics on Bioresorbable Calcium Phosphate Glass for Implantable Devices.

In this study, a single-step nanosecond laser-induced generation of micro-optical features is demonstrated on an antibacterial bioresorbable Cu-doped calcium phosphate glass. The inverse Marangoni flow of the laser-generated melt is exploited for the fabrication of microlens arrays and diffraction gratings. The process is realized in a matter of few seconds and, by optimizing the laser parameters, micro-optical features with a smooth surface are obtained showing a good optical quality. The tunability of the microlens' dimensions is achieved by varying the laser power, allowing the obtaining of multi-focal microlenses that are of great interest for three-dimensional (3D) imaging. Furthermore, the microlens' shape can be tuned between hyperboloid and spherical. The fabricated microlenses exhibited good focusing and imaging performance and the variable focal lengths were measured experimentally, showing good agreement with the calculated values. The diffraction gratings obtained by this method showed the typical periodic pattern with a first-order efficiency of about 5.1%. Finally, the dissolution characteristics of the fabricated micropatterns were studied in a phosphate-buffered saline solution (PBS, pH = 7.4) demonstrating the bioresorbability of the micro-optical components. This study offers a new approach for the fabrication of micro-optics on bioresorbable glass, which could enable the manufacturing of new implantable optical sensing components for biomedical applications.

The fabrication of microlens array in PMMA material with the assistant of nickel pillars by LIGA technology and thermal reflow method

The fabrication of microlens array in PMMA material with the assistant of nickel pillars by LIGA technology and thermal reflow method

Drop-on-Demand Electrohydrodynamic Jet Printing of Microlens Array on Flexible Substrates

The inkjet-printing technique is regarded as an efficient method to fabricate microlens arrays used in digital cameras, medical endoscopes, displays, optical communication, and light source devices. The diameter, height, and aspect ratio of the microlens are the major contributors to these optical properties. Hence, the optical characteristics of the microlens array can vary with the type of inkjet-printing method. In this study, by employing electrohydrodynamic (EHD) jet printing with the drop-on-demand strategy, we fabricated microlenses and microlens arrays using a UV-curable photopolymer liquid on flexible poly(3,4-ethylenedioxythiophene):polystyrenesulfonate-coated poly(ethylene terephthalate). By controlling the number of printing drops, which is regarded as an efficient approach to control the dimension of the microlens, lenses with diameters of 11.9 ± 0.2 and 24.4 ± 0.5 μm and aspect ratio ranging from 0.22 to 0.33 were constructed. It was found that the focal length (15.44–26.79 μm), numerical aperture (0.39–0.46), and f-number (1.3–1.1) varied with the number of printing drops. The results demonstrate that the EHD-printed microlenses have a much shorter focal length, higher numerical aperture, and smaller f-number than the previously reported printed lenses. Hence, the EHD-printed microlens can be utilized to produce wide-angle-of-view applications and capture accurate images with insufficient light intensity. In addition, the proposed EHD-printing method may provide a cost-effective and simple route for manufacturing microlens arrays.

Optical design and fabrication of zinc selenide microlens array with extended depth of focus for biomedical imaging

Optical coherence tomography is a well-known technique for the optical imaging biological tissues. However, the depth scanning range of high-resolution optical coherence tomography is restricted by its depth of focus. In this study, a Zinc Selenide (ZnSe) Microlens Array (MLA) is employed to overcome the depth-of-focus limitation of optical coherence tomography. The ZnSe material with a low Abbe number and high chromatic dispersion extends the depth of focus with transverse resolution. The ZnSe MLA focused the incident light (from visible to near-infrared (NIR) region) on multiple focal planes with the uniform distribution of light over a biological tissue. The MLA is designed using Zemax OpticStudio software and fabricated via a single-point diamond-turning based on Slow Tool Servo (STS) configuration. STS machining has the unique advantage of offering larger degrees of freedom with no additional baggage, thereby reducing the setup time. The experimental results show the effectiveness of the STS machining process in fabricating ZnSe MLA with desired accuracies. The characterization of fabricated MLA using Coherence Correlation Interferometry (CCI) depicts uniform lenslets with no structural and positional distortion, with a total error of 32 nm within the tolerance limit.