Friction Stir Welding is a relatively new technique for joining metal. In some cases on aluminum joining, FSW gives better results compared with the arc welding processes, including the quality of welds and produces less distortion. The purpose of this study is to analyze the effect of high speed tool rotation on micro Friction Stir Spot Welding (μFSSW) to the shear fracture load of the welds. Response Surface Methods was used to analyze μFSSW parameters with the response. The welding material was Aluminum A1100, with thickness of 0.4 mm. The tool was made of HSS material which was shaped by micro grinding process. Tool shoulder diameter is 4 mm, and the pin diameter 1.5 mm with length of pin is 0.6 mm. The spindle speed is fixed at 33,000 rpm. The parameters that varied were the plunge speed (2 mm/min, 3 mm/min, 4 mm/min), and dwell time-1 (0 s, 2 s, 4 s) and variable of dwell time-2 (0 s, 2 s, 4 s). From the results of experiment and analysis, it is shown that the important welding parameter in high speed μFSSW process is dwell time-2.