We investigated the life time characteristics of OLED device with aluminium oxide (<TEX>$AlO_x$</TEX>) passivation film on glass substrate and polyethylene terephthalate (PET) substrate by RF magnetron sputtering for the transparent barrier film applied to flexible OLED device. Basic buffer layer was determined as <TEX>$Alq_3$</TEX>(500 nm)-LiF(300 nm)-Al(1200 nm), and the most suitable aluminium oxide (<TEX>$AlO_x$</TEX>) film have been formed when the partial volume ratio of oxygen was 20% and the sputtering power was 100 watt and the minimum thickness of buffer was <TEX>$2\;{\mu}m$</TEX>. <TEX>$AlO_x$</TEX>/epoxy hybrid film was also used as a effective passivation layer for the purpose of improving life time characteristics of OLED devices with the glass substrate and the plastic substrate. Besides, the simultaneous deposition of <TEX>$AlO_x$</TEX>/epoxy film on back side of PET could result in better improvement of life time.