EPR spectroscopy has been used to characterize neutron-irradiated cubic SiC samples after thermal annealing in the 200-1100OC temperature range. Three new paramagnetic defects named Ky6, Ky7 and Ky8 have been revealed. Based on the present results, these defects have been tentatively attributed to the negatively charged carbon vacancy-carbon antisite pair, negatively charged divacancy and neutral carbon <100> split interstitial, respectively. Furthermore, the finding of practically isotropic hyperfine splitting for EPR lines of the T6 center confirms its assignment as a carbon vacancy-interstitial pair.
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