Application Of Etching Research Articles

INVITED] Sensing properties of micro-cavity in-line Mach-Zehnder interferometer enhanced by reactive ion etching

In this work, we discuss an application of reactive ion etching (RIE) for enhancing the sensing properties of a micro-cavity in-line Mach-Zehnder interferometer (µIMZI). The µIMZI was fabricated using femtosecond laser micromachining in a standard single-mode fiber as a circular hole with a diameter of 54 µm. Next, the structures underwent two kinds of RIE using as reactive gases: sulfur hexafluoride (SF6) and oxygen (O2) mixtures (SF6/O2) or O2 itself. When RIE with SF6/O2 was applied, it allowed for an efficient and well-controlled etching of the fabricated structure at nanometers level observed as an increase in spectral depths of the minima in the µIMZI transmission spectrum. A similar RIE process with O2 alone was ineffective. The well-defined minima obtained with the SF6/O2 RIE significantly improved the resolution of measurements made with the µIMZI. The effect was demonstrated for high-resolution refractive index (RI) measurements of liquids in the cavity. The result of the RIE process was to clean the micro-cavity bottom, increase its depth, and smooth its sidewalls. As an additional effect, the wettability of the micro-cavity surface was improved, making the RI measurements faster and more repeatable. Moreover, we demonstrated that RIE with SF6/O2 results in more stable wettability improvement than when O2 is applied as a reactive gas.

Effect of Silver Nanoparticles, Zinc Oxide Nanoparticles and Titanium Dioxide Nanoparticles on Microshear Bond Strength to Enamel and Dentin

This study was aimed to evaluate whether antibacterial pretreatment of enamel and dentin with silver nanoparticles (SNPs), zinc oxide nanoparticles (ZNPs) and titanium dioxide nanoparticles (TNPs) has any effect on the microshear bond strength of an etch-and-rinse adhesive system. Eighty human third molars were randomly assigned to eight subgroups (n = 10). Enamel groups included no pretreatment (E), pretreatments with SNPs (ESNP), ZNPs (EZNP) and TNPs (ETNP) before acid etching and adhesive application. Dentinal groups included no pretreat-ment (D), pretreatments with SNPs (DSNP), ZNPs (DZNP) and TNPs (DTNP). The specimens were bonded by Adper Single Bond and polyvinyl chloride microtubes and were restored with Z250 composite. The bonded surfaces underwent microshear bond strength (uSBS) test. Data in megapascal (MPa) were analyzed with the Kruskal-Wallis test and the Mann-Whitney test (p = 0.05). There was not a significant difference among the groups in enamel (p > 0.05). There was no significant difference between the application of three nanoparticles and the control group in dentin. However, DSNPs had a higher uSBS (25.60 ± 14.61) than that of the DZNPs and DTNPs groups (p = 0.03 and p = 0.001, respectively). Also, the mean uSBS value was lower in dentin groups compared to the respective enamel groups (p < 0.05) except for groups DSNPs and ESNPs in which no significant difference was found (p > 0.05). Pretreatment with SNPs, TNPs, and ZNPs can be suggested to achieve potent antibacterial activities without compromising the bond strength. The best result was obtained for pretreatment with SNPs compared to pretreatment with TNPs or ZNPs in dentin and enamel, albeit the differences were not significant in the enamel groups. Effective antibacterial treatment prior to adhesive bonding application is desirable to provide successful restoration if it would not adversely affect the bond strength of the adhesive system. Nanoparticles can be applied to meet this goal.

Bond strength of composite resin to white mineral trioxide aggregate: Effect of different surface treatments.

