Abstract This study describes multi-frequency Rayleigh wave excitation below 10 MHz, which is impossible with a conventional piezoelectric-single-crystal surface acoustic wave (SAW) device. To overcome this limitation, we utilized a SAW device with an elliptical reflector focusing structure (ELIPS). The prototype ELIPS SAW device excited a Rayleigh wave on a duralumin surface at 1.1 MHz, 3.4 MHz, 5.6 MHz, and 7.9 MHz in the single device. The maximum vibration velocities were 0.38 m/s, 0.21 m/s, 0.070 m/s, and 0.034 m/s, respectively, which suggests the possibility of high-power mechatronics applications. To demonstrate the usefulness of the multi-frequency SAW below 10 MHz in a single device, we measured the frequency dependence of leaky SAW attenuation with a liquid droplet. The result showed that the acoustic properties of the liquid could be successfully estimated.
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