There are many sophisticated elM applications requiring both an extremely fast and precise find motion of a tool or end effector which can not be met by the existing robot technology. The robot velocity can be substantially increased only by using lightweight mechanics and gearless drives. However, a simultaneous damping of structural oscillations and increase of the dynamic end-point precision additionally demands the introduction of mechatronics concepts providing an overall optimization both of the mechanics and control electronics. In this paper a new mechatronics concept of decentralized control of robot end-point vibrations will be presented. Applied to a cartesian high precision robot different model and control approaches will be discussed.