Background:The main aim of restorative dentistry is to restore and preserve dental health with the use of appropriate restorative modalities to protect the pulp and restore its function. This study compared the effect of different surface treatments of mineral trioxide aggregate (MTA) on the bond strength of composite resin to MTA.Materials and Methods:Forty cylindrical acrylic blocks with a hole were prepared and filled by ProRoot MTA. The samples were assigned to four groups: Group 1 – no surface treatment; Group 2 – phosphoric acid etching; Group 3 – sandblasting; and Group 4 – hydrofluoric acid (HF) etching, rinsing, and silane application. OptiBond Solo Plus adhesive was utilized in all the groups. Then, composite resin cylinders were bonded to sample surfaces. The samples were thermocycled and tested for microshear bond strength using a universal testing machine at a crosshead speed of 1 mm/min. Data were analyzed with Kruskal–Wallis and Mann–Whitney tests. Scanning electron microscopy images were prepared for each study group after surface treatments.Results:Means and standard deviations of bond strength values in study groups 1–4 were 14.83 ± 7.76, 21.85 ±7.99, 6.48 ± 3.89, and 26.01 ± 11.09 Mpa, respectively.Conclusions:Within the limitations of this study, phosphoric acid etching or HF etching plus silanization was preferred to surface treatment of MTA before composite resin bonding.

Effect of various bleaching treatments on shear bond strength of different universal adhesives and application modes.

ObjectivesThe aim of this in vitro study was to evaluate the bond strength of 2 universal adhesives used in different application modes to bleached enamel.Materials and MethodsExtracted 160 sound human incisors were used for the study. Teeth were divided into 4 treatment groups: No treatment, 35% hydrogen peroxide, 16% carbamid peroxide, 7.5% carbamid peroxide. After bleaching treatments, groups were divided into subgroups according to the adhesive systems used and application modes (n = 10): 1) Single Bond Universal, etch and rinse mode; 2) Single Bond Universal, self-etch mode; 3) Gluma Universal, etch and rinse mode; 4) Gluma Universal, self-etch mode. After adhesive procedures nanohybrid composite resin cylinders were bonded to the enamel surfaces. All specimens were subjected to shear bond strength (SBS) test after thermocycling. Data were analyzed using a 3-way analysis of variance (ANOVA) and Tukey post hoc test.ResultsNo significant difference were found among bleaching groups (35% hydrogen peroxide, 16% carbamid peroxide, 7.5% carbamid peroxide, and no treatment groups) in the mean SBS values. There was also no difference in SBS values between Single Bond Universal and Gluma Universal at same application modes, whereas self-etch mode showed significantly lower SBS values than etch and rinse mode (p < 0.05).ConclusionsThe bonding performance of the universal adhesives was enhanced with the etch and rinse mode application to bleached enamel and non-bleached enamel.

The effects of utilizing conventional etching versus self etch primer on the enamel color change after treatment with fixed orthodontic appliances: in vivo study

Objectives: The present study was conducted to evaluate clinically the effect of conventional etching and the self etchprimer on the change in enamel color before and after orthodontic treatment. Materialand Methods: The study was conducted on 24 patients treated with fixed orthodonticappliances. Metal brackets were bonded to the teeth mesial to first molars. The bracketswere bonded utilizing Transbond XT adhesiveafter application of either conventional etching (%37 phosphoric acid etch and Transbond XT primer) or Transbond XT self etch primer (splitmouth design). Teeth which showed bracket bond failure were excluded from the study. Therefore, the final number of teeth which were included in the conventional etch and self etch groups were 164 and 160 respectively. The color of the labial and buccal surfaces of the teeth mesial to the first molars was evaluated before bracket bonding and after orthodontic treatment. This step was done with the aid of spectrophotometer Vita Easyshade (Vita Zahnfabri, Germany). The evaluation of the color depended on the color space system of CIELAB (Commission Internationale de l›Eclairage L*, a* and b*). Three parameters were measured (L*, a*, b*). Also, color change(ΔE) was calculated. Then the collected data was statistically analyzed using Paired t-test.Results: All color measurements (L*, a*, b*) were significantly decreased after orthodontic treatment(P<0.05). Conventional etching provided significantly higher ΔE value than the self etch primer (P<0.05).Conclusion: The utilization of conventional etching or self etch primer have a significant negative effect ontooth color after orthodontic treatment. However, the conventional etching has higher pronounced effects.

