Abstract
Herein, SmFeO3 thin films are prepared by using magnetron sputtering technology on quartz-glass and SrTiO3(STO)(1 0 0) substrates. The influence of film thickness and choice of substrate on film quality and growth orientation is studied in detail. Moreover, the impact of phase purity and growth orientation on optical, magnetic and magneto-optical properties is discussed. The results reveal that the film thickness and choice of substrate significantly influence the induced stresses at film/substrate interface and growth orientation of the annealed film. The as-fabricated SmFeO3 thin films have demonstrated highly crystalline structure, excellent transmittance and enhanced magneto-optical properties. Moreover, obvious anisotropy in magnetization and magneto-optical properties has been observed. The SmFeO3 films with excellent magneto-optical properties can be fabricated by selecting optimal film thickness and substrate. It is expected that SmFeO3 film is a promising material for integrated optical isolators and magneto-optical modulators.
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