On the basis of the conducted structural studies of thin films, a structural and technological solution was developed and a thin film capacitive transducer was created for acoustic monitoring of metal products by a capacitive method. It was determined that along with the crystalline structure of the layers, it is also necessary to control the surface electrical resistance of the conductive ITO layer, the values of which determine the possibility of using such a structure as a coating of a capacitive converter without significant losses of the useful signal, and the dielectric permeability of the Al2O3 layer, which significantly affects the value of the useful signal With the help of the four-probe method, it was established that the surface electrical resistance (R□) of ITO layers under optimal deposition conditions is equal to 8–15 Ohm/□. The study of electric power Hall results indicate that the obtained value of specific electrical resistance is determined by the concentration of the main charge carriers from about 8.3·1020 cm–3 and the mobility of the main charge carriers at the level of 44 cm2/(V·s). The results of studies of dielectric properties indicate an increase in the value of the dielectric constant of the polyimide/Al2O3 structure, which is 8.5–11.5 relative to units, relative to the polyimide film (3–3.9 relative units) by approximately 3 times at frequencies of the exciting signal in the range of 10 Hz–10 MHz. This fact confirms the assumption about the possibility of increasing the dielectric constant of the interlayer due to the application of a thin layer of Al2O3 on the polyimide film. To confirm the possibility of increasing the sensitivity of the method due to the use of a capacitive transducer based on the Al/ITO/polyimide/Al2O3 structure, in comparison with classical transducers, a series of aluminium samples was studied at an oscillation frequency of 2.5 MHz. The value of the received signal when using a thin-film converter increases by 7.6 times compared to a classic converter, which correlates well with the measurements of dielectric permeability of dielectric layers and taking into account the decrease in the thickness of the dielectric layer. Thus, the increase in the sensitivity of the capacitive method in the case of using thin-film capacitive converters based on the Al/ITO/polyimide/Al2O3 structure is experimentally confirmed. The maximum amplitude of the acoustic displacement occurs at the edge of the plate, so studies were conducted on electrodes with cutouts, which made it possible to increase the acoustic signal twice for a large internal cutout.
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