Interfacial microscopic examination and chemical analysis of resin-dentin interface of self-adhering flowable resin composite.

Background: The newly introduced self-adhering flowable resin-composites decrease the required time for application by incorporation of an acidic adhesive monomer, thus reducing the number of steps, but its bonding is still uncertain. The aim of this study was to evaluate the interfacial microscopic examination and chemical analysis at the resin-dentin interface of a self-adhering flowable resin composite (Vertise™Flow Self-Adhering Flowable Composite, Kerr Dental, USA) versus a total-etch (Te-Econom Plus) resin composite, using an etching agent (Eco-Etch gel) and bonding agent (Single Bond Universal). Methods: Sixteen freshly extracted sound human posterior teeth were used. The teeth were randomly divided into two groups: 8 specimens per type of composite. Standard-shaped class V cavities were prepared on the buccal surface. One group was restored by Te-Econom Plus resin composite by total-etch technique using Eco-Etch gel, which was applied to dentine for 15 seconds, followed by rinsing, drying and bonding agent application (Single Bond Universal). The other group restored directly with self-adhering resin composite (Vertise-Flow) without application of etch or bond. Curing was done for 20 seconds using a light emitting diode light curing unit. Evaluation of the resin-dentin interface was done microscopically by examination of marginal gap distance in μm using scanning electron microscope (SEM), and chemical analysis of silver particles was observed using SEM with energy-dispersive X-ray spectrometry after 24 hours of specimen storage in ammoniacal silver nitrate. Results: Regarding marginal gap distance (µm) and silver atomic % mean values, teeth restored with self-adhering resin composite (Vertise-Flow) showed significantly higher mean values than the multi-step etch and rinse resin composite group (5.2 vs 0; 12.2 vs 8.2, respectively). Conclusions: Resin-dentin bonding using total-etch resin composite technique was more effective than self-adhering flowable resin composite (Vertise-Flow) regarding marginal gap formation and penetration of silver particles. Further studies for bond strength could be performed.

Interfacial microscopic examination and chemical analysis of resin-dentin interface of self-adhering flowable resin composite

Background: The newly introduced self-adhering flowable resin-composites decrease the required time for application by incorporation of an acidic adhesive monomer, thus reducing the number of the steps, but its bonding is still uncertain. The aim of this study was to evaluate the interfacial microscopic examination and chemical analysis at the resin-dentin interface of a self-adhering flowable resin composite (Vertise-Flow) versus a total-etch (Te-Econom Plus) resin composite, using an etching agent (Eco-Etch gel) and bonding agent (Single Bond Universal). Methods: Sixteen freshly extracted sound human posterior teeth were used. The teeth were randomly divided into two groups: 8 specimens per type of composite. Standard-shaped class V cavities were prepared on the buccal surface. One group was restored by Te-Econom Plus resin composite by total-etch technique using Eco-Etch gel, which was applied to dentine for 15 seconds, followed by rinsing, drying and bonding agent application (Single Bond Universal). The other group restored directly with self-adhering resin composite (Vertise-Flow) without application of etch or bond. Curing was done for 20 seconds using a light emitting diode light curing unit. Evaluation of the resin-dentin interface was done microscopically by examination of marginal gap distance in μm using scanning electron microscope (SEM), and chemical analysis of silver particles was observed using SEM with energy-dispersive X-ray spectrometry after 24 hours of specimen storage in ammoniacal silver nitrate. Results: Regarding marginal gap distance (µm) and silver atomic % mean values, teeth restored with self-adhering resin composite (Vertise-Flow) showed significantly higher mean values than the multi-step etch and rinse resin composite group (5.2 vs 0; 12.2 vs 8.2, respectively). Conclusions: Resin-dentin bonding using total-etch resin composite technique was more effective than self-adhering flowable resin composite (Vertise-Flow) regarding marginal gap formation and penetration of silver particles. Further studies for bond strength could be performed.

