We have studied the cathodoluminescent properties of Y2SiO5:Ce, Zn2SiO4:Ti, Zn2SiO4:Mn, Y2O3:Eu thin films obtained by high-frequency magnetron sputtering. Based on measurements of the luminescence spectra, we have shown that the films can be used as luminophores with blue emission (Y2SiO5:Ce, Zn2SiO4:Ti), green emission (Zn2SiO4:Mn), and red emission (Y2O3:Eu). We have studied the dependences of the luminescence intensity on the energy of the exciting electrons, the electron beam current density, and the exposure time. We hypothesize that the decrease in the luminescence intensity during electron bombardment is connected with formation of new oxide layers as a result of an electron-stimulated surface chemical reaction.
Read full abstract