Spatial distribution of the cations in pulsed laser deposition of Pb(Zr,Ti)O3 thin films under ambient oxygen and argon was characterized by using the inductively-coupled plasma method. The results show that Zr and Ti have similar spatial distribution under both oxygen and argon ambient, while the spatial distribution of Pb under the two ambient gases is very different. The Pb/(Zr+Ti) ratio under the two ambient gases decreases with distance from the target. The results observed here are interpreted by identifying the mechanism of ablation and evaporation in interaction between laser beam and target.
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