Interfacial microscopic examination and chemical analysis of resin-dentin interface of self-adhering flowable resin composite

Background: The newly introduced self-adhering flowable resin-composites decrease the required time for application by incorporation of an acidic adhesive monomer, thus reducing the number of steps, but its bonding is still uncertain. The aim of this study was to evaluate the interfacial microscopic examination and chemical analysis at the resin-dentin interface of a self-adhering flowable resin composite (Vertise™Flow Self-Adhering Flowable Composite, Kerr Dental, USA) versus a total-etch (Te-Econom Plus) resin composite, using an etching agent (Eco-Etch gel) and bonding agent (Single Bond Universal). Methods: Sixteen freshly extracted sound human posterior teeth were used. The teeth were randomly divided into two groups: 8 specimens per type of composite. Standard-shaped class V cavities were prepared on the buccal surface. One group was restored by Te-Econom Plus resin composite by total-etch technique using Eco-Etch gel, which was applied to dentine for 15 seconds, followed by rinsing, drying and bonding agent application (Single Bond Universal). The other group restored directly with self-adhering resin composite (Vertise-Flow) without application of etch or bond. Curing was done for 20 seconds using a light emitting diode light curing unit. Evaluation of the resin-dentin interface was done microscopically by examination of marginal gap distance in μm using scanning electron microscope (SEM), and chemical analysis of silver particles was observed using SEM with energy-dispersive X-ray spectrometry after 24 hours of specimen storage in ammoniacal silver nitrate. Results: Regarding marginal gap distance (µm) and silver atomic % mean values, teeth restored with self-adhering resin composite (Vertise-Flow) showed significantly higher mean values than the multi-step etch and rinse resin composite group (5.2 vs 0; 12.2 vs 8.2, respectively). Conclusions: Resin-dentin bonding using total-etch resin composite technique was more effective than self-adhering flowable resin composite (Vertise-Flow) regarding marginal gap formation and penetration of silver particles. Further studies for bond strength could be performed.

Interfacial microscopic examination and chemical analysis of resin-dentin interface of self-adhering flowable resin composite

Background: The newly introduced self-adhering flowable resin-composites decrease the required time for application by incorporation of an acidic adhesive monomer, thus reducing the number of the steps, but its bonding is still uncertain. The aim of this study was to evaluate the interfacial microscopic examination and chemical analysis at the resin-dentin interface of a self-adhering flowable resin composite (Vertise-Flow) versus a total-etch (Te-Econom Plus) resin composite, using an etching agent (Eco-Etch gel) and bonding agent (Single Bond Universal). Methods: Sixteen freshly extracted sound human posterior teeth were used. The teeth were randomly divided into two groups: 8 specimens per type of composite. Standard-shaped class V cavities were prepared on the buccal surface. One group was restored by Te-Econom Plus resin composite by total-etch technique using Eco-Etch gel, which was applied to dentine for 15 seconds, followed by rinsing, drying and bonding agent application (Single Bond Universal). The other group restored directly with self-adhering resin composite (Vertise-Flow) without application of etch or bond. Curing was done for 20 seconds using a light emitting diode light curing unit. Evaluation of the resin-dentin interface was done microscopically by examination of marginal gap distance in μm using scanning electron microscope (SEM), and chemical analysis of silver particles was observed using SEM with energy-dispersive X-ray spectrometry after 24 hours of specimen storage in ammoniacal silver nitrate. Results: Regarding marginal gap distance (µm) and silver atomic % mean values, teeth restored with self-adhering resin composite (Vertise-Flow) showed significantly higher mean values than the multi-step etch and rinse resin composite group (5.2 vs 0; 12.2 vs 8.2, respectively). Conclusions: Resin-dentin bonding using total-etch resin composite technique was more effective than self-adhering flowable resin composite (Vertise-Flow) regarding marginal gap formation and penetration of silver particles. Further studies for bond strength could be performed.

Influence of application method on surface free-energy and bond strength of universal adhesive systems to enamel.

