Electron Holographic Tomography Research Articles

Nanoscale Three-Dimensional Charge Density and Electric Field Mapping by Electron Holographic Tomography.

Nanoscale Three-Dimensional Charge Density and Electric Field Mapping by Electron Holographic Tomography.

Nanoscale Three-Dimensional Charge Density and Electric Field Mapping by Electron Holographic Tomography.

The operation of nanoscale electronic devices is related intimately to the three-dimensional (3D) charge density distributions within them. Here, we demonstrate the quantitative 3D mapping of the charge density and long-range electric field associated with an electrically biased carbon fiber nanotip with a spatial resolution of approximately 5 nm using electron holographic tomography in the transmission electron microscope combined with model-based iterative reconstruction. The approach presented here can be applied to a wide range of other nanoscale materials and devices.

Three-Dimensional Imaging of Beam-Induced Biasing of InP/GaInP Tunnel Diodes.

Electron holographic tomography was used to obtain three-dimensional reconstructions of the morphology and electrostatic potential gradient of axial GaInP/InP nanowire tunnel diodes. Crystal growth was carried out in two opposite directions: GaInP-Zn/InP-S and InP-Sn/GaInP-Zn, using Zn as the p-type dopant in the GaInP but with changes to the n-type dopant (S or Sn) in the InP. Secondary electron and electron beam-induced current images obtained using scanning electron microscopy indicated the presence of p-n junctions in both cases and current-voltage characteristics measured via lithographic contacts showed the negative differential resistance, characteristic of band-to-band tunneling, for both diodes. Electron holographic tomography measurements confirmed a short depletion width in both cases (21 ± 3 nm) but different built-in potentials, Vbi, of 1.0 V for the p-type (Zn) to n-type (S) transition, and 0.4 V for both were lower than the expected 1.5 V for these junctions if degenerately doped. Charging induced by the electron beam was evident in phase images which showed nonlinearity in the surrounding vacuum, most severe in the case of the nanowire grounded at the p-type Au contact. We attribute their lower Vbi to asymmetric secondary electron emission, beam-induced current biasing, and poor grounding contacts.

Magnetic Configurations in Three-Dimensional Nanomagnets Explored by Electron Holographic Tomography

Magnetic Configurations in Three-Dimensional Nanomagnets Explored by Electron Holographic Tomography

Three-Dimensional Composition and Electric Potential Mapping of III-V Core-Multishell Nanowires by Correlative STEM and Holographic Tomography.

The nondestructive characterization of nanoscale devices, such as those based on semiconductor nanowires, in terms of functional potentials is crucial for correlating device properties with their morphological/materials features, as well as for precisely tuning and optimizing their growth process. Electron holographic tomography (EHT) has been used in the past to reconstruct the total potential distribution in three-dimension but hitherto lacked a quantitative approach to separate potential variations due to chemical composition changes (mean inner potential, MIP) and space charges. In this Letter, we combine and correlate EHT and high-angle annular dark-field scanning transmission electron microscopy (HAADF-STEM) tomography on an individual ⟨111⟩ oriented GaAs–AlGaAs core–multishell nanowire (NW). We obtain excellent agreement between both methods in terms of the determined Al concentration within the AlGaAs shell, as well as thickness variations of the few nanometer thin GaAs shell acting as quantum well tube. Subtracting the MIP determined from the STEM tomogram, enables us to observe functional potentials at the NW surfaces and at the Au–NW interface, both ascribed to surface/interface pinning of the semiconductor Fermi level.

Rytov approximation in electron scattering

In this work we introduce the Rytov approximation in the scope of high-energy electron scattering with the motivation of developing better linear models for electron scattering. Such linear models play an important role in tomography and similar reconstruction techniques. Conventional linear models, such as the Phase Grating Approximation, have reached their limits in current and forsee- able applications, most importantly in achieving three-dimensional atomic resolution using electron holographic tomography. The Rytov approximation incorporates propagation effects which are the most pressing limitation of conventional models. While predominately used in the weak-scattering regime of light microscopy we show that the Rytov approximation can give reasonable results in the inherently strong-scattering regime of transmission electron microscopy.

3D mapping of nanoscale electric potentials in semiconductor structures using electron-holographic tomography

Off-axis electron holography (EH) is a powerful method for mapping projected electric potentials, such as built-in potentials in semiconductor devices, in two dimensions (2D) at nanometer resolution. However, not well-defined thickness profiles, surface effects, and composition changes of the sample under investigation complicate the interpretation of the projected potentials. Here, we demonstrate how these problems can be overcome by combining EH with tomographic techniques, that is, electron holographic tomography (EHT), reconstructing electric potentials in 3D. We present EHT reconstructions of an n-type MOSFET including its dopant-related built-in potentials inside the device, as well as of a GaAs/AlGaAs core-multishell nanowire containing a 5 nm thick quantum well tube.

