The thermal stability of epitaxial SrTiO3 thin films grown by molecular-beam epitaxy on Si (001) has been studied using x-ray diffraction (XRD), optical microscopy (OM), scanning electron microscopy (SEM), and thermodynamic calculations. Our studies focus on the stability of the SrTiO3/Si structures under the conditions typically employed in the pulse laser deposition (PLD) growth of complex metal oxide heteroepitaxy on Si. We observe additional Bragg peaks in thermally treated SrTiO3 buffered Si structures, corresponding to possibly TiSi2 and/or SrSiO3, reaction products which are consistent with the reaction schemes we propose. In addition, OM and SEM reveal microstructures that are not readily accounted for solely by the solid state reactions as put forth by previous workers but can be reasonably explained by our proposed reaction schemes. Using our observations and thermodynamic analysis, we argue that reactions involving the gaseous species SiO(g), the reactivity of which has not been previously considered in this system, are important. We attribute the onset of degradation of the SrTiO3 film at high temperatures, to the circular void forming reaction Si(s)+SiO2(s)→2SiO(g) at the interface and suggest that the reactions considered by previous workers involving all solid state reactants occurs only at the conclusion of degradation. Our results points to the need for keeping the PLD temperature as low as possible to minimize the production of reactive SiO(g) in avoiding the deleterious reactions.
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