Electron Impact Ion Source Research Articles

Design considerations for a compact proton beam writing system aiming for fast sub-10 nm direct write lithography

In order to realize sub-10nm feature size by proton beam writing (PBW) with writing speed comparable to electron beam lithography (EBL), a 200kV compact PBW system is proposed here. In this system, a new nano-aperture electron impact ion source with a potential reduced brightness of 106A/(m2srV) will be employed. To achieve sub-10nm spot sizes with pA beam current, two different focusing lens configurations were evaluated. Both of these configurations were found to be theoretically capable of achieving sub-10nm beam spot size.

High-resolution short-exposure small-animal laboratory x-ray phase-contrast tomography.

X-ray computed tomography of small animals and their organs is an essential tool in basic and preclinical biomedical research. In both phase-contrast and absorption tomography high spatial resolution and short exposure times are of key importance. However, the observable spatial resolutions and achievable exposure times are presently limited by system parameters rather than more fundamental constraints like, e.g., dose. Here we demonstrate laboratory tomography with few-ten μm spatial resolution and few-minute exposure time at an acceptable dose for small-animal imaging, both with absorption contrast and phase contrast. The method relies on a magnifying imaging scheme in combination with a high-power small-spot liquid-metal-jet electron-impact source. The tomographic imaging is demonstrated on intact mouse, phantoms and excised lungs, both healthy and with pulmonary emphysema.

Optimization of an electron impact ion source on a MEMS time-of-flight mass spectrometer

This study reports the optimization of the first stages of a MEMS-based, microfabricated time-of-flight mass spectrometer. The authors present an acceptable match between simulations and experimental results. It validates the use of simulations as a time efficient approach as to predict optimal experimental set points. Chips with three differently meshed ionization grids have been tested and show a significant impact of the grid size on both ionization and extraction. An optimal trade-off is found for 3mm×3mm grid, with about 5×10−6 ion/atom ionization efficiency and over 50% extraction rate. Optimized parameters for ion focussing are found faster with the help of simulations as the experimental optimal settings are found near the predicted simulated voltages. A total ionic current of hundreds of picoamperes is measured, confirming the potential of this electron-impact ion source as the first step of the full time-of-flight mass spectrometer integrated on a single MEMS chip.

MEMS ion source for mass spectrometer integrated on a chip

The paper describes silicon-glass MEMS electron impact ion source developed for miniature mass spectrometer (MS) integrated on a chip. The device consists of the field emission electron source with an electrophoretically deposited carbon nanotube cathode and ion beam formation electrodes. Ion source structure has been fabricated using MEMS technology. A complete manufacturing process of the test structures has been successfully elaborated and implemented.

Determination of nine volatile N-nitrosamines in tobacco and smokeless tobacco products by dispersive solid-phase extraction with gas chromatography and tandem mass spectrometry.

A method was developed for the determination of nine volatile N-nitrosamines in tobacco and smokeless tobacco products. The targets are N-nitrosodimethylamine, N-nitrosopyrrolidine, N-nitrosopiperidine, N-nitrosomorpholine, N-nitrosoethylmethylamine, N-nitrosodiethylamine, N-nitrosodipropylamine, N-nitrosobuylmethylmine, and N-nitrosodibutylamine. The samples were treated by dispersive solid-phase extraction using 1 g of primary secondary amine and 0.5 g of carbon and then analyzed by gas chromatography with tandem mass spectrometry with an electron impact ion source. The recoveries for the targets ranged from 84 to 118%, with <16% relative standard deviations at three spiking levels of 0.5, 1.25, and 2.5 ng/g. The limits of detection ranged from 0.03 to 0.15 ng/g. With the use of the proposed method, we detected the presence of six nitrosamines in the range of 0.4-30.7 ng/g. The study demonstrated that the method could be used as a rapid, convenient, and high-throughput method for N-nitrosamines analysis in tobacco matrix.

