External-cavity diode laser (ECDL) can continuously change the output wavelength by scanning its optical resonance cavity (ORC), which is a piezoelectric transducer (PZT) actuated mechanical system. However, because of the inherent hysteresis characteristic of PZT and limited system bandwidth, the dynamic response of the ORC system exhibits both the nonlinearity and vibration while high-frequency triangular wave scanning, thereby resulting in the degradation of the output wavelength performance of the ECDL. As a result, a trajectory optimization method is presented to improve the scanning characteristics of the ORC system. Firstly, the hysteresis behavior of PZT is described by the elliptic model to generate a compensation voltage for the PZT. Secondly, the cusp region of the compensation voltage is optimized by a frequency domain objective function to greatly reduce the high-order harmonic components of the compensation voltage. Finally, an optimal voltage trajectory for driving the ORC system is obtained. The experimental results demonstrate the validity of our proposed trajectory optimization method for simultaneously suppressing the nonlinearity and vibration of the ORC system within the scanning frequency of 100 Hz.
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