In this study, FGH96 superalloys with different microstructures were prepared via solution heat-treatment at different temperatures. Herein, creep tests were conducted on the resulting FGH96 alloys at 704 °C and 690 MPa, and the creep properties and microstructures of the samples were found to have a complex relationship. To understand the deformation mechanism of FGH96 alloys, the γ′ distribution, grain boundary morphology (including small-angle boundaries, large-angle boundaries, and Σ3 twin boundaries), and local misorientation during creep were analyzed using scanning electron microscopy, transmission electron microscopy, and electron backscattered diffraction, respectively. The results suggest that the main creep deformation mechanism in FGH96 superalloys is microtwinning. Furthermore, we investigated the interaction between Σ3 twin boundaries and microtwins and found that the Σ3 twin boundaries had a positive effect on the creep resistance. Based on the analysis of kernel-averaged misorientation and Schmid factors of the deformed grains, we found that the higher dislocation density around the small-angle boundaries was the main reason for the greater creep rate in the subsolvus superalloy. The effects of serrated grain boundaries and weight percent of the carbide were also studied to investigate the damping of creep properties in samples that are treated at temperatures of 1180 °C or higher. The overall creep resistance was determined by the frequency and density of small-angle boundaries, large-angle boundaries, and Σ3 twin boundaries.
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