We present a fabrication technology for the creation of high-aperture polymer microlenses and their optical characterization both as single lenses and mounted in a micro-objective. The microlenses are made by the LIGA process (x-ray lithography, electroforming and moulding techniques), which is modified by an additional x-ray irradiation step and a melting process. The spherical lenses are realized by melting of PMMA micro-cylinders, which have been flood exposed in the additional synchrotron irradiation step. For the cost-effective replication by hot embossing a moulding tool is made out of the primary PMMA lenses.
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