Determination of Atmospheric Krypton and Xenon by Gas Chromatography-Mass Spectrometry in Direct Injection Mode

Abstract Volume concentration determination of atmospheric krypton and xenon is very important for krypton-85 and radioactive xenon isotopes monitoring. An injection set-up integrated adjustable quantity sample injection and quantitative dilution function was designed. The effects of electron impact (EI) source parameters on the sensitivity of MS detector were studied. Optimal values were as follows: ionization energy of 70 eV, emission current of 40 mA, cathode voltage of 27 mV, ion focus voltage of 85 mV and lens compensation voltage of 20 V. A GC-MS method for the determination of krypton and xenon in atmosphere without sample pretreatment was developed. Minimal detected concentrations for krypton and xenon were 3.3 × 10−8 (V/V) and 2.6 × 10−9 (V/V) respectively. Moreover, krypton and xenon concentrations in the ground level air were measured with the results of 1.1 × 10−6 (V/V) and 9.3 × 10−8 (V/V). The related combined standard uncertainties for krypton and xenon results were 2.38% and 3.15%, respectively.

A singly charged ion source for radioactive ¹¹C ion acceleration.

A new singly charged ion source using electron impact ionization has been developed to realize an isotope separation on-line system for simultaneous positron emission tomography imaging and heavy-ion cancer therapy using radioactive (11)C ion beams. Low-energy electron beams are used in the electron impact ion source to produce singly charged ions. Ionization efficiency was calculated in order to decide the geometric parameters of the ion source and to determine the required electron emission current for obtaining high ionization efficiency. Based on these considerations, the singly charged ion source was designed and fabricated. In testing, the fabricated ion source was found to have favorable performance as a singly charged ion source.

A compact E × B filter: A multi-collector cycloidal focusing mass spectrometer.

A compact E × B mass spectrometer is presented. The mass spectrometer presented is termed a "perfect focus" mass spectrometer as the resolution of the device is independent of both the initial direction and energy of the ions (spatial and energy independent). The mass spectrometer is small in size (∼10.7 in.(3)) and weight (∼2 kg), making it an attractive candidate for portability when using small, permanent magnets. A multi-collector Faraday cup design allows for the detection of multiple ion beams in discrete collectors simultaneously; providing the opportunity for isotope ratio monitoring. The mass resolution of the device is around 400 through narrow collector slits and the sensitivity of the device follows expected theoretical calculations of the ion current produced in the electron impact ion source. Example mass spectra obtained from the cycloidal focusing mass spectrometer are presented as well as information on mass discrimination based on instrumental parameters and isotope ratio monitoring of certain ion signals in separate Faraday cups.

Selective fluorination and separation of metals with NF3 for mass spectrometry

We report recent progress on the development of a new methodology based on the generation of volatile metal fluorides through the use of nitrogen trifluoride (NF3) and the measurement of these metal fluorides by electron ionization mass spectrometry. Though unreactive under ambient conditions, NF3 reacts selectively at specified temperatures with various metal-containing species to form volatile metal fluorides. Utilizing these species-dependent traits, elements of a sample may be sequentially produced and thus separated on-line. Tellurium was reacted inside a thermogravimetric analyzer, the gas outlet of which was directly coupled to a quadrupole mass spectrometer with an electron impact ionization source.

Bulk plasma fragmentation in a C4F8 inductively coupled plasma: A hybrid modeling study

A hybrid model is used to investigate the fragmentation of C4F8 inductive discharges. Indeed, the resulting reactive species are crucial for the optimization of the Si-based etching process, since they determine the mechanisms of fluorination, polymerization, and sputtering. In this paper, we present the dissociation degree, the density ratio of F vs. CxFy (i.e., fluorocarbon (fc) neutrals), the neutral vs. positive ion density ratio, details on the neutral and ion components, and fractions of various fc neutrals (or ions) in the total fc neutral (or ion) density in a C4F8 inductively coupled plasma source, as well as the effect of pressure and power on these results. To analyze the fragmentation behavior, the electron density and temperature and electron energy probability function (EEPF) are investigated. Moreover, the main electron-impact generation sources for all considered neutrals and ions are determined from the complicated C4F8 reaction set used in the model. The C4F8 plasma fragmentation is explained, taking into account many factors, such as the EEPF characteristics, the dominance of primary and secondary processes, and the thresholds of dissociation and ionization. The simulation results are compared with experiments from literature, and reasonable agreement is obtained. Some discrepancies are observed, which can probably be attributed to the simplified polymer surface kinetics assumed in the model.

