Journal Article EFTEM Contrast Tuning and EELS Fine Structure Analysis for Characterization of Carbon Containing Ultra-Low-k Dielectric Materials Get access Brenda Prenitzer, Brenda Prenitzer NanoSpective, Inc., Orlando, Florida, USA Search for other works by this author on: Oxford Academic Google Scholar Stephen Schwarz, Stephen Schwarz NanoSpective, Inc., Orlando, Florida, USA Search for other works by this author on: Oxford Academic Google Scholar Brian Kempshall, Brian Kempshall NanoSpective, Inc., Orlando, Florida, USA Search for other works by this author on: Oxford Academic Google Scholar Imen Rezadad Imen Rezadad NanoSpective, Inc., Orlando, Florida, USAPhysics Department, University of Central Florida, Orlando, Florida, USA Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 21, Issue S3, 1 August 2015, Pages 831–832, https://doi.org/10.1017/S143192761500495X Published: 23 September 2015
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