The aim of the present study was to determine the influence of different adhesive application methods and etching modes on enamel bond effectiveness of universal adhesives using shear bond strength (SBS) testing and surface free-energy (SFE) measurements. The adhesives Scotchbond Universal, All-Bond Universal, Adhese Universal, and G-Premio Bond were used. Prepared bovine enamel specimens were divided into four groups, based on type of adhesive, and subjected to the following surface treatments: (i) total-etch mode with active application; (ii) total-etch mode with inactive application; (iii) self-etch mode with active application; and (iv) self-etch mode with inactive application. Bonded specimens were subjected to SBS testing. The SFE of the enamel surfaces with adhesive was measured after rinsing with acetone and water. The SBS values in total-etch mode were significantly higher than those in self-etch mode. In total-etch mode, significantly lower SBS values were observed with active application compared with inactive application; in contrast, in self-etch mode there were no significant differences in SBS between active and inactive applications. A reduction in total SFE was observed for active application compared with inactive application. The interaction between etching mode and application method was statistically significant, and the application method significantly affected enamel bond strength in total-etch mode.

Evaluate the effect of different mmps inhibitors on adhesive physical properties of dental adhesives, bond strength and mmp substarte activity

We have evaluated and compare the effect of different exogenous MMP inhibitors on adhesive physical properties of dental adhesives, bond strength, micro permeability and MMP substrate activity. 180-grit Sic paper was used to obtain the superficial dentin surface from each and every tooth after the wet grinding procedure. Dentin was exposed to four different MMP inhibitors to evaluate the effect on resin adhesive dentin interface. The four groups used in study were: 2% chlorhexidine digluconate, 2% doxycycline solution, 5% Proanthocyanidin (PR), Control Group. We evaluated and compared the four groups at each and every step of etching, bonding and resin application. Then, the immunolabeling was done with the help of the secondary antibodies with the pH of 7 and the dilution of 1:20. Amongst all the etching pretreatment groups, CHE group (Chlorhexidine etching group) revealed highest exposure to collagen fibrils than the other groups of etching. Then after the CHE group, the next group which has the second highest exposure DOE group. MMP inhibitor application for time duration of 1 minute after the etching procedures significantly improves the bond strength, exposure to collagen fibres and uniforms the dense form of dentin hybrid layer.

Bonding over Dentin Replacement Materials

IntroductionDentin replacement materials are necessary in large cavities to protect the pulp and reduce the bulk of filling material. These materials are layered with a composite resin restorative material. Microleakage caused by poor bonding of composite resin to underlying dentin replacement material will result in pulp damage. The aim of this study was to characterize the interface between dentin replacement materials and composite resin and to measure the shear bond strength after dynamic aging. MethodsBiodentine (Septodont, Saint Maur-des-Fosses, France), Theracal LC (Bisco, Schaumburg, IL), and Fuji IX (GC, Tokyo, Japan) were used as dentin replacement materials. They were then overlaid with a total-etch and bonding agent or a self-etch primer and composite resin or a glass ionomer cement. All combinations were thermocycled for 3000 cycles. The interface was characterized using scanning electron microscopy and elemental mapping. Furthermore, the shear bond strength was assessed. ResultsThe Biodentine surface was modified by etching. The Theracal LC and Fuji IX microstructure was unchanged upon the application of acid etch. The Biodentine and glass ionomer interface showed an evident wide open space, and glass particles from the glass ionomer adhered to the Biodentine surface. Elemental migration was shown with aluminum, barium, fluorine, and ytterbium present in Biodentine from the overlying composite resin. Calcium was more stable. The bond strength between Theracal LC and composite using a total-etch technique followed by self-etch primer achieved the best bond strength values. Biodentine exhibited the weakest bond with complete failure of bonding shown after demolding and thermocycling. ConclusionsDynamic aging is necessary to have clinically valid data. Bonding composite resin to water-based dentin replacement materials is still challenging, and further alternatives for restoration of teeth using such materials need to be developed.