Towards a High-Brightness Electron Impact Ion Source for Nano-Applications

Towards a High-Brightness Electron Impact Ion Source for Nano-Applications

Simultaneous determination of polycyclic musks in blood and urine by solid supported liquid-liquid extraction and gas chromatography-tandem mass spectrometry.

A rapid, precise and accurate method for the simultaneous determination of 5 polycyclic musks (PCMs) in biological fluids was developed by solid supported liquid-liquid extraction (SLE) coupled with gas chromatography-tandem mass spectrometry (GC-MS/MS). All parameters influencing SLE-GC-MS performance, including electron energy of electron-impact ionization source, collision energy for tandem mass spectrometer when operated in selected-reaction monitoring (SRM) mode, type and volume of elution reagent, nitrogen evaporation time, pH and salinity of sample have been carefully optimized. Eight milliliter of n-hexane was finally chosen as elution reagent. Blood and urine sample could be loaded into SLE cartridge without adjusting pH and salinity. Deuterated tonalide (AHTN-d3) was chosen as internal standard. The correlation coefficient (r(2)) of the calibration curves of target compounds ranged from 0.9996 to 0.9998. The dynamic range spanned over two orders of magnitude. The limit of detection (LOD) of target compounds in blood and urine ranged from 0.008 to 0.105μgL(-1) and 0.005 to 0.075μgL(-1), respectively. The developed procedure was successfully applied to the analysis of PCMs in human blood and urine obtaining satisfying recoveries on low, medium and high levels. The method was compared with SLE-GC-MS and shown one to two orders of magnitude improvement in sensitivity.

A compact time-of-flight mass spectrometer for ion source characterization.

A compact time-of-flight mass spectrometer with overall dimension of about 413 × 250 × 414 mm based on orthogonal injection and angle reflection has been developed for ion source characterization. Configuration and principle of the time-of-flight mass spectrometer are introduced in this paper. The mass resolution is optimized to be about 1690 (FWHM), and the ion energy detection range is tested to be between about 3 and 163 eV with the help of electron impact ion source. High mass resolution and compact configuration make this spectrometer useful to provide a valuable diagnostic for ion spectra fundamental research and study the mass to charge composition of plasma with wide range of parameters.

Electron energy distributions and electron impact source functions in Ar/N2 inductively coupled plasmas using pulsed power

In plasma materials processing, such as plasma etching, control of the time-averaged electron energy distributions (EEDs) in the plasma allows for control of the time-averaged electron impact source functions of reactive species in the plasma and their fluxes to surfaces. One potential method for refining the control of EEDs is through the use of pulsed power. Inductively coupled plasmas (ICPs) are attractive for using pulsed power in this manner because the EEDs are dominantly controlled by the ICP power as opposed to the bias power applied to the substrate. In this paper, we discuss results from a computational investigation of EEDs and electron impact source functions in low pressure (5–50 mTorr) ICPs sustained in Ar/N2 for various duty cycles. We find there is an ability to control EEDs, and thus source functions, by pulsing the ICP power, with the greatest variability of the EEDs located within the skin depth of the electromagnetic field. The transit time of hot electrons produced in the skin depth at the onset of pulse power produces a delay in the response of the EEDs as a function of distance from the coils. The choice of ICP pressure has a large impact on the dynamics of the EEDs, whereas duty cycle has a small influence on time-averaged EEDs and source functions.