Three-dimensional Induction Mapping of Magnetic Nanoscale Materials by Electron Holographic Tomography

Three-dimensional Induction Mapping of Magnetic Nanoscale Materials by Electron Holographic Tomography

Synthesis and Three-Dimensional Magnetic Field Mapping of Co2FeGa Heusler Nanowires at 5 nm Resolution.

We present the synthesis of Co2FeGa Heusler nanowires and the results of our investigations on their three-dimensional (3D) electric and magnetic internal and external fields mapped by electron holographic tomography (EHT). These fields will be of great importance in next-generation nanomagnets integrated in spintronics and memory devices. The Co2FeGa nanowires with a L21 ordered structure are prepared by a SBA-15 silica-assisted method. The magnetic dipole-like stray fields of several Co2FeGa nanowires are revealed by holographically reconstructed phase images. Based on the measured magnetic phase shifts of an individual nanowire and its 3D reconstruction using EHT, we obtain an internal magnetic induction with a magnitude of 1.15 T and a nonmagnetic surface layer of 10 nm thickness. Furthermore, we also reconstruct the 3D distribution of the electrostatic potential of the same nanowire.

3D Magnetic Induction Maps of Nanoscale Materials Revealed by Electron Holographic Tomography.

The investigation of three-dimensional (3D) ferromagnetic nanoscale materials constitutes one of the key research areas of the current magnetism roadmap and carries great potential to impact areas such as data storage, sensing, and biomagnetism. The properties of such nanostructures are closely connected with their 3D magnetic nanostructure, making their determination highly valuable. Up to now, quantitative 3D maps providing both the internal magnetic and electric configuration of the same specimen with high spatial resolution are missing. Here, we demonstrate the quantitative 3D reconstruction of the dominant axial component of the magnetic induction and electrostatic potential within a cobalt nanowire (NW) of 100 nm in diameter with spatial resolution below 10 nm by applying electron holographic tomography. The tomogram was obtained using a dedicated TEM sample holder for acquisition, in combination with advanced alignment and tomographic reconstruction routines. The powerful approach presented here is widely applicable to a broad range of 3D magnetic nanostructures and may trigger the progress of novel spintronic nonplanar nanodevices.

Three-dimensional observation of magnetic vortex cores in stacked ferromagnetic discs.

Electron holographic vector field electron tomography visualized three-dimensional (3D) magnetic vortices in stacked ferromagnetic discs in a nanoscale pillar. A special holder with two sample rotation axes, both without missing wedges, was used to reduce artifacts in the reconstructed 3D magnetic vectors. A 1 MV holography electron microscope was used to precisely measure the magnetic phase shifts. Comparison of the observed 3D magnetic field vector distributions in the magnetic vortex cores with the results of micromagnetic simulations based on the Landau-Lifshitz-Gilbert equation showed that the proposed technique is well suited for direct 3D visualization of the spin configurations in magnetic materials and spintronics devices.

Prospects of linear reconstruction in atomic resolution electron holographic tomography.

Tomography commonly requires a linear relation between the measured signal and the underlying specimen property; for Electron Holographic Tomography this is given by the Phase Grating Approximation (PGA). While largely valid at medium resolution, discrepancies arise at high resolution imaging conditions. We set out to investigate the artefacts that are produced if the reconstruction still assumes the PGA even with an atomic resolution tilt series. To forego experimental difficulties the holographic tilt series was simulated. The reconstructed electric potential clearly shows peaks at the positions of the atoms. These peaks have characterisitic deformations, which can be traced back to the defocus a particular atom has in the holograms of the tilt series. Exchanging an atom for one of a different atomic number results in a significant change in the reconstructed potential that is well contained within the atom's peak.

Nanoscale three-dimensional reconstruction of electric and magnetic stray fields around nanowires

Static electromagnetic stray fields around nanowires (NWs) are characteristic for a number of important physical effects such as field emission or magnetic force microscopy. Consequently, an accurate characterization of these fields is of high interest and electron holographic tomography (EHT) is unique in providing tomographic 3D reconstructions at nm spatial resolution. However, several limitations of the experimental setup and the specimen itself are influencing EHT. Here, we show how a deliberate restriction of the tomographic reconstruction to the exterior of the NWs can be used to mitigate these limitations facilitating a quantitative 3D tomographic reconstruction of static electromagnetic stray fields at the nanoscale. As an example, we reconstruct the electrostatic stray field around a GaAs-AlGaAs core shell NW and the magnetic stray field around a Co2FeGa Heusler compound NW.

Nanoscale three-dimensional reconstruction of elastic and inelastic mean free path lengths by electron holographic tomography

Electron holography at medium resolution simultaneously probes projected electrostatic and magnetostatic potentials as well as elastic and inelastic attenuation coefficients with a spatial resolution of a few nanometers. In this work, we derive how the elastic and inelastic attenuation can be disentangled. Using that result, we perform the first three dimensional tomographic reconstruction of potential and (in)elastic attenuation in parallel. The technique can be applied to distinguish between functional potentials and composition changes in nanostructures, as demonstrated using the example of a GaAs—Al0.33Ga0.67As core-shell nanowire.

Nanometer-scale tomographic reconstruction of three-dimensional electrostatic potentials in GaAs/AlGaAs core-shell nanowires

We report on the development of electron holographic tomography towards a versatile potential measurement technique, overcoming several limitations, such as a limited tilt range, previously hampering a reproducible and accurate electrostatic potential reconstruction in three dimensions. Most notably, tomographic reconstruction is performed on optimally sampled polar grids taking into account symmetry and other spatial constraints of the nanostructure. Furthermore, holographic tilt series acquisition and alignment have been automated and adapted to three dimensions. We demonstrate 6 nm spatial and 0.2 V signal resolution by reconstructing various, previously hidden, potential details of a GaAs/AlGaAs core-shell nanowire. The improved tomographic reconstruction opens pathways towards the detection of minute potentials in nanostructures and an increase in speed and accuracy in related techniques such as x-ray tomography.

Electron Holographic Tomography of Mean Free Path Lengths at the nm-scale

Electron Holographic Tomography of Mean Free Path Lengths at the nm-scale

Interferometric methods for mapping static electric and magnetic fields

The mapping of static electric and magnetic fields using electron probes with a resolution and sensitivity that are sufficient to reveal nanoscale features in materials requires the use of phase-sensitive methods such as the shadow technique, coherent Foucault imaging and the Transport of Intensity Equation. Among these approaches, image-plane off-axis electron holography in the transmission electron microscope has acquired a prominent role thanks to its quantitative capabilities and broad range of applicability. After a brief overview of the main ideas and methods behind field mapping, we focus on theoretical models that form the basis of the quantitative interpretation of electron holographic data. We review the application of electron holography to a variety of samples (including electric fields associated with p–n junctions in semiconductors, quantized magnetic flux in superconductors and magnetization topographies in nanoparticles and other magnetic materials) and electron-optical geometries (including multiple biprism, amplitude and mixed-type set-ups). We conclude by highlighting the emerging perspectives of (i) three-dimensional field mapping using electron holographic tomography and (ii) the model-independent determination of the locations and magnitudes of field sources (electric charges and magnetic dipoles) directly from electron holographic data. La cartographie de champs électriques et magnétiques statiques avec une sonde d'électrons à un niveau de résolution et de sensibilité suffisant pour révéler des variations à l'échelle nanométrique requiert l'utilisation de méthodes sensibles à la phase, telles que la technique de l'ombrage, l'imagerie cohérente en mode de Foucault ou l'équation de transport de l'intensité (TIE). Parmi ces différentes approches, l'holographie électronique « hors axe » en microscopie électronique à transmission joue un rôle prépondérant, en raison de son caractère quantitatif et de son vaste domaine d'utilisation. Après une brève revue des principales idées et méthodes sous-jacentes, nous nous attacherons à décrire les modèles théoriques qui constituent le fondement de l'interprétation quantitative des données holographiques. Nous passerons rapidement en revue l'utilisation de l'holographie électronique pour étudier un grand nombre d'échantillons avec leurs champs électriques et magnétiques associés : jonctions p–n dans les semi-conducteurs, lignes de flux magnétique quantifié dans les supraconducteurs, topographies du champ magnétique dans et autour de nanoparticules et autres… Les aspects relatifs aux géométries utilisées en optique électronique (doubles biprismes et dispositifs mixtes pour jouer sur la phase et l'amplitude) sont aussi mentionnés. Enfin, nous identifions plusieurs perspectives émergentes de grand intérêt : (i) la cartographie tridimensionnelle de champs en associant tomographie et holographie, (ii) la détermination de la position et de l'intensité de sources de champ (charges électriques et dipôles magnétiques) directement à partir des données holographiques.

Tomographic investigation of fermi level pinning at focused ion beam milled semiconductor surfaces

Electron holography in the transmission electron microscope (TEM) offers the spatial and signal resolution for studying effects like Fermi level pinning or dopant concentration variations important for the design of modern electronic devices. To overcome the loss of information along the projection direction, surface effects, and surface damage due to TEM specimen preparation, we apply electron holographic tomography to analyze the 3D potential distribution of semiconductor samples prepared by focused-ion-beam. We observe mid-band gap pinning of the Fermi level at Si surfaces but valence band pinning at Ge surfaces. The pinning extends over tens of nanometers into the bulk.

Electrostatic Potentials of Nanostructures Revealed in 3D by Electron Holographic Tomography

Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Development and Application of Electron Holographic Tomography for the Three- Dimensional Mapping of Electrostatic Potentials

Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.