Enhanced atomic layer etching of native aluminum oxide for ultraviolet optical applications

The authors report on the development and application of an atomic layer etching (ALE) procedure based on alternating exposures of trimethylaluminum and anhydrous hydrogen fluoride (HF) implemented to controllably etch aluminum oxide. The ALE process utilizes the same chemistry previously demonstrated in the atomic layer deposition of aluminum fluoride thin films, and can therefore be exploited to remove the surface oxide from metallic aluminum and replace it with thin fluoride layers in order to improve the performance of ultraviolet aluminum mirrors. This ALE process is modified relative to existing methods through the use of a chamber conditioning film of lithium fluoride, which is shown to enhance the loss of fluorine surface species and results in conformal layer-by-layer etching of aluminum oxide films. Etch properties were explored over a temperature range of 225–300 °C with the Al2O3 etch rate increasing from 0.8 to 1.2 Å per ALE cycle at a fixed HF exposure of 60 ms per cycle. The effective etch rate has a dependence on the total HF exposure, but the process is shown to be scalable to large area substrates with a postetch uniformity of better than 2% demonstrated on 125 mm diameter wafers. The efficacy of the ALE process in reducing interfacial native aluminum oxide on evaporated aluminum mirrors is demonstrated using characterization by x-ray photoelectron spectroscopy and measurements of ultraviolet reflectance at wavelengths down to 120 nm.

Comparison of Shear Bond Strength of Silorane and Methacrylate-Based Composites to IPS Empress 2 Ceramic with Various Surface Treatments

Objectives Treatment of chipped or fractured porcelain with composite resin is considered as an economic treatment for minor fractures in ceramics. The aim of this study was to evaluate the effect of different ceramic surface treatments on bond strength of methacrylate-based and silorane-based composite resin to IPS Empress 2.Methods Sixty IPS Empress 2 ceramic discs were fabricated and after etching with 9.6% hydrofluoric acid, they were divided into six groups:(1) P90 primer and bonding agent + Filtek P90 composite resin; (2) Single Bond + Filtek Z250 composite resin; (3) similar to the first group+ silane pretreatment; (4) similar to the second group + silane pretreatment; (5) silane pretreatment + Filtek P90 composite resin; (6) silane pretreatment + Filtek Z250 composite resin. Each specimen was subjected to shear load until fracture occurred. Statistical analysis was performed using one-way ANOVA, Tukey’s test and t-test.Results Regardless of the type of surface treatment, Z250 composite demonstrated significantly higher shear bond strength than P90 composite (P < 0.05). Group 4 showed the highest shear bond strength values with statistically significant difference with other groups while the fifth group showed the least values (P < 0.05).Conclusion Silane coating along with the application of adhesive system and etching in methacrylate-based composite was the most efficient surface treatment in terms of bond strength.

A comparative study of CF4, Cl2 and HBr + Ar inductively coupled plasmas for dry etching applications

This work discusses the plasma characteristics and chemistry in CF4+Ar, Cl2+Ar and HBr+Ar gas systems in a comparative scale under one and the same operating condition. The investigation was carried out using the combination of plasma diagnostics by Langmuir probes and 0-dimensional plasma modeling in the planar inductively coupled plasma reactor at constant gas pressure (1.33Pa), input power (800W) and bias power (300W), but with variable (0–80%) Ar fraction in a feed gas. The study was focused on the parameters influencing the kinetics of ion-assisted chemical reaction and thus, determining the output characteristics of the etching process (etching rate, anisotropy). These parameters are the fluxes of F, Cl or Br atoms, ion bombardment energy, ion energy flux and neutral/charged species ratio. The differences between CF4+Ar, Cl2+Ar and HBr+Ar plasmas which seem to be important for the correct choice of the working gas for the particular etched material were discussed and explained in the framework of formation-decay kinetics of neutral and charged species.

