Nowadays 3Cr13 martensitic stainless steel is increasingly used for precision molds. However, its low-temperature impact toughness below room temperature requires further improvement. This study investigates the effect of heat treatment process of a Ni-containing at low temperature impact toughness of 3Cr13 stainless steel used for precision die. Various characterization techniques are combined in order to unveil different heat treatment processes on impact toughness. The test results show that after three different heat treatment processes, the low-temperature impact toughness of the investigated steel at 0 ℃ has been greatly improved. After the investigated steel is heated at 1040 ℃ for 15 minutes, then water-cooled quenched, and then heated to 540 ℃ for 30 minutes, the impact fracture is a dimple shaped plastic one, and its low-temperature impact absorbed energy is higher than that of other heat treatment processes. It shows that the holding time under quenching heating temperature and tempering temperature also have important effects on the improvement of low-temperature impact toughness, which provides technical support for heat treatment design for the Ni-alloyed 3Cr13martensitic stainless steel.