Comparison of Electron Impact and Electron Capture Negative Ionization for the Quantification of Polybrominated Diphenyl Ethers in Human Plasma

Polybrominated diphenyl ethers (PBDE) are persistent organic pollutants that are strongly associated with disrupted endocrine and immune functions. Due to the increasing health concerns, it is critical to quantify PBDEs in human specimens. Gas chromatography (GC) - mass spectrometry (MS) with electron impact (EI) and electron capture negative ionization (ECNI) sources were optimized to compare the quantification for ten PBDEs in 0.5 ml of human plasma. Source parameters, including electron energy, emission current, source temperature, focus lens and flow rate of the ECNI source reagent gas (methane), were optimized to achieve the best performances of EI-MS and ECNI-MS. The limits of quantification (LOQ) in human plasma ranged from 20 to 497 fg injected into GC/ECNI-MS compared to 519 to 2966 fg when using GC/EI-MS. Especially for highly brominated congeners, GC/ECNI-MS provided much lower LOQs than GC/EI-MS. Obtaining the necessary LOQs with GC/ECNI-MS, the method was validated according to the US Food and Drug Administration guidance for industry using standard materials purchased from the National Institute of Standards and Technology (NIST). The validated GC/ECNI-MS method was used to measure the concentrations of ten tetra-, penta- and hexa-PBDE congeners in maternal human plasma. Tetra-PBDEs, especially BDE-47, were identified as the predominant PBDE burdens in human plasma.

Microhydrated aromatic cluster cations: binding motifs of 4-aminobenzonitrile-(H₂O)n cluster cations with n ≤ 4.

Infrared photodissociation (IRPD) spectra of mass-selected 4-aminobenzonitrile-(water)n cluster cations, ABN(+)-(H2O)n with n ≤ 4, recorded in the N-H and O-H stretch ranges are analyzed by quantum chemical calculations at the M06-2X/aug-cc-pVTZ level to determine the evolution of the initial microhydration process of this bifunctional aromatic cation in its ground electronic state. IRPD spectra of cold clusters tagged with Ar and N2 display higher resolution and allow for a clear-cut structural assignment. The clusters are generated in an electron impact source, which generates predominantly the most stable isomers. The IRPD spectra are assigned to single isomers for n = 1-3. The preferred cluster growth begins with sequential hydration of the two acidic NH protons of the amino group (n = 1-2), which is followed by attachment of secondary H2O ligands hydrogen-bonded to the first-shell ligands (n = 3-4). These symmetric and branched structures are more stable than those with a cyclic H-bonded solvent network. Moreover, in the size range n ≤ 4 the formation of a solvent network stabilized by strong cooperative effects is favored over interior ion hydration which is destabilized by noncooperative effects. The potential of the ABN(+)-H2O dimer is characterized in detail and supports the cluster growth derived from the IRPD spectra. Although the N-H bonds are destabilized by stepwise microhydration, which is accompanied by increasing charge transfer from ABN(+) to the solvent cluster, no proton transfer to the solvent is observed for n ≤ 4.

Analysis of volatile and oxidation sensitive compounds using a cold inlet system and electron impact mass spectrometry.

This video presents a protocol for the mass spectrometrical analysis of volatile and oxidation sensitive compounds using electron impact ionization. The analysis of volatile and oxidation sensitive compounds by mass spectrometry is not easily achieved, as all state-of-the-art mass spectrometric methods require at least one sample preparation step, e.g., dissolution and dilution of the analyte (electrospray ionization), co-crystallization of the analyte with a matrix compound (matrix-assisted laser desorption/ionization), or transfer of the prepared samples into the ionization source of the mass spectrometer, to be conducted under atmospheric conditions. Here, the use of a sample inlet system is described which enables the analysis of volatile metal organyls, silanes, and phosphanes using a sector field mass spectrometer equipped with an electron impact ionization source. All sample preparation steps and the sample introduction into the ion source of the mass spectrometer take place either under air-free conditions or under vacuum, enabling the analysis of compounds highly susceptible to oxidation. The presented technique is especially of interest for inorganic chemists, working with metal organyls, silanes, or phosphanes, which have to be handled using inert conditions, such as the Schlenk technique. The principle of operation is presented in this video.

