It is important to simulate the MEMS's working performance to make design effective. A collaborative and interactive design framework and implementation of a MEMS design system is presented based on the web manufacturing concept. Technologies used in dynamic web Java Server Pages (JSP) and computer graphics Virtual Reality Modelling Language (VRML) have been integrated. By comparing two approaches to controlling the VRML object, the advantages and limitations between them are discussed. A better interactive performance can be obtained by combining them. So a micro-beam virtual manufacturing system for the web has been developed based on the framework proposed.