Numerical solutions are obtained for the proposed novel hybrid terahertz plasmonic waveguide structure, namely the silicon metal silicon (SMS) waveguide. It is shown that the SMS waveguide can overcome the diffraction limit while still maintaining a sizeable propagation length. The geometric dependence of the mode characteristics of this structure is analyzed in detail, showing strong confinement and low loss with propagation lengths exceeding 14mm at normalized mode areas of 1.72×10−2. By using the FEM method (Comsol), the guiding properties of the hybrid terahertz surface plasmon polariton (HTSPP) waveguide are numerically analyzed at the THz frequency, and a combination of double-structured comparisons of the best features of the terahertz plasmonic waveguide is made. Depending on the height used and how the mode confinement is measured, various modal designs, such as double microwire structures, are developed. The structures indicate that we verified the possibility of low attenuation loss of hybrid THz plasmonics propagation. The effective mode area Aeff, energy distribution, and propagation length Lp versus height for waveguides with Si microwire and SiO2 are shown. The numerical calculation results reveal a potential for use in applications such as optical force in trapping and transporting biomolecules, and in high-density integrated circuits.