Laboratory-size three-dimensional x-ray microscope with Wolter type I mirror optics and an electron-impact water window x-ray source.

We constructed a laboratory-size three-dimensional water window x-ray microscope that combines wide-field transmission x-ray microscopy with tomographic reconstruction techniques, and observed bio-medical samples to evaluate its applicability to life science research fields. It consists of a condenser and an objective grazing incidence Wolter type I mirror, an electron-impact type oxygen Kα x-ray source, and a back-illuminated CCD for x-ray imaging. A spatial resolution limit of around 1.0 line pairs per micrometer was obtained for two-dimensional transmission images, and 1-μm scale three-dimensional fine structures were resolved.

Optimization of ion-atomic beam source for deposition of GaN ultrathin films.

We describe the optimization and application of an ion-atomic beam source for ion-beam-assisted deposition of ultrathin films in ultrahigh vacuum. The device combines an effusion cell and electron-impact ion beam source to produce ultra-low energy (20-200 eV) ion beams and thermal atomic beams simultaneously. The source was equipped with a focusing system of electrostatic electrodes increasing the maximum nitrogen ion current density in the beam of a diameter of ≈15 mm by one order of magnitude (j ≈ 1000 nA/cm(2)). Hence, a successful growth of GaN ultrathin films on Si(111) 7 × 7 substrate surfaces at reasonable times and temperatures significantly lower (RT, 300 °C) than in conventional metalorganic chemical vapor deposition technologies (≈1000 °C) was achieved. The chemical composition of these films was characterized in situ by X-ray Photoelectron Spectroscopy and morphology ex situ using Scanning Electron Microscopy. It has been shown that the morphology of GaN layers strongly depends on the relative Ga-N bond concentration in the layers.

Microsolvation of the acetanilide cation (AA+) in a nonpolar solvent: IR spectra of AA+–Lnclusters (L = He, Ar, N2; n ≤ 10)

Infrared photodissociation (IRPD) spectra of mass-selected cluster ions of acetanilide (N-phenylacetamide), AA(+)-Ln, with the ligands L = He (n = 1-2), Ar (n = 1-7), and N2 (n = 1-10) are recorded in the hydride stretch (amide A, νNH, νCH) and fingerprint (amide I-III) ranges of AA(+) in its (2)A'' ground electronic state. Cold AA(+)-Ln clusters are generated in an electron impact ion source, which predominantly produces the most stable isomer of a given cluster ion. Systematic vibrational frequency shifts of the N-H stretch fundamentals (νNH) provide detailed information about the sequential microsolvation process of AA(+) in a nonpolar (L = He and Ar) and quadrupolar (L = N2) solvent. In the most stable AA(+)-Ln clusters, the first ligand forms a hydrogen bond (H-bond) with the N-H proton of trans-AA(+) (t-AA(+)), whereas further ligands bind weakly to the aromatic ring (π-stacking). There is no experimental evidence for complexes with the less stable cis-AA(+) isomer. Quantum chemical calculations at the M06-2X/aug-cc-pVTZ level confirm the cluster growth sequence derived from the IR spectra. The calculated binding energies of De(H) = 720 and 1227 cm(-1) for H-bonded and De(π) = 585 and 715 cm(-1) for π-bonded Ar and N2 ligands in t-AA(+)-L are consistent with the observed photofragmentation branching ratios of AA(+)-Ln. Comparison between charged and neutral AA((+))-L dimers indicates that ionization switches the preferred ion-ligand binding motif from π-stacking to H-bonding. Electron removal from the HOMO of AA(+) delocalized over both the aromatic ring and the amide group significantly strengthens the C[double bond, length as m-dash]O bond and weakens the N-H bond of the amide group.