For 90~180°C low temperature waste heat resources, three different types of organic working fluids, benzene, isopentane and R245fa are selected from the perspectives of safety, environmental protection and physical properties of working fluid. The mathematical models of the system are established through MATLAB and REFPROP and the influence of the evaporation temperature on the performance of the ORC low temperature waste heat power generation system is studied. The results show that the thermal efficiency and net output power of the system increase with the increase of evaporation temperature; the evaporation pressure of CFC-type working fluids is relatively low; the net output power and thermal efficiency of HFC and HC-type working fluids are generally relatively low. The evaporator has the largest irreversible loss in the system, followed by the condenser and expander while the working fluid pump has the smallest irreversible loss.