The Application of a Selective Etch to Conclusively Show the Surface Smoothing Effect of an Amorphous Thin Film Deposited by Atomic Layer Deposition

It can be predicted by theory that the atomic layer deposition (ALD) of an amorphous high-k dielectric thin film on a rough bottom metal electrode has a surface smoothing effect, resulting in a smoother top surface. This effect can strongly affect the electrical characteristics of high-k MIM capacitors. Sometimes this effect may be hard to observe by atomic force microscopy (AFM) because the bottom metal electrode may be modified by the ALD process, resulting in an apparently contradictory AFM measurement. The solution is to use a chemically and physically stable metal with a Hüttig temperature larger than the ALD temperature. In addition, AFM after a selective etch is very useful in order to demonstrate the surface smoothing effect by ALD conclusively.

The Influence of Etching Mode on the Adaptation of a Fissure Sealant as Detected by Optical Coherence Tomography: Phosphoric Acid Etch vs. Self-etch Adhesive Applications

The Influence of Etching Mode on the Adaptation of a Fissure Sealant as Detected by Optical Coherence Tomography: Phosphoric Acid Etch vs. Self-etch Adhesive Applications

Atomic fluorine densities in electron beam generated plasmas: A high ion to radical ratio source for etching with atomic level precision

Electron beam generated plasmas are generally characterized by a high plasma density (&amp;gt;1010 cm−3), and very low electron temperatures (&amp;lt;1 eV), making them well-suited for next generation processing techniques where high fluxes of low energy ions are desirable. In addition, both modeling and optical emission spectroscopy indicate relatively low concentrations of atomic radicals compared to discharges. Due to their relevance to industrial etching applications, this work focuses on the characteristics of electron beam generated plasmas produced in fluorine-containing chemistries (SF6, CF4, F2), with particular attention paid to atomic fluorine densities. Atomic F* emission is measured in Ar/SF6, Ar/CF4, and Ar/F2 mixtures and the Ar 750 nm/F 704 nm line ratios are then used to calculate the F atom densities as a function of reactive gas concentration, the first radical density measurement in this type of plasma to date. These results are compared with F atom density calculations performed using a zero dimensional non-local thermodynamic equilibrium Boltzmann code for Ar/SF6 and Ar/F2 mixtures to understand and verify the line ratio analysis. Good agreement between modeling and measurements points to a uniquely high ion-to-atomic radical density in electron beam generated plasmas.

Quasi-atomic layer etching of silicon nitride

Atomic layer etching (ALE) is a promising technique that can solve the challenges associated with continuous or pulsed plasma processes—trade-offs between selectivity, profile, and aspect ratio dependent etching. Compared to silicon, oxide, and other materials, atomic layer etching of silicon nitride has not been extensively reported. In this paper, the authors demonstrate the self-limited etching of silicon nitride in a commercial plasma etch chamber. The process discussed in this paper consists of two sequential steps—surface modification in hydrogen plasma followed by the removal of modified layers in fluorinated plasma. In addition to the ALE characteristics, the authors also demonstrate that the process is anisotropic and the selectivity to oxide is &amp;gt;100. Although the saturated etch rate of one monolayer per cycle could not be attained, self-limited etching of silicon nitride still enables us to incorporate the benefits of atomic layer etching such as an absence of isodense bias and an extremely high selectivity to oxide into practical etch applications.

Combined Plasma-Based Fiber Etching and Diamond-Like Carbon Nanooverlay Deposition for Enhancing Sensitivity of Long-Period Gratings

This paper presents an application of reactive ion etching followed by diamond-like carbon nanooverlay deposition using radio frequency plasma-enhanced chemical vapor deposition method for effective tuning of the refractive index (RI) sensitivity of long-period gratings (LPGs). Both etching and deposition take place within one process. Combination of both plasma-based processes allows for well-controlled tuning of the LPG sensorial response up to its operation at both dispersion turning point of higher order cladding modes and mode transition regime. As a result of the processing, the RI sensitivity has been enhanced up to over 12 000 nm/RIU per single resonance in narrow RI range (1.3344–1.3355 RIU) and over 2000 nm/RIU in broader RI range (1.34–1.356 RIU). Experimental results have been supported by numerical analyses that show capabilities for further significant improvement of both RI sensitivity and range of RI measured with the enhanced sensitivity.