Since the largest area of the JET first wall is composed of beryllium, it is expected that nuclear fuel is largely retained in beryllium-based co-deposits with low amounts of carbon. Co-deposited layers obtained in the laboratory, with similar stoichiometry with the ones found in JET ITER-like wall (ILW) experiments, can provide complementary information regarding the hydrogen isotopes inventory and release behaviour.We report on the analysis of the beryllium-based layers deposited by the direct current magnetron sputtering method on pure tungsten and silicon substrates. The thickness of studied layers with various amounts of deuterium, oxygen, and carbon was between 2 and 7 μm. Samples from the same batch were distributed to different laboratories and characterised by various analytical methods. Scanning electron microscopy was applied to determine the exact thickness, data from elastic backscattering spectrometry and nuclear reaction analysis to profile the depth content of light elemental species as deuterium, and thermal desorption spectroscopy to quantify the amount of deuterium and also to observe release kinetics.The main finding is that a high amount of deuterium, from 8 at.% up to 28 at.%, can be retained in the films. Deuterium release at a heating rate of 0.125 °C/s reached its maximum intensity at peaks of various widths and shape, which appeared at temperatures from 340 °C up to 660 °C, depending on the thickness, the layer stoichiometry and deposition parameters.