Abstract Investigation of the plasma decay mechanism from energy and density temporal/spatial evolutions together is important and urgent in the novel bipolar-pulse high power impulse magnetron sputtering (BP-HiPIMS) discharge for adjusting the deposited ion energy flux. In this work, temporal and spatial characteristics of the electron energy distribution function (EEDF) have been systematically investigated using a time-resolved (250 ns) Langmuir probe to obtain the plasma decay process clearly. The plasma decay has a typical characteristic of three-step during the positive pulse. At the initial period of positive pulse (Step 1), the existence of hot electrons and potential gradient force can accelerate the plasma density decay even up to ~1015 m-3/μs. As the electron energy are cooled to several eVs, the plasma decay is dominated by the density gradient pressure with an ion sound velocity (0.5-0.7 kms-1), which can increase the downstream electron density (Step 2). As the redistribution of plasma density in the whole discharge domain, the electron density decay is exponential (Step 3) and the maximum decay rate is near the target due to the higher density gradient, while the maximum electron temperature is away from the target. Along the density gradient diffusion, the relation between electron density and temperature in BP-HiPIMS satisfies the well-known Boltzmann relation ne=n0exp(eVp/kTe). In addition, the EEDF characteristics in the BP-HiPIMS operated with an auxiliary anode and solenoid coil have also been investigated in this work, where an increase in electron density and plasma diffusion mobility has been observed after applying the anode or solenoid coil. These temporal and spatial EEDFs allow us to understand the complex plasma physics in the emerged BP-HiPIMS discharge clearly, especially with the view of high-energy and low-energy electron loss and balance.
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