Dielectric elastomer (DE) is a type of electric field type electroactive polymer material that can produce greater deformation under the action of an electric field and has a faster recovery speed. It has the advantages of high energy density, large strain, low quality, and commercialization, and has become the most widely concerned and researched electroactive polymer material. In this study, copper calcium titanate (CCTO) particles with a large dielectric constant were selected as the filling phase, and a silicone rubber (PDMS) with better biocompatibility and lower elastic modulus was used as the matrix to prepare CCTO/PDMS, which is a new type of dielectric elastomer material. The structure of the dielectric elastomer is analyzed, and its mechanical properties, dielectric properties, and driving deformation are tested. Then, KH550, KH560, and KH570 modified CCTO is used in order to improve the dispersibility of CCTO in PDMS, and modified particles with the best dispersion effect are selected to prepare dielectric elastomer materials. In addition, mechanical properties, dielectric properties, and driving deformation are tested and compared with the dielectric elastomer material before modification. The results show that as the content of CCTO increases, the dielectric constant and elastic modulus of the dielectric elastomer also increase, and the dielectric loss remains basically unchanged at a frequency of 100 Hz. When the filling amount reaches 20 wt%, the dielectric constant of the CCTO/PDMS dielectric elastomer reaches 5.8 (100 Hz), an increase of 120%, while the dielectric loss at this time is only 0.0038 and the elastic modulus is only 0.54 MPa. When the filling amount is 5 wt%, the dielectric elastomer has the largest driving deformation amount, reaching 33.8%. Three silane coupling agents have been successfully grafted onto the surface of CCTO particles, and the KH560 modified CCTO has the best dispersibility in the PDMS matrix. Based on this, a modified CCTO/PDMS dielectric elastomer was prepared. The results show that the improvement of dispersibility improves the dielectric constant. Compared with the unmodified PDMS, when the filling content is 20 wt%, the dielectric constant reaches 6.5 (100 Hz). Compared with PDMS, it has increased by 150%. However, the improvement of dispersion has a greater increase in the elastic modulus, resulting in a decrease in its strain parameters compared with CCTO/PDMS dielectric elastomers, and the electromechanical conversion efficiency has not been significantly improved. When the filling amount of modified CCTO particles is 5 wt%, the dielectric elastomer has the largest driving deformation, reaching 27.4%.