The magneto-optical effects of rare earth ferrite can be greatly improved by doping Ce3+ ions. CeFeO3 with high Ce3+ concentration has excellent magneto-optical properties in theory. And due to its perovskite structure it is more suitable to be deposited on the substrates of optical devices compared with the commercial garnet ferrite. In this paper, the pure phase CexFe2–xO3 films were successfully obtained on the quartz glass and <100>-oriented SrTiO3 crystal substrates by radio frequency magnetron sputtering. The effects of substrate and Ce:Fe ratio on the epitaxial orientation, magnetism and magneto-optical performance of films were systematically studied. For the Ce1.0Fe1.0O3/STO film, its MCD ellipticity (ψF) intensity can reach up to 4750(°)/cm in the visible band and 14090(°)/cm in near ultraviolet band. And it also shows a strong vertical magnetic anisotropy, which makes it maintain a good thermal stability when the device size is reduced. These mean that the Ce1.0Fe1.0O3/STO film has a promising application in integrated optical communication devices.