An electrochemical anodization technique associated with wet surface cleansing processes was applied for fabrication of surface nanoscale structures on Al plates. Dynamic force microscopy (DFM) measurements clarifies that different wet cleansing processes create different initial surface structures on Al such as a linked-crater pattern and a groove-pattern on Al surfaces and induce finer and well-ordered characteristic surface nanoscale patterns. Based upon those structures, anodization proceeds in the fabrication of well-ordered characteristic nanoscale patterns on Al surface such as a well-oriented row-aligned pattern and a well-fined lattice pattern. Deposition of copper phthalocyanine (CuPc) molecules upon anodized craterarrayed Al surface is conducted by casting CuPc resolved toluene. DFM and X-ray photoemission spectroscopy (XPS) measurements clarify that an organic-inorganic nanoscale patterned material is fabricated.