Pronounced RHEED specular beam intensity oscillations have been observed during the growth of several metals on a Si(111)(7×7) substrate at low temperature (100 K), showing that the metals grow in a layer-by-layer fashion. For all metals studied three regimes can be distinguished. Up to one or two monolayers the variation of the reflected intensity is due to changes in the surface structure rather than surface morphology. Next, a limited number ofoscillations with an ill-defined period appears. Most surprisingly, however, in most cases a sudden revival of the oscillations with a much more regular period is observed. It is suggested that this phenomenon is caused by a transition from a lattice-matched to a relaxed layer-by-layer growth mechanism.