Chemical etching-assisted femtosecond laser multi-beam rapid preparation of As2Se3 microlens arrays

Abstract

Chalcogenide glass has gradually evolved into a new generation of infrared optical glasses. As2Se3, a representative chalcogenide glass in the mid-infrared wavelength band, is commonly used in the production of infrared optical devices. In this paper, we primarily used femtosecond laser multi-beam parallel processing technology, complemented by chemical etching technology, to efficiently manufacture infrared microlens arrays with exceptional optical morphology. By adjusting parameters such as the number of laser beam splits, beam spacing, energy, and pulse count, we were able to produce a range of microlens arrays with varying diameters, depths, and filling ratios. Finally, we use the optical imaging test system to focus and capture images of the fabricated microlens arrays, demonstrating excellent optical performance. This processing technology has broad application prospects in the middle infrared band, such as military